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- 08:00, 30 September 2021 diff hist -1 m Template:Announcements
- 08:00, 30 September 2021 diff hist -122 Template:Announcements Oxford ICP
- 21:30, 29 September 2021 diff hist -7 m Template:News →Oxford PlasmaPro ICP Etcher Cobra installed
- 21:29, 29 September 2021 diff hist -10 m Template:News
- 16:09, 29 September 2021 diff hist -23 m Maskless Aligner (Heidelberg MLA150) fixed HIMT link Tag: Visual edit
- 12:13, 29 September 2021 diff hist +22 m ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit
- 11:59, 29 September 2021 diff hist +143 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated ICP/RF powers Tag: Visual edit
- 11:27, 29 September 2021 diff hist +475 Template:News ADDED OXFROD ICP etch
- 11:19, 29 September 2021 diff hist +24 Oxford ICP Etcher (PlasmaPro 100 Cobra) updates to allowed materials Tag: Visual edit
- 10:45, 29 September 2021 diff hist +124 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit
- 10:42, 29 September 2021 diff hist 0 File:OxfordPlasmaPro.jpg John d uploaded a new version of File:OxfordPlasmaPro.jpg current
- 10:41, 29 September 2021 diff hist +36 N File:OxfordPlasmaPro.jpg Photo from User Manual
- 19:19, 28 September 2021 diff hist +15 m MLA150 - Troubleshooting →Aligning to a quarter-wafer Tag: Visual edit
- 19:18, 28 September 2021 diff hist +182 MLA150 - Troubleshooting →Aligning to a quarter-wafer: inserted schematic Tag: Visual edit
- 19:16, 28 September 2021 diff hist +68 N File:MLA Quarter-Wafer Alignment.jpg
- 19:01, 28 September 2021 diff hist +183 MLA150 - Troubleshooting →Aligning to a quarter-wafer: minor description update Tag: Visual edit
- 18:57, 28 September 2021 diff hist +2,034 MLA150 - Troubleshooting added ALigning to a Quarter Wafer Tag: Visual edit
- 21:39, 27 September 2021 diff hist +2 m MLA150 - CAD Files and Templates Tag: Visual edit
- 21:39, 27 September 2021 diff hist +23 m MLA150 - CAD Files and Templates →Resolution and Calibration Patterns Tag: Visual edit
- 21:37, 27 September 2021 diff hist -1 m Maskless Aligner (Heidelberg MLA150) →Troubleshooting & Known Bugs
- 21:36, 27 September 2021 diff hist +37 m Maskless Aligner (Heidelberg MLA150) →Detailed Specifications Tag: Visual edit
- 21:35, 27 September 2021 diff hist +105 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: renaming/reorg for clarify Tag: Visual edit: Switched
- 17:02, 27 September 2021 diff hist +60 ICP Etching Recipes →Photoresist & ARC (Fluorine ICP Etcher): subheadings for BARC and PR strip Tag: Visual edit
- 22:10, 23 September 2021 diff hist -44 Template:Publications →Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask: fixed FL-ICP link
- 15:57, 23 September 2021 diff hist +91 Template:Announcements wifi update
- 10:26, 23 September 2021 diff hist -83 Dicing Saw (ADT) →Detailed Specifications: deleted old SOP, Lee's SOP only Tag: Visual edit
- 10:14, 23 September 2021 diff hist -64 Dicing Saw (ADT) →Recipes: corrected link to recipes Tag: Visual edit
- 10:11, 23 September 2021 diff hist +17 Packaging Recipes →Dicing Saw Recipes (ADT 7100): link to Thermocarbon website Tag: Visual edit
- 17:25, 21 September 2021 diff hist +68 Calculators + Utilities →Example CAD File: GDS version of CAD Tutorial Tag: Visual edit
- 17:23, 21 September 2021 diff hist +27 N File:CAD Tutorial for ASML Reticle v1 GDS.gds current
- 17:21, 21 September 2021 diff hist -1,195 Calculators + Utilities →KLayout: moved KLayout tips to separate Klayout tips page Tag: Visual edit
- 17:20, 21 September 2021 diff hist +1,952 KLayout Design Tips pasted more tips from Calc+Utilities page Tag: Visual edit
- 17:08, 21 September 2021 diff hist +374 Calculators + Utilities →Material Parameters: added Lesker links Tag: Visual edit
- 17:04, 21 September 2021 diff hist +302 Calculators + Utilities →KLayout: minor updates to KLayout / Circles Tag: Visual edit
- 16:02, 21 September 2021 diff hist -168 Calculators + Utilities →L-Edit: updated to ECE's license Tag: Visual edit
- 17:32, 20 September 2021 diff hist +23 m Template:Announcements
- 17:32, 20 September 2021 diff hist +253 Template:Announcements UCSB netowrk problems
- 14:18, 11 September 2021 diff hist +1 Dry Etching Recipes FL-ICP: SiN = A Tag: Visual edit
- 21:44, 10 September 2021 diff hist +381 Sputter 5 (AJA ATC 2200-V) link to sputter 3/4 procedures, link to SUM page for targets, and ToolInfo toolID added Tag: Visual edit
- 21:36, 10 September 2021 diff hist +62 m Sputter 3 (AJA ATC 2000-F) →Materials Table: minor cleanup Tag: Visual edit
- 21:34, 10 September 2021 diff hist +290 Sputter 4 (AJA ATC 2200-V) link to recipes page, rearranged specs, materials at bottom Tag: Visual edit
- 17:07, 9 September 2021 diff hist +1,173 Stepper Recipes linked to PR datasheets Tag: Visual edit
- 15:59, 9 September 2021 diff hist +67 Stepper 2 (AutoStep 200) move mask-making to "process info" Tag: Visual edit
- 15:40, 9 September 2021 diff hist +687 Stepper 2 (AutoStep 200) →Process Information: aded CAD files section Tag: Visual edit
- 15:38, 9 September 2021 diff hist +68 N File:GCA Local Alignment Mark Dotted.gds current
- 15:36, 9 September 2021 diff hist +48 N File:GCA Local Alignment Mark.gds current
- 15:31, 9 September 2021 diff hist +12 Stepper 1 (GCA 6300) →Process Information: added CAD Files heading Tag: Visual edit
- 15:29, 9 September 2021 diff hist +522 Stepper 1 (GCA 6300) →Process Information: links to Photomask & Alignment CAD files Tag: Visual edit
- 15:27, 9 September 2021 diff hist +46 N File:GCA Global Mark.gds current
- 15:19, 8 September 2021 diff hist +650 Template:Announcements added MikeS's Stepper 1+2 PM's