User contributions
Jump to navigation
Jump to search
- 12:49, 12 April 2022 diff hist +1 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher moved cals table to the top
- 21:08, 7 April 2022 diff hist +1,997 N ASML Stepper 3 - Job Creator initial description of usage and caveats current Tag: Visual edit
- 12:12, 7 April 2022 diff hist +105 Frequently Asked Questions →Authorship on Publications: added local technicians are put as authors Tag: Visual edit
- 10:17, 5 April 2022 diff hist +368 Template:Announcements added JEOL EBL service
- 10:48, 4 April 2022 diff hist +264 Template:Announcements added Lee's MJB service
- 12:55, 31 March 2022 diff hist +10 IBD: Calibrating Optical Thickness added approx year developed Tag: Visual edit
- 12:54, 31 March 2022 diff hist +241 IBD: Calibrating Optical Thickness minor updates Tag: Visual edit
- 12:51, 31 March 2022 diff hist 0 File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png John d uploaded a new version of File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png current
- 12:50, 31 March 2022 diff hist -42 Ion Beam Deposition (Veeco NEXUS) →Recipes: DBR Calibration-Method page created, removed the "avaialbel from process group" text Tag: Visual edit
- 12:49, 31 March 2022 diff hist +4,212 N IBD: Calibrating Optical Thickness initial version, full method described, images inserted. Tag: Visual edit
- 12:43, 31 March 2022 diff hist +97 N File:IBD 9-period DBR - Reflectivity Spectrum (EMpy).png current
- 12:36, 31 March 2022 diff hist +105 N File:IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png
- 13:30, 29 March 2022 diff hist +13 m ICP-PECVD (Unaxis VLR) →Recipes: format link to bold/underline Tag: Visual edit
- 05:20, 26 March 2022 diff hist +173 Microscopes note about turning turrets by hand Tag: Visual edit
- 05:19, 26 March 2022 diff hist +165 UCSB NanoFab Microscope Training added not about turning obj turrets by hand Tag: Visual edit
- 14:09, 23 March 2022 diff hist +341 Template:Announcements GCA service added
- 14:08, 23 March 2022 diff hist +228 Template:Announcements DUV Scope update
- 10:40, 23 March 2022 diff hist +4 m Calculators + Utilities →Example CAD File Tag: Visual edit
- 10:29, 23 March 2022 diff hist +36 Stepper 3 (ASML DUV) →Design & Fabrication Tools: Changed title to "Design Tools". JobCreator: mention remotely-uploadable, Tag: Visual edit
- 12:31, 22 March 2022 diff hist +164 m Maskless Aligner (Heidelberg MLA150) →Video Trainings: minor formatting Tag: Visual edit
- 12:29, 22 March 2022 diff hist +6 Dry Etching Recipes fixed link to FL-ICP recipes Tag: Visual edit
- 11:02, 22 March 2022 diff hist +30 m Optical Film Thickness (Nanometric) formatting "unavaialble" note Tag: Visual edit
- 10:59, 22 March 2022 diff hist +108 Optical Film Thickness (Nanometric) Note stating tool removed from lab. Tag: Visual edit
- 16:10, 21 March 2022 diff hist +66 COVID-19 User Policies masks optional, added "in progress" to full policies. Tag: Visual edit
- 16:08, 21 March 2022 diff hist -438 Template:Announcements New COVID letter from chancellor. deleted ASML maint. LEXT down.
- 17:06, 3 March 2022 diff hist +9 Chemical-Mechanical Polisher (Logitech) link to Logitech Bonder Tag: Visual edit
- 17:04, 3 March 2022 diff hist +126 Wafer Bonder (Logitech WBS7) →About: links to applicable tools Tag: Visual edit
- 12:45, 3 March 2022 diff hist 0 PECVD Recipes →Low-Stress SiN deposition (PECVD #2): bullet formatting Tag: Visual edit: Switched
- 12:31, 3 March 2022 diff hist +178 PECVD Recipes →PECVD 2 (Advanced Vacuum): link to LS-SiN plots Tag: Visual edit
- 12:28, 3 March 2022 diff hist 0 m OLD - PECVD2 Recipes John d moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect: this page is not linked anywhere, looks like 2014 data only current
- 15:06, 1 March 2022 diff hist +2 Tool List →Packaging: fixed FLip-scribe link Tag: Visual edit
- 15:06, 1 March 2022 diff hist 0 m Wafer Cleaver (PELCO Flip-Scribe) John d moved page Wafer Cleaver (PELCO LatticeAx) to Wafer Cleaver (PELCO Flip-Scribe) without leaving a redirect: wrong name
- 14:59, 1 March 2022 diff hist +646 KLayout Design Tips Added Editing Mode Tag: Visual edit
- 09:46, 1 March 2022 diff hist +303 Wafer Cleaver (PELCO Flip-Scribe) LatticeAx --> Flip-Scribe Tag: Visual edit
- 09:43, 1 March 2022 diff hist +115 Wafer Cleaver (PELCO Flip-Scribe) links to Mfg
- 09:35, 1 March 2022 diff hist +43 N File:LatticeAx.jpg Image of PELCO LAtticeAx tool current
- 09:27, 1 March 2022 diff hist +864 N Wafer Cleaver (PELCO Flip-Scribe) new tool page
- 09:20, 1 March 2022 diff hist +243 Tool List →Packaging: added sub-categories, Linked to new LatticeAx tool Tag: Visual edit
- 08:56, 1 March 2022 diff hist +130 m Contact Aligner (SUSS MA-6) →About: minor rearrangement Tag: Visual edit
- 08:52, 1 March 2022 diff hist +62 m Contact Aligner (SUSS MA-6) linked to SB6 Bonder page Tag: Visual edit
- 16:08, 28 February 2022 diff hist +462 Step Profilometer (KLA Tencor P-7) →Detailed Specifications: added basic info Tag: Visual edit
- 08:59, 26 February 2022 diff hist +27 m ICP Etching Recipes →Old Deleted Recipes: changed "don" to "supervisor" Tag: Visual edit
- 09:44, 21 February 2022 diff hist +108 Process Group - Remote Fabrication Jobs link to takss/priority list Tag: Visual edit
- 13:44, 17 February 2022 diff hist +327 ICP-PECVD (Unaxis VLR) →About: mention SiD4 config and expense/applicaiton Tag: Visual edit
- 13:43, 17 February 2022 diff hist +116 PECVD Recipes →ICP-PECVD (Unaxis VLR): mention cost/application to optics Tag: Visual edit
- 18:03, 16 February 2022 diff hist +340 Maskless Aligner (Heidelberg MLA150) added minimum fearture size and note on DSP transparent substrates Tag: Visual edit
- 11:48, 14 February 2022 diff hist +72 N File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current Tag: New redirect
- 11:48, 14 February 2022 diff hist 0 m File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d moved page File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx to File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx: Rename to include reticle barcode in filename current
- 11:47, 14 February 2022 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 13:49, 11 February 2022 diff hist +53 m ICP Etch 2 (Panasonic E626I) →Recipes Tag: Visual edit