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- 13:10, 21 March 2023 diff hist +385 Wafer scanning process traveler →Wafers to Use: mention regular prime grade Tag: Visual edit
- 13:07, 21 March 2023 diff hist +21 m Wafer scanning process traveler Tag: Visual edit
- 13:07, 21 March 2023 diff hist +1,043 Wafer scanning process traveler →Data Recording: updated surfscan photos, added examples of before/after and high particle photos. Tag: Visual edit
- 13:03, 21 March 2023 diff hist +57 N File:Surfscan P1 SiN 221208Z5G4 after.jpg current
- 12:59, 21 March 2023 diff hist +37 N File:Surfscan G4 before example - P1 230317E7G4 before.jpg current
- 12:56, 21 March 2023 diff hist 0 File:UCSBTEST1.png John d uploaded a new version of File:UCSBTEST1.png current
- 12:55, 21 March 2023 diff hist 0 File:UCSBTEST2 .png John d uploaded a new version of File:UCSBTEST2 .png current
- 16:24, 20 March 2023 diff hist +122 Calculators + Utilities →KLayout: like to U. waterloo KLayout vids Tag: Visual edit
- 16:05, 20 March 2023 diff hist +1,728 N Oxford Etcher - Sample Size Effect on Etch Rate pasted from old Process Control Dataa: Oxford_ICP_Etcher_-_Process_Control_Data current Tag: Visual edit: Switched
- 16:05, 20 March 2023 diff hist +179 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): link to Sample Size effect on ER Tag: Visual edit
- 16:02, 20 March 2023 diff hist +41 m Template:News link to all data
- 11:04, 20 March 2023 diff hist +3 Template:Announcements corected SEM #2 --> SEM#1
- 22:01, 18 March 2023 diff hist +27 N User:Mehalana v redirects to Vraj's correct staff page current Tags: New redirect Visual edit: Switched
- 10:27, 16 March 2023 diff hist -8 Stepper 3 (ASML DUV) →Operating Procedures: moved training procedure above Tag: Visual edit
- 12:22, 15 March 2023 diff hist +19 GCA 6300 Mask Making Guidance link to Autostep 200 mask page
- 12:21, 15 March 2023 diff hist +97 GCA 6300 Mask Making Guidance
- 12:16, 15 March 2023 diff hist 0 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:16, 15 March 2023 diff hist +25 m Stepper 2 (AutoStep 200) →Process Information Tag: Visual edit
- 12:15, 15 March 2023 diff hist +180 Stepper 2 (AutoStep 200) copied Mask making link to SOP section as well, minor formatting elsewhere. Tag: Visual edit
- 10:31, 15 March 2023 diff hist +2,035 Autostep 200 Mask Making Guidance addded Submission Details section Tag: Visual edit
- 16:23, 13 March 2023 diff hist 0 File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx John d uploaded a new version of File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx current
- 14:09, 10 March 2023 diff hist +643 Stepper Recipes →Stepper 3 (ASML DUV): added Process Control Data section
- 14:07, 10 March 2023 diff hist +45 m Process Group - Process Control Data Litho to Top of page, link to ASML recipes page
- 14:04, 10 March 2023 diff hist +738 Process Group - Process Control Data New Litho section + Stepper3 ASML section with links to process control data Tag: Visual edit: Switched
- 14:01, 10 March 2023 diff hist +1,321 Stepper 3 (ASML DUV) link to Process Control Data Tag: Visual edit
- 15:36, 5 March 2023 diff hist +114 XeF2 Etch (Xetch) Link to recipes oage Tag: Visual edit
- 00:17, 26 February 2023 diff hist +14 Template:Announcements →Flip-Chip Bonder repair
- 20:12, 25 February 2023 diff hist -16 Template:Announcements FCB update
- 10:17, 25 February 2023 diff hist +8 m Step Profilometer (DektakXT) added date of replacement Tag: Visual edit
- 16:00, 23 February 2023 diff hist +797 PECVD Recipes →ICP-PECVD (Unaxis VLR): cleaned up process control section, and added 800nm max SiO2 thickness before cleaning Tag: Visual edit
- 15:01, 21 February 2023 diff hist -51 Probe Station: I-V Curves with Keithley 2400 and Python Script anaconda inzstruction current Tag: Visual edit
- 09:53, 20 February 2023 diff hist +56 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): linked to new google sheets data Tag: Visual edit
- 21:45, 16 February 2023 diff hist +37 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: link to DUV FLood exposure Tag: Visual edit
- 21:43, 16 February 2023 diff hist +2 m Lithography Recipes fixed link Tag: Visual edit
- 21:42, 16 February 2023 diff hist +2 m Lithography Recipes remove TOC again
- 21:42, 16 February 2023 diff hist +36 Lithography Recipes →General Photolithography Techniques: made each section a linkable header level Tag: Visual edit
- 21:40, 16 February 2023 diff hist -2 m Lithography Recipes add TOC to get header link
- 12:36, 14 February 2023 diff hist +995 Frequently Asked Questions →General NanoFab Questions: added "what supplies do i need to bring?" Tag: Visual edit
- 12:21, 14 February 2023 diff hist -1 m Template:Announcements
- 18:31, 13 February 2023 diff hist -86 Template:Announcements FCB update
- 10:35, 13 February 2023 diff hist +323 Template:Announcements Unaxis Etch Down
- 10:34, 13 February 2023 diff hist +121 Template:Announcements FCB update
- 13:23, 10 February 2023 diff hist +168 Probe Station & Curve Tracer →Operation Procedures & Manuals: linked to probe station usage rules current Tag: Visual edit
- 09:28, 10 February 2023 diff hist -9 m Tool List →Electrical Analysis: fix QFI link Tag: Visual edit
- 00:25, 8 February 2023 diff hist +247 Maskless Aligner (Heidelberg MLA150) →Documentation: link to FEM tips Tag: Visual edit
- 16:32, 7 February 2023 diff hist +250 MLA150 - Design Guidelines →Greyscale Lithography: addded more info Tag: Visual edit
- 16:28, 7 February 2023 diff hist +833 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added "general process" for FEMs Tag: Visual edit
- 11:08, 7 February 2023 diff hist +6 Template:Announcements updated Dektak XT, link for training available
- 11:06, 7 February 2023 diff hist -54 Step Profilometer (DektakXT) updated that tool is availabel for training. Tag: Visual edit
- 11:37, 6 February 2023 diff hist +202 Template:Announcements added back the "ENDFEED" lines and updated comment to indicate not to delete this.
- 11:24, 1 February 2023 diff hist -28 m Foong Fatt current
- 11:24, 1 February 2023 diff hist -8 m Foong Fatt
- 11:19, 1 February 2023 diff hist +296 N Foong Fatt initial page copied from Demis D John Tag: Visual edit: Switched
- 11:17, 1 February 2023 diff hist -7 Staff List Afdded Foong Tag: Visual edit
- 14:56, 30 January 2023 diff hist +200 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added recipe tips, RF 1/RF 2/ignition tips. Tag: Visual edit
- 07:49, 30 January 2023 diff hist -4 Nanofab Job Postings deleted Process Engineer, added Undergrad process technician Tag: Visual edit
- 20:04, 29 January 2023 diff hist +314 Template:Announcements jeol sem down
- 16:05, 27 January 2023 diff hist +247 Template:Announcements FCB update
- 16:03, 27 January 2023 diff hist -21 Template:Announcements Oxford etcher update
- 14:48, 27 January 2023 diff hist +315 Template:Announcements SB6 down
- 14:46, 27 January 2023 diff hist +429 Template:Announcements MLA downtime Mon 2023-01-30 5:30pm
- 01:54, 27 January 2023 diff hist -549 Template:Announcements deleted GCA maintenance
- 01:52, 27 January 2023 diff hist -36 Template:Announcements blue-m oven UP
- 11:04, 26 January 2023 diff hist +21 m Template:Announcements blue m update
- 10:50, 26 January 2023 diff hist +206 Template:Announcements updated oxford
- 11:42, 25 January 2023 diff hist +3 Template:News →Wafer Polisher available: updated to Millerski
- 11:41, 25 January 2023 diff hist +243 Template:News dektak xt announcement
- 11:39, 25 January 2023 diff hist +249 Template:Announcements dektak xt notice
- 14:12, 24 January 2023 diff hist +18 Suss Aligners (SUSS MJB-3) →Optical Spectrum with No Filter: added "exposure" to clairfy which optical spectrum Tag: Visual edit
- 14:09, 24 January 2023 diff hist +38 m Suss Aligners (SUSS MJB-3) →IR Aligner Tag: Visual edit
- 14:51, 23 January 2023 diff hist +87 Wafer scanning process traveler Tag: Visual edit
- 14:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit
- 11:29, 23 January 2023 diff hist +157 Wafer scanning process traveler →Selecting a Haze range: added example Tag: Visual edit
- 11:27, 23 January 2023 diff hist -5,719 Wafer scanning process traveler deleted claibration and SPC sections (not installed) Tag: Visual edit
- 11:26, 23 January 2023 diff hist +14 m Wafer scanning process traveler Tag: Visual edit
- 11:24, 23 January 2023 diff hist +335 Wafer scanning process traveler →Scanning procedure for 4" Si wafers ( right indexer): added "run process step" section Tag: Visual edit
- 09:12, 23 January 2023 diff hist +339 Suss Aligners (SUSS MJB-3) added info on IR Aligner Tag: Visual edit
- 13:00, 20 January 2023 diff hist +101 ICP Etching Recipes →Process Control Data (Panasonic 2): header for Sio2 etch data Tag: Visual edit
- 12:59, 20 January 2023 diff hist +149 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): added placeholder for cleaning recipes Tag: Visual edit
- 12:56, 20 January 2023 diff hist +157 Process Group - Process Control Data increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
- 12:50, 20 January 2023 diff hist +969 Process Group - Process Control Data →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched
- 12:49, 20 January 2023 diff hist +831 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to ND's new Google sheets SPC data, removed "old" data, added example SPC image with link to gSheets Tag: Visual edit: Switched
- 12:46, 20 January 2023 diff hist +39 N File:Oxford-ICP-Etch Process Control Data Example.jpg current
- 12:39, 20 January 2023 diff hist +713 Process Group - Process Control Data →Panasonic ICP#2: lins to new google sheets data Tag: Visual edit: Switched
- 12:37, 20 January 2023 diff hist +551 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): link to google sheets SPC, added example plot w/ link to sheets, removed "Old data" Tag: Visual edit: Switched
- 12:34, 20 January 2023 diff hist +38 N File:ICP2 Process Control Data Example.jpg current
- 12:30, 20 January 2023 diff hist +46 m ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added CLeaning recipes "to be added" Tag: Visual edit
- 12:29, 20 January 2023 diff hist -2 m ICP Etching Recipes →Process Control Data (Panasonic 1)
- 12:29, 20 January 2023 diff hist -2 m Process Group - Process Control Data →Panasonic ICP #1
- 12:28, 20 January 2023 diff hist +1,189 Process Group - Process Control Data →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched
- 12:26, 20 January 2023 diff hist +214 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): re-added example chart with links to charts
- 12:21, 20 January 2023 diff hist +2 ICP Etching Recipes →SiO2 Etch with CHF3/CF4 - Process Control Data (Panasonic 1): fixed links
- 12:20, 20 January 2023 diff hist -4 m ICP Etching Recipes →Process Control Data (Panasonic 1) Tag: Visual edit
- 12:19, 20 January 2023 diff hist +109 ICP Etching Recipes →Process Control Data (Panasonic 1): added `link=` URL to gsheets plots
- 12:18, 20 January 2023 diff hist +486 ICP Etching Recipes →Process Control Data (Panasonic 1): lin to ND's google sheets data, added example image of SPC chart Tag: Visual edit
- 12:16, 20 January 2023 diff hist +47 N File:ICP1 Process Control Data Example.jpg current
- 12:10, 20 January 2023 diff hist +92 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (Fluorine ICP Etcher): inserted example chart with link to data Tag: Visual edit
- 12:09, 20 January 2023 diff hist +29 Process Group - Process Control Data →Etching (Process Control Data): formatted OLD data Tag: Visual edit
- 12:06, 20 January 2023 diff hist +58 N File:FL-ICP Process Control Data Example.jpg current
- 12:03, 20 January 2023 diff hist +13 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): corected toolname in header title Tag: Visual edit