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This special page shows all uploaded files.
| Date | Name | Thumbnail | Size | User | Description | Versions |
|---|---|---|---|---|---|---|
| 07:29, 28 June 2012 | Tystar.jpg (file) |  |
733 KB | Zwarburg | {{toolimage}} | 1 |
| 17:02, 25 September 2013 | TystarMechDrawWaferBoat.pdf (file) |  |
450 KB | Ray t | Mechanical Drawing for 4" Wafer Boat for Tystar Furnace (From Tystar) | 1 |
| 14:08, 18 March 2014 | Tystar Operational Procedure.pdf (file) | |
213 KB | Bosch | 1 | |
| 11:36, 6 September 2022 | UCSB-Facilities-Use-Agreement.pdf (file) | |
334 KB | Thibeault | 4 | |
| 13:04, 17 March 2020 | UCSB-Facilities-Use-Blanket-Waiver.pdf (file) | |
215 KB | John d | Facilities Use - Blanket Waiver for "Getting Lab Access" | 1 |
| 14:06, 26 March 2019 | UCSBTEST.png (file) |  |
1.69 MB | Biljana | 1 | |
| 12:56, 21 March 2023 | UCSBTEST1.png (file) |  |
6.52 MB | John d | Typical Recipe UCSB Gain2 for larger particulates | 2 |
| 08:54, 1 April 2020 | UCSBTEST1Gain4.jpg (file) |  |
162 KB | Biljana | scan for gain4 | 1 |
| 09:33, 1 April 2020 | UCSBTEST2.jpg (file) |  |
162 KB | Biljana | 1 | |
| 13:40, 26 March 2019 | UCSBTEST2 - gain4 for (0.160-1.60)um particles.png (file) | um_particles.png) |
1.45 MB | Biljana | 1 | |
| 12:55, 21 March 2023 | UCSBTEST2 .png (file) |  |
6.76 MB | John d | Typical Surfscan results for UCSB Gain4 for smaller particulates | 2 |
| 14:19, 26 March 2019 | UCSBTEST2 for small particles.png (file) |  |
1.45 MB | Biljana | 1 | |
| 11:34, 6 December 2022 | UCSB ASML DUV Stepper - Programming Worksheet.pptx (file) |  |
1.11 MB | John d | Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. | 1 |
| 02:32, 1 August 2018 | UCSB Dicing Guides - Die Location - 800px.png (file) |  |
816 KB | John d | 1 | |
| 02:24, 1 August 2018 | UCSB Dicing Guides - IMG 1199 annotated.jpg (file) |  |
133 KB | John d | 1 | |
| 02:26, 1 August 2018 | UCSB Dicing Guides - Image Location on Reticle - 800px.png (file) |  |
732 KB | John d | 1 | |
| 11:37, 6 September 2022 | UCSB Service Agreement.pdf (file) | |
239 KB | Thibeault | 5 | |
| 03:05, 1 August 2018 | UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png (file) |  |
25 KB | John d | 1 | |
| 13:10, 20 August 2012 | UNAXIS-VLR-InP-Etch-200C-Recipe.pdf (file) | |
44 KB | Zwarburg | 1 | |
| 13:12, 20 August 2012 | UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf (file) | |
44 KB | Zwarburg | 1 | |
| 17:58, 29 January 2019 | US Usage Map 2006-2018.png (file) |  |
1.3 MB | Thibeault | 1 | |
| 14:21, 22 April 2013 | UV210-Positive-Resist-Datasheet.pdf (file) | |
582 KB | Thibeault | 1 | |
| 11:17, 8 September 2017 | UV26-Positive-Resist-Datasheet.pdf (file) | |
364 KB | Thibeault | 2 | |
| 13:54, 22 April 2013 | UV6-Positive-Resist-Datasheet.pdf (file) | |
384 KB | Thibeault | Datasheet for UV6 positive resist for ASML stepper | 1 |
| 17:01, 24 August 2017 | UVN-30 - Negative-Resist-Datasheet - Apr 2004.pdf (file) | |
326 KB | John d | UVN-30 Datasheet - 2004 | 1 |
| 14:18, 22 April 2013 | UVN2300-Negative-Resist-Datasheet.pdf (file) | |
326 KB | Thibeault | 1 | |
| 14:16, 22 April 2013 | UVN30-Negative-Ressit-Datasheet.pdf (file) | |
326 KB | Thibeault | Negative resist for ASML Stepper - UVN2300 requires higher exposure | 1 |
| 10:37, 11 July 2012 | UVOlympus.jpg (file) |  |
1.98 MB | Zwarburg | {{toolimage}} | 1 |
| 15:41, 17 July 2018 | UV Ozone Manual Jelight M-144AX.pdf (file) | |
347 KB | John d | 1 | |
| 09:16, 29 August 2023 | UV Ozone SOP Rev A.pdf (file) | |
709 KB | Sawyer l | 2 | |
| 15:26, 17 October 2018 | UV Tape Chart.jpg (file) |  |
158 KB | Hopkins a | 1 | |
| 08:23, 13 September 2023 | Ultron 1042R Film specs.pdf (file) | |
67 KB | Sawyer l | 1 | |
| 17:25, 2 July 2012 | UnaxisICPInstructions.pdf (file) | |
22 KB | Zwarburg | 1 | |
| 10:56, 10 July 2012 | UnaxisPECVD.jpg (file) |  |
6.77 MB | Zwarburg | {{toolimage}} | 1 |
| 07:57, 28 June 2012 | UnaxisVLREtchInstructions.pdf (file) | |
79 KB | Zwarburg | 1 | |
| 07:52, 28 June 2012 | UnaxisVLRInstructions.pdf (file) | |
81 KB | Zwarburg | 1 | |
| 11:29, 20 April 2022 | Unaxis 01 45D 002.jpg (file) |  |
167 KB | Pakala | 1 | |
| 11:29, 20 April 2022 | Unaxis 01 CS 001.jpg (file) |  |
140 KB | Pakala | 1 | |
| 11:30, 20 April 2022 | Unaxis 02 45D 002.jpg (file) |  |
166 KB | Pakala | 1 | |
| 11:33, 20 April 2022 | Unaxis 02 CS 002.jpg (file) |  |
149 KB | Pakala | 1 | |
| 11:30, 20 April 2022 | Unaxis 02 CS 004.jpg (file) |  |
139 KB | Pakala | 1 | |
| 14:12, 28 April 2022 | Unaxis 03 45D 003.jpg (file) |  |
154 KB | Pakala | 1 | |
| 14:13, 28 April 2022 | Unaxis 03 CS 003.jpg (file) |  |
150 KB | Pakala | 1 | |
| 16:43, 21 March 2014 | Unaxis PM3 Web Operational Procedure 3-21-14.pdf (file) | |
331 KB | Bosch | 1 | |
| 16:43, 25 March 2014 | Unaxis PM3 Web Operational Procedure 3-25-14.pdf (file) | |
333 KB | Bosch | 1 | |
| 12:28, 27 March 2014 | Unaxis PM3 Web Operational Procedure 3-27-14.pdf (file) | |
333 KB | Bosch | Updated SiO2 Rate Table | 1 |
| 16:38, 21 March 2014 | Unaxis PM3 Web Operational Procedure 7-30-13.pdf (file) | |
331 KB | Bosch | 1 | |
| 10:00, 27 March 2020 | Unaxis SOP 3-12-2020.docx (file) | |
133 KB | Biljana | 1 | |
| 10:15, 27 March 2020 | Unaxis SOP 3-27-2020.pdf (file) | |
52 KB | Biljana | 1 | |
| 12:02, 30 March 2020 | Unaxis SOP 3-30-2020.docx (file) | |
134 KB | Biljana | 1 |
