User contributions
Jump to navigation
Jump to search
- 17:17, 10 May 2022 diff hist +3,304 N Process Group - Process Control Data Links to all PECVD and IBD data pages Tag: Visual edit
- 17:16, 10 May 2022 diff hist +71 m Sputtering Recipes minor updates Tag: Visual edit
- 17:15, 10 May 2022 diff hist +12 Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: mentioned ITO not installed, minor formatting Tag: Visual edit
- 17:06, 10 May 2022 diff hist +30 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit
- 17:01, 10 May 2022 diff hist -23 PECVD Recipes renamed Process Control plots for clarity Tag: Visual edit
- 16:35, 10 May 2022 diff hist +135 Nanofab Staff Internal Pages →Process Group: link to Process Control Data Tag: Visual edit
- 07:24, 10 May 2022 diff hist -108 Template:Announcements F50 up
- 12:17, 5 May 2022 diff hist +24 Test Data of etching SiO2 with CHF3/CF4 updated temperature reduction comment Tag: Visual edit
- 14:32, 4 May 2022 diff hist +3 PECVD Recipes →Si3N4 [ICP-PECVD]: corrected "current process data" links, previously pointed to "HDSiO" tab Tag: Visual edit
- 08:44, 4 May 2022 diff hist +354 Template:Announcements F50 down
- 08:41, 4 May 2022 diff hist -96 Template:Announcements →F10-RT Down: fixed links
- 08:40, 4 May 2022 diff hist +724 Template:Announcements F10-RT down
- 08:17, 4 May 2022 diff hist +2 Oxford ICP Etcher - Process Control Data modified comment on "brown gunk" observation. Tag: Visual edit
- 08:16, 4 May 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data →Dependence on Sample Size: set table row to header style Tag: Visual edit
- 08:13, 4 May 2022 diff hist -113 Oxford ICP Etcher - Process Control Data Add row explaining change in mask pattern Tag: Visual edit
- 16:21, 3 May 2022 diff hist -419 Template:Announcements deleted lasb closure
- 16:13, 2 May 2022 diff hist +291 S-Cubed Flexi - Operating Procedure link to DSK bake vs dev rate, recipe minor updates Tag: Visual edit
- 16:05, 2 May 2022 diff hist +2,188 S-Cubed Flexi - Operating Procedure inital procedure, and initial recipes Tag: Visual edit
- 11:14, 29 April 2022 diff hist +161 Oxford ICP Etcher - Process Control Data bolded the title row Tag: Visual edit
- 14:27, 28 April 2022 diff hist +45 Unaxis VLR Etch - Process Control Data comments on undercut profile from 3/29/22 Tag: Visual edit
- 17:48, 27 April 2022 diff hist +355 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer mentioned switching Imaging PR Tag: Visual edit
- 17:45, 27 April 2022 diff hist +23 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:39, 27 April 2022 diff hist +10 m Lithography Recipes →Lift-Off Recipes Tag: Visual edit
- 17:35, 27 April 2022 diff hist +4,054 Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer wrote initial process Tag: Visual edit
- 16:34, 27 April 2022 diff hist +891 N Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added Tips, copied from DUV Liftoff page Tag: Visual edit
- 16:32, 27 April 2022 diff hist +142 Lift-Off with DUV Imaging + PMGI Underlayer corrected typo current Tag: Visual edit
- 16:29, 27 April 2022 diff hist -23 Lift-Off with DUV Imaging + PMGI Underlayer →Tips: fixed link to liftoff tutorial Tag: Visual edit
- 16:25, 27 April 2022 diff hist +633 Lithography Recipes →Lift-Off Recipes: link to I-Line Liftoff w/ LOL underlayer Tag: Visual edit
- 18:49, 26 April 2022 diff hist +72 Template:Announcements updated lab closure msg
- 15:51, 26 April 2022 diff hist +200 Unaxis VLR Etch - Process Control Data →Data - InP Ridge Etch (Unaxis VLR): updated chamber conditioning Tag: Visual edit
- 12:03, 25 April 2022 diff hist +339 Microscopes added AmScope camera model #, minor changes to liknj to Amscope section Tag: Visual edit
- 19:02, 20 April 2022 diff hist +49 Tool List →Dry Etch: added Raith Velion to Dry Etch > Ion Milling section Tag: Visual edit
- 23:31, 19 April 2022 diff hist +200 Dry Etching Recipes added Nb, Os rows, "A" for Pan1/2 Tag: Visual edit
- 23:14, 19 April 2022 diff hist +174 Thermal Processing Recipes →Bonding with Intermediate layer: link to Logitech recipes page Tag: Visual edit
- 11:54, 19 April 2022 diff hist -36 m Template:Announcements →LEXT Confocal: DOWN: fix link
- 11:53, 19 April 2022 diff hist +154 Template:Announcements →LEXT Confocal: DOWN: linked to DX-1000
- 11:51, 19 April 2022 diff hist +117 Template:Announcements updated floor cleaning closure
- 13:09, 15 April 2022 diff hist -799 Unaxis VLR Etch - Process Control Data added WorkInProgress, example table rows Tag: Visual edit
- 13:08, 15 April 2022 diff hist +1,403 N Unaxis VLR Etch - Process Control Data pasted table from Oxford ICP Tag: Visual edit: Switched
- 13:06, 15 April 2022 diff hist +9 ICP Etching Recipes →ICP-Etch (Unaxis VLR): link to Process Control Data Tag: Visual edit
- 13:02, 15 April 2022 diff hist +233 ICP Etching Recipes added Process Control Data sections for each tool Tag: Visual edit
- 11:56, 15 April 2022 diff hist +72 Process Group - Remote Fabrication Jobs fixed links to Equipment work Tag: Visual edit
- 20:51, 13 April 2022 diff hist -228 Template:Announcements Deleted DUVscope
- 20:49, 13 April 2022 diff hist +229 Template:Announcements Friday lab closure
- 17:45, 12 April 2022 diff hist +225 Dry Etching Recipes Oxford links to GaN+GaAs recipes Tag: Visual edit
- 17:43, 12 April 2022 diff hist +5 Dry Etching Recipes Oxford GaN link Tag: Visual edit
- 17:43, 12 April 2022 diff hist +1 m ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra) Tag: Visual edit
- 17:40, 12 April 2022 diff hist +275 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to GaN etch recipes Tag: Visual edit
- 13:12, 12 April 2022 diff hist -632 Template:Announcements deleted MJB, EBL service
- 12:50, 12 April 2022 diff hist +3 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher