File list
Jump to navigation
Jump to search
This special page shows all uploaded files.
| Date | Name | Thumbnail | Size | User | Description | Versions |
|---|---|---|---|---|---|---|
| 11:47, 14 February 2022 | ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (file) |  |
11 KB | John d | More comments to help users fill this out. | 7 |
| 11:09, 8 February 2022 | Oxford Cal 1 26 22 003 CS007.jpg (file) |  |
135 KB | Pakala | 1 | |
| 11:05, 8 February 2022 | Oxford Cal 1 26 22 001 CS 004.jpg (file) |  |
118 KB | Pakala | 1 | |
| 11:03, 8 February 2022 | Oxford Cal 1 26 22 003 45D 002.jpg (file) |  |
163 KB | Pakala | 1 | |
| 10:59, 8 February 2022 | Oxford Cal 1 26 22 001 45D 005.jpg (file) |  |
164 KB | Pakala | 1 | |
| 14:09, 2 February 2022 | MLA150 SOP Rev K (LS).pdf (file) |  |
2.05 MB | Sawyer l | 1 | |
| 12:09, 1 February 2022 | Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg (file) |  |
135 KB | Pakala | 1 | |
| 11:35, 1 February 2022 | Oxford InP Cal - SEM 45D 001.jpg (file) |  |
165 KB | Pakala | 1 | |
| 16:44, 26 January 2022 | EB -3 OPERATING INSTRUCTIONS docx.pdf (file) | |
35 KB | Freeborn d | 2 | |
| 23:03, 13 January 2022 | 2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (file) | |
1.53 MB | John d | Oxford ICP Etch Cals03 | 1 |
| 22:55, 13 January 2022 | 2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (file) | |
1.11 MB | John d | Oxford ICP Cal SEMs | 1 |
| 22:51, 13 January 2022 | 2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (file) | |
1.13 MB | John d | Oxford ICP Etch Cal SEMs | 1 |
| 11:15, 5 January 2022 | MLA150 SOP Rev J (LS).docx.pdf (file) | |
2.01 MB | Sawyer l | 1 | |
| 12:50, 4 January 2022 | ADT Dicing - Blade Exposure diagram.png (file) |  |
196 KB | John d | 1 | |
| 10:12, 4 January 2022 | Oxford Cobra 300 SOP v2021-12-14.pdf (file) | |
154 KB | Bosch t | 1 | |
| 10:58, 3 January 2022 | EB2 SOP Rev C.pdf (file) | |
3.02 MB | Sawyer l | 1 | |
| 10:24, 3 January 2022 | EVG Plasma Activation SOP Rev C.pdf (file) | |
676 KB | Sawyer l | 1 | |
| 16:10, 21 December 2021 | Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (file) | .png) |
543 KB | John d | Added scale bars 200µm | 2 |
| 12:15, 8 December 2021 | MA-6 4-inch BSA chuck - 2631 - measurements.jpg (file) |  |
1.11 MB | John d | 1 | |
| 09:57, 30 November 2021 | Cleaning Rules for Fluorine ICP Etch tool.pdf (file) | |
50 KB | Freeborn d | 1 | |
| 15:07, 18 November 2021 | Surfscan Low-Particle Example - G2.png (file) |  |
783 KB | John d | 1 | |
| 15:05, 18 November 2021 | Surfscan Low-Particle Example - G4.png (file) |  |
858 KB | John d | 1 | |
| 15:17, 9 November 2021 | SOFL0103.pdf (file) | |
70 KB | Ningcao | 1 | |
| 17:59, 8 November 2021 | IP210212.pdf (file) | |
61 KB | Ningcao | 1 | |
| 17:56, 8 November 2021 | IP210201.pdf (file) | |
42 KB | Ningcao | 1 | |
| 08:51, 1 November 2021 | MLA Quarter-Wafer Alignment.jpg (file) |  |
320 KB | John d | Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better. | 2 |
| 11:49, 12 October 2021 | Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg (file) |  |
1.86 MB | John d | 1 | |
| 10:42, 29 September 2021 | OxfordPlasmaPro.jpg (file) |  |
33 KB | John d | shrunk to 400px | 2 |
| 17:23, 21 September 2021 | CAD Tutorial for ASML Reticle v1 GDS.gds (file) | |
4 KB | John d | 1 | |
| 11:28, 10 September 2021 | ICP -1 Rules & Important Notes.pdf (file) | |
501 KB | Sawyer l | 1 | |
| 11:27, 10 September 2021 | ICP -1 Gas Change CHF3-Ar-CHF3.pdf (file) | |
498 KB | Sawyer l | 1 | |
| 15:38, 9 September 2021 | GCA Local Alignment Mark Dotted.gds (file) | |
62 KB | John d | 1 | |
| 15:36, 9 September 2021 | GCA Local Alignment Mark.gds (file) | |
2 KB | John d | 1 | |
| 15:27, 9 September 2021 | GCA Global Mark.gds (file) | |
2 KB | John d | 1 | |
| 12:39, 9 September 2021 | ADT SOP Rev D.pdf (file) | |
827 KB | Sawyer l | 1 | |
| 12:55, 3 September 2021 | Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (file) |  |
210 KB | John d | v2 - indicated when PR was fully removed | 2 |
| 14:08, 23 August 2021 | ADT Dicing Saw SOP Rev C.pdf (file) | |
638 KB | Sawyer l | 2 | |
| 14:08, 11 August 2021 | MA-6 Exp Mode Visual Aid.pdf (file) | |
566 KB | Sawyer l | 2 | |
| 14:05, 11 August 2021 | BA6 SOP Rev A.pdf (file) | |
1.78 MB | Sawyer l | 1 | |
| 18:45, 10 August 2021 | I2210411.pdf (file) | |
45 KB | Ningcao | 1 | |
| 14:17, 10 August 2021 | ADT Dicing Saw SOP Rev B.pdf (file) | |
634 KB | Sawyer l | 1 | |
| 19:24, 9 August 2021 | I2210508.pdf (file) | |
72 KB | Ningcao | 1 | |
| 14:15, 4 August 2021 | GCA Stepper MaskPlate Master-DarkField 5x.gds (file) | |
216 KB | John d | GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. | 1 |
| 18:27, 22 July 2021 | I2210308.pdf (file) | |
79 KB | Ningcao | 1 | |
| 08:33, 20 July 2021 | Autostep 200 Restart SOP June 2021.pdf (file) | |
6.2 MB | Sawyer l | 1 | |
| 13:18, 19 July 2021 | MLA150 Substrate Template Rules.pdf (file) | |
395 KB | Sawyer l | 1 | |
| 10:46, 13 July 2021 | 200um square v1.gds (file) | |
170 bytes | John d | TESTING only - please delte | 1 |
| 11:36, 2 July 2021 | RechargeApp - 02 - F+A auto v2.png (file) |  |
301 KB | John d | 1 | |
| 11:27, 2 July 2021 | RechargeApp - 01 - line items for other charges.png (file) |  |
61 KB | John d | 1 | |
| 14:02, 24 June 2021 | User Protocols Coronavirus 2020-09-14-1.pdf (file) | |
435 KB | Thibeault | 6 |
