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- 15:23, 19 October 2020 diff hist -23 MediaWiki:Sidebar
- 15:20, 19 October 2020 diff hist +14 MediaWiki:Sidebar
- 15:20, 19 October 2020 diff hist -1 MediaWiki:Sidebar
- 15:19, 19 October 2020 diff hist -21 MediaWiki:Sidebar deleted search and navigation *'s
- 08:45, 14 October 2020 diff hist +732 DSEIII (PlasmaTherm/Deep Silicon Etcher) updated text, added Clamp text Tag: Visual edit
- 08:39, 14 October 2020 diff hist +52 N File:DSEIII.jpg Phoot of Plasma-Therm DSE-iii in Bay 2 current
- 07:13, 14 October 2020 diff hist +1 m Direct-Write Lithography Recipes updated THMR thickness Tag: Visual edit
- 07:12, 14 October 2020 diff hist +20 m COVID-19 User Policies →Policy Updates Tag: Visual edit
- 07:09, 14 October 2020 diff hist +73 COVID-19 User Policies →UCSB Flu Vaccination Mandate: updated vacc. logging Tag: Visual edit
- 19:47, 13 October 2020 diff hist +480 Template:Announcements added flu vaccine
- 19:43, 13 October 2020 diff hist +225 COVID-19 User Policies flu update
- 19:38, 13 October 2020 diff hist -7 m COVID-19 User Policies
- 19:38, 13 October 2020 diff hist +7 m COVID-19 User Policies
- 19:37, 13 October 2020 diff hist 0 m COVID-19 User Policies
- 19:37, 13 October 2020 diff hist +731 COVID-19 User Policies added flu vaccination mandate Tag: Visual edit
- 18:44, 10 October 2020 diff hist +143 Direct-Write Lithography Recipes →Positive Resist (MLA150): added THMR recipe Tag: Visual edit
- 21:52, 9 October 2020 diff hist +59 m Direct-Write Lithography Recipes "Exposure Time" → "Exposure Dose (mJ/cm2)" Tag: Visual edit
- 08:12, 9 October 2020 diff hist +484 Photoluminescence PL Setup (Custom) added more info Tag: Visual edit
- 08:06, 9 October 2020 diff hist +170 Holographic Lith/PL Setup (Custom) link to PL system page Tag: Visual edit
- 08:02, 9 October 2020 diff hist +81 m Holographic Lith/PL Setup (Custom) →About: added term "holography" for searching, changed PR to THMR and linked Tag: Visual edit: Switched
- 17:55, 7 October 2020 diff hist +154 Nanofab Staff Internal Pages added placeholders for other sections Tag: Visual edit
- 16:14, 6 October 2020 diff hist +104 Maskless Aligner (Heidelberg MLA150) →About: added some equip specs Tag: Visual edit
- 23:03, 2 October 2020 diff hist +9 m Direct-Write Lithography Recipes →Greyscale Lithography: added model to header title
- 22:49, 2 October 2020 diff hist +118 Maskless Aligner (Heidelberg MLA150) →About: minor updates Tag: Visual edit
- 16:29, 2 October 2020 diff hist +23 Maskless Aligner (Heidelberg MLA150) Added photo
- 16:28, 2 October 2020 diff hist +64 N File:MLA150 Heidelberg Bay 6 Photo.jpg Photo of Heidelberg MLA 150 in Bay 6 after install current
- 16:27, 2 October 2020 diff hist +876 Direct-Write Lithography Recipes Added PR's we are characterizing Tag: Visual edit: Switched
- 16:23, 2 October 2020 diff hist +4 Lithography Recipes →Photolithography Recipes: Added 4620 "A" on I-line tools Tag: Visual edit
- 16:07, 30 September 2020 diff hist +405 Goniometer (Rame-Hart A-100) - Operating Procedure added "Tile Angle" techique current Tag: Visual edit
- 16:03, 30 September 2020 diff hist 0 Film Stress (Tencor Flexus) moved to bay 1
- 14:35, 28 September 2020 diff hist +203 m Lithography Recipes →Photolithography Recipes: minor instructions/hints Tag: Visual edit
- 14:26, 28 September 2020 diff hist +720 Maskless Aligner (Heidelberg MLA150) →About: updated some specs Tag: Visual edit
- 23:14, 27 September 2020 diff hist +308 Template:Announcements links to Velion + MLA tool pages
- 23:11, 27 September 2020 diff hist -67 Lithography Recipes →Photolithography Recipes: deleted SPR 950-0.8 row Tag: Visual edit
- 23:11, 27 September 2020 diff hist +778 m Lithography Recipes "A" on MLA --> SU-8 2075 Tag: Visual edit
- 23:07, 27 September 2020 diff hist -290 Template:Announcements deleted ICP1 and IBD messages
- 15:51, 25 September 2020 diff hist +94 m Stepper 3 (ASML DUV) →Online Video Trainings: disclaimer about supervisor training Tag: Visual edit
- 15:48, 25 September 2020 diff hist +299 Stepper 3 (ASML DUV) →Operating Procedures: added Video Training: Part 2 Tag: Visual edit
- 00:54, 23 September 2020 diff hist +290 Template:Announcements added Pan2 & IBD
- 17:50, 22 September 2020 diff hist -200 Template:Announcements deleted lab shutdown notice
- 23:24, 21 September 2020 diff hist -219 Template:Announcements removed network issues
- 13:41, 21 September 2020 diff hist +44 m Template:Announcements →Lab Shutdown: Some tools still down
- 13:38, 21 September 2020 diff hist -40 Template:Announcements shutdown update
- 19:38, 18 September 2020 diff hist +233 ASML 5500 Mask Making Guidelines →Templates: details on on-wafer mark CAD Tag: Visual edit
- 18:03, 18 September 2020 diff hist +1,059 Lithography Recipes →Photolithography Recipes: linked to all PR datasheets Tag: Visual edit
- 17:52, 18 September 2020 diff hist +57 Lithography Recipes →Chemicals Stocked + Datasheets: added Az 4620 Tag: Visual edit
- 17:51, 18 September 2020 diff hist +59 N File:Az p4620 photoresist data package.pdf info on Az 4620 photoresist, spin curves etc. current
- 17:43, 18 September 2020 diff hist +45 Lithography Recipes rename to "UV Optical Lithography" Tag: Visual edit
- 17:41, 18 September 2020 diff hist +103 Lithography Recipes rearrange manual TOC Tag: Visual edit
- 17:34, 18 September 2020 diff hist -3 Lithography Recipes →Lift-Off Techniques: changed to Liftoff Recipes Tag: Visual edit