Uploads by Biljana

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Date Name Thumbnail Size Description Versions
09:55, 11 September 2013 PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf (file) 130 KB   1
15:24, 10 October 2014 PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf (file) 1.24 MB   1
10:53, 1 October 2014 PECVD1-SiON-recipe 2014 LS SION recipe.pdf (file) 1.24 MB   1
11:22, 10 December 2014 PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf (file) 299 KB   1
15:42, 15 April 2014 PECVD1-SiO2-standard recipe 2014.pdf (file) 299 KB   1
16:34, 21 March 2014 PECVD1-SiO2-standard recipe 1000A.pdf (file) 1,007 KB   1
10:32, 10 December 2014 PECVD1-SiN standard recipe 2014.pdf (file) 299 KB   1
09:37, 13 March 2014 PECVD1-SiN data.pdf (file) 106 KB   1
14:55, 19 March 2014 PECVD1-SiN Data-March 2014.pdf (file) 101 KB   1
10:07, 13 March 2014 PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf (file) 103 KB   1
10:00, 13 March 2014 PECVD1-SiN Calibration-February 2014.pdf (file) 105 KB   1
10:25, 10 December 2014 PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf (file) 298 KB   1
14:58, 15 April 2014 PECVD1-SiN-standard recipe 2014.pdf (file) 298 KB   1
12:08, 20 March 2014 PECVD1-SiN-standard recipe 1000A.pdf (file) 295 KB   1
14:55, 15 April 2014 PECVD1-SiN-standard recipe 1000A-April 2014.pdf (file) 19 KB   1
14:43, 19 March 2014 PECVD1-SiN-standard recipe.pdf (file) 189 KB   1
15:39, 20 March 2014 PECVD1-SiN-1000A Standard recipe.pdf (file) 296 KB   1
16:53, 12 March 2014 PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf (file) 106 KB   1
16:23, 3 December 2014 PECVD1-LS SION recipe 2014.pdf (file) 1.24 MB   1
12:18, 10 December 2014 PECVD1-LS SION-recipe2014 LS SION recipe.pdf (file) 1.24 MB   1
16:37, 5 December 2014 PECVD1-LS SIN recipe 2014.pdf (file) 1.03 MB   1
11:42, 21 October 2014 PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf (file) 733 KB   1
16:39, 30 March 2020 PECVD.docx (file) 79 KB   1
12:00, 24 March 2014 Operating Ebeam1-2.pdf (file) 130 KB   1
12:12, 20 March 2014 New PECVD1 SIN Data-March 2014 SIN data.pdf (file) 117 KB   1
15:03, 8 January 2015 New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf (file) 594 KB   1
15:04, 8 January 2015 New PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf (file) 595 KB   1
15:31, 8 January 2015 New PECVD1-LS SION-recipe 2014 LS SION recipe.pdf (file) 1.59 MB   1
16:11, 8 January 2015 New PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf (file) 1.38 MB   1
10:03, 31 March 2014 New Operating Instructions Ebeam.pdf (file) 169 KB   1
10:26, 2 April 2014 New IBD TiO2 deposition.pdf (file) 0 bytes   1
14:41, 15 April 2014 New IBD TiO2 Data April 2014.pdf (file) 0 bytes   1
15:05, 31 March 2014 New IBD SiO2 Standard Recipe.pdf (file) 57 KB   1
14:14, 15 April 2014 New IBD SiN Data April 2014 IBD SIN data 2014.pdf (file) 122 KB   1
14:12, 15 April 2014 New IBD SiN Data April 2014.pdf (file) 0 bytes   1
10:35, 31 March 2014 New Advanced PECVD OXIDE 300C standard recipe.pdf (file) 41 KB   1
16:48, 8 April 2014 New Advanced PECVD LS NITRIDE2 April 2014.pdf (file) 0 bytes   1
16:57, 8 April 2014 New Advanced PECVD-Nitride2 300C standard recipe.pdf (file) 41 KB   1
10:37, 31 March 2014 New Advanced PECVD-LS Nitride2 300C standard recipe.pdf (file) 42 KB   1
11:54, 9 January 2015 New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf (file) 653 KB   1
11:56, 9 January 2015 New Adv PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf (file) 373 KB   1
11:57, 9 January 2015 New Adv PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf (file) 378 KB   1
08:52, 20 October 2017 New AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf (file) 380 KB   1
14:59, 11 December 2014 NewPECVD1-SiO2-standard recipe 2014.pdf (file) 299 KB   1
14:58, 11 December 2014 NewPECVD1-SiN-standard recipe 2014.pdf (file) 299 KB   1
10:52, 11 December 2014 NewAdvPECVD OXIDE 300C standard recipe.pdf (file) 653 KB   1
12:01, 11 December 2014 NewAdvPECVD-Nitride2 300C standard recipe.pdf (file) 373 KB   1
14:41, 11 December 2014 NewAdvPECVD-LS Nitride2 300C standard recipe.pdf (file) 378 KB   1
15:32, 24 March 2014 NEw Advanced PECVD OXIDE 300C standard recipe.pdf (file) 41 KB   1
15:26, 7 April 2020 Mask plate-Sign convention.png (file) 6 KB   1
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