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15:36, 31 July 2020
InP Etching result-CAIBE.pdf
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file
)
373 KB
1
12:54, 31 January 2019
IP180508.pptx
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file
)
377 KB
1
08:58, 19 August 2016
Ni Sputtering Film using Sputter 3.pdf
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file
)
383 KB
1
15:28, 18 March 2014
28-Very-low-pin-hole-density SiNx film at 300 C.pdf
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file
)
410 KB
1
10:23, 31 January 2019
SiO2 Etch using ICP2-no O2.pdf
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file
)
414 KB
2
08:51, 30 August 2016
Ni Sputtering Film using Sputter 3-a.pdf
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file
)
436 KB
1
14:02, 2 July 2018
SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf
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file
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446 KB
1
14:39, 11 September 2013
01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
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file
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495 KB
1
14:13, 24 September 2013
09-Plasma Etching of GaN-UnaxisPM1.pdf
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file
)
500 KB
1
09:19, 7 October 2013
20-Al-Sputtering-Film-Sputter-2.pdf
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file
)
599 KB
1
11:26, 2 October 2013
13-GaAs-AlGaAs Etching-RIE-5.pdf
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file
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599 KB
1
15:01, 28 July 2016
Ta and Cr E-beam deposition and wet etch test.pdf
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file
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600 KB
1
14:22, 18 April 2014
31-Holography Process for 1D-lines and 2D-dots-rev-3-13-2014.pdf
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file
)
624 KB
1
09:22, 21 January 2015
32-Reducing AlCl3 Corrosion with CHF3 plasma.pdf
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file
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636 KB
1
10:08, 29 July 2016
ZnS Plasma Etch-1.pdf
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file
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668 KB
1
13:47, 2 October 2013
14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf
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file
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671 KB
1
15:26, 28 July 2016
CeO2 Deposition-EBeam2.pdf
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file
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674 KB
1
09:53, 27 June 2017
Au-Sputter4-5mT-200W-120s.pdf
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file
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688 KB
1
15:40, 19 September 2013
08-Plasma Etching of GaN-RIE5.pdf
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file
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706 KB
1
08:59, 27 June 2017
Pt-Sputter4-3mT-50W-360s.pdf
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file
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722 KB
1
13:41, 2 October 2013
15-GaAs etch-Unaxis ICP etcher.pdf
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file
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765 KB
1
14:36, 2 September 2015
43-Issue with the etch of InP-InGaAs-and- InAlAs-b.pdf
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file
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838 KB
1
16:24, 17 February 2016
50-InP Etch-2-17-2016.pdf
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file
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842 KB
1
09:59, 25 September 2013
10-Si Etch using DRIE (single-step).pdf
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file
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843 KB
1
10:58, 2 October 2013
12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
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file
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870 KB
1
10:21, 27 January 2015
33-Etching SiO2 with Vertical Side-wall.pdf
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file
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924 KB
1
09:07, 17 September 2013
05-SiO2 Nano-structure Etch.pdf
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file
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937 KB
1
14:11, 28 July 2016
Amorphous Silicon Film Deposition using 12.5W bias on SiO2-Si.pdf
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file
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943 KB
1
09:33, 27 June 2017
TiW-Sputter4-4.5mT-300W-300s.pdf
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file
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957 KB
1
10:40, 3 October 2013
18-InP-based etching-Cl2N2Ar.pdf
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file
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985 KB
1
08:19, 3 October 2013
17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf
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file
)
1,009 KB
1
11:15, 5 July 2017
Lower-Etch-Rate InP Etch using Unaxis PM1 tool at 200 C.pdf
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file
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1.05 MB
1
14:39, 28 July 2016
ASi deposition and film stress using AV dep tool.pdf
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file
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1.07 MB
1
16:59, 30 January 2014
26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf
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file
)
1.07 MB
1
15:54, 13 January 2017
51-SiNx-Etch-Recipe-using-RIE3.pdf
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file
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1.07 MB
1
09:15, 27 June 2017
Pt-Sputter4.pdf
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file
)
1.21 MB
1
14:11, 18 April 2014
30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf
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file
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1.31 MB
1
15:10, 22 June 2015
THMR iP 3500 iP3600.pdf
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file
)
1.4 MB
1
15:42, 18 September 2013
07-GaN Etch-Panasonic-ICP-1.pdf
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file
)
1.43 MB
1
13:58, 10 August 2017
TiO2 film using Sputter4.pdf
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file
)
1.45 MB
1
16:22, 16 February 2016
47-Photolithography of SU8-2005.pdf
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file
)
1.55 MB
1
16:17, 13 March 2019
Operation Manual of JA Woollam Ellipsometer-a.pdf
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file
)
1.61 MB
1
13:58, 22 July 2015
42-Etching Platinum using Oxford Ion Mill Tool.pdf
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file
)
1.62 MB
1
14:08, 22 July 2015
42-Etching Platinum using Oxford Ion Mill Tool-a.pdf
(
file
)
1.62 MB
1
16:57, 30 January 2014
25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf
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file
)
1.74 MB
1
16:44, 30 January 2014
SPTS-Primaxx uEtch Presentation-b.pdf
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file
)
1.78 MB
1
12:44, 1 February 2019
InP Etch using Unaxis PM1 at 200 C-5.pdf
(
file
)
1.87 MB
1
16:23, 1 December 2015
45-Etching Nickel with Al2O3 Mask using Oxford Ion Mill Tool.pdf
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file
)
1.87 MB
1
16:41, 30 January 2014
SPTS-Primaxx uEtch Presentation-a.pdf
(
file
)
1.89 MB
1
15:49, 9 October 2015
44-Etching Gold with Al2O3 Mask using Oxford Ion Mill Tool.pdf
(
file
)
2.28 MB
1
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