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- 16:14, 6 October 2020 diff hist +104 Maskless Aligner (Heidelberg MLA150) →About: added some equip specs Tag: Visual edit
- 23:03, 2 October 2020 diff hist +9 m Direct-Write Lithography Recipes →Greyscale Lithography: added model to header title
- 22:49, 2 October 2020 diff hist +118 Maskless Aligner (Heidelberg MLA150) →About: minor updates Tag: Visual edit
- 16:29, 2 October 2020 diff hist +23 Maskless Aligner (Heidelberg MLA150) Added photo
- 16:28, 2 October 2020 diff hist +64 N File:MLA150 Heidelberg Bay 6 Photo.jpg Photo of Heidelberg MLA 150 in Bay 6 after install current
- 16:27, 2 October 2020 diff hist +876 Direct-Write Lithography Recipes Added PR's we are characterizing Tag: Visual edit: Switched
- 16:23, 2 October 2020 diff hist +4 Lithography Recipes →Photolithography Recipes: Added 4620 "A" on I-line tools Tag: Visual edit
- 16:07, 30 September 2020 diff hist +405 Goniometer (Rame-Hart A-100) - Operating Procedure added "Tile Angle" techique current Tag: Visual edit
- 16:03, 30 September 2020 diff hist 0 Film Stress (Tencor Flexus) moved to bay 1
- 14:35, 28 September 2020 diff hist +203 m Lithography Recipes →Photolithography Recipes: minor instructions/hints Tag: Visual edit
- 14:26, 28 September 2020 diff hist +720 Maskless Aligner (Heidelberg MLA150) →About: updated some specs Tag: Visual edit
- 23:14, 27 September 2020 diff hist +308 Template:Announcements links to Velion + MLA tool pages
- 23:11, 27 September 2020 diff hist -67 Lithography Recipes →Photolithography Recipes: deleted SPR 950-0.8 row Tag: Visual edit
- 23:11, 27 September 2020 diff hist +778 m Lithography Recipes "A" on MLA --> SU-8 2075 Tag: Visual edit
- 23:07, 27 September 2020 diff hist -290 Template:Announcements deleted ICP1 and IBD messages
- 15:51, 25 September 2020 diff hist +94 m Stepper 3 (ASML DUV) →Online Video Trainings: disclaimer about supervisor training Tag: Visual edit
- 15:48, 25 September 2020 diff hist +299 Stepper 3 (ASML DUV) →Operating Procedures: added Video Training: Part 2 Tag: Visual edit
- 00:54, 23 September 2020 diff hist +290 Template:Announcements added Pan2 & IBD
- 17:50, 22 September 2020 diff hist -200 Template:Announcements deleted lab shutdown notice
- 23:24, 21 September 2020 diff hist -219 Template:Announcements removed network issues
- 13:41, 21 September 2020 diff hist +44 m Template:Announcements →Lab Shutdown: Some tools still down
- 13:38, 21 September 2020 diff hist -40 Template:Announcements shutdown update
- 18:03, 18 September 2020 diff hist +1,059 Lithography Recipes →Photolithography Recipes: linked to all PR datasheets Tag: Visual edit
- 17:52, 18 September 2020 diff hist +57 Lithography Recipes →Chemicals Stocked + Datasheets: added Az 4620 Tag: Visual edit
- 17:51, 18 September 2020 diff hist +59 N File:Az p4620 photoresist data package.pdf info on Az 4620 photoresist, spin curves etc. current
- 17:43, 18 September 2020 diff hist +45 Lithography Recipes rename to "UV Optical Lithography" Tag: Visual edit
- 17:41, 18 September 2020 diff hist +103 Lithography Recipes rearrange manual TOC Tag: Visual edit
- 17:34, 18 September 2020 diff hist -3 Lithography Recipes →Lift-Off Techniques: changed to Liftoff Recipes Tag: Visual edit
- 22:37, 16 September 2020 diff hist -84 m COVID-19 User Policies →UCSB Wellness Survey: delete duplicate line Tag: Visual edit
- 19:07, 16 September 2020 diff hist +358 COVID-19 User Policies →UCSB Wellness Survey: added Online presentation link Tag: Visual edit
- 10:27, 15 September 2020 diff hist -53 Microscopes Updated scope locations in lab Tag: Visual edit
- 07:36, 15 September 2020 diff hist +415 Template:Announcements power outage Sept 19th
- 06:28, 15 September 2020 diff hist 0 m COVID-19 User Policies Tag: Visual edit
- 06:24, 15 September 2020 diff hist +84 COVID-19 User Policies →UCSB Wellness Survey: link to BrianT's contact info Tag: Visual edit
- 06:22, 15 September 2020 diff hist +168 Template:Nav link to COVID-19 User Policies current
- 06:18, 15 September 2020 diff hist +95 Template:Announcements link to COVID-19_User_Policies
- 06:14, 15 September 2020 diff hist +4 m COVID-19 User Policies →Policy Updates Tag: Visual edit
- 06:13, 15 September 2020 diff hist +21 m COVID-19 User Policies
- 06:12, 15 September 2020 diff hist -2 m COVID-19 User Policies minor formatting Tag: Visual edit
- 06:11, 15 September 2020 diff hist +188 COVID-19 User Policies minor formatting, table for announcements Tag: Visual edit: Switched
- 20:27, 14 September 2020 diff hist +123 COVID-19 User Policies added annoucnemnts Tag: Visual edit
- 19:43, 14 September 2020 diff hist +31 m COVID-19 User Policies Tag: Visual edit
- 19:42, 14 September 2020 diff hist +249 COVID-19 User Policies →UCSB Wellness Survey: linked to uploaded ocs Tag: Visual edit
- 19:41, 14 September 2020 diff hist +126 N File:COVID Entering the CR and Gowning Protocols-USE THIS ONE v2.pdf COVID-19 Entering_the_CR_and_Gowning_Protocols-USE_THIS_ONE_v2.pdf self-entry protocol once inside the building
- 19:39, 14 September 2020 diff hist +113 N File:COVID19 ESB Building User Self Admittance Protocol v2.pdf COVID-19 ESB_Building_User_Self_Admittance_Protocol_v2.pdf self-entry doc for users, building entry
- 19:37, 14 September 2020 diff hist +108 N File:User Protocols Coronavirus 2020-09-14-1.pdf COVID-19 User Protocols Coronavirus 2020-09-14-1.pdf Full document of protocols, for lab users
- 15:36, 14 September 2020 diff hist -4 Lithography Recipes →Chemicals Stocked + Datasheets: added model of XHRIC-11 Tag: Visual edit
- 15:23, 14 September 2020 diff hist +37 Dry Etching Recipes link to Fluorine etcher Ru-masked SiO2 etch. Tag: Visual edit
- 11:44, 14 September 2020 diff hist +83 Template:News →Raith Velion: FIB/SEM Installation: link to Dan Read's page
- 11:41, 14 September 2020 diff hist +8 m Template:News →Heidelberg MLA-150: Delivery Scheduled for Sept.: update date
- 01:02, 14 September 2020 diff hist -4 m Staff List →Process Group: updated link for 'fab svc Tag: Visual edit
- 23:34, 13 September 2020 diff hist +547 m Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): greyscale Tag: Visual edit
- 23:33, 13 September 2020 diff hist +68 m Maskless Aligner (Heidelberg MLA150) →Recipes: corrected link Tag: Visual edit
- 23:32, 13 September 2020 diff hist +11 m Direct-Write Lithography Recipes link to tool page Tag: Visual edit
- 23:31, 13 September 2020 diff hist +8 m Direct-Write Lithography Recipes
- 23:28, 13 September 2020 diff hist +125 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:25, 13 September 2020 diff hist +10 Template:LithRecipe Table correct Maskless aligner link current
- 23:24, 13 September 2020 diff hist 0 m Direct-Write Lithography Recipes John d moved page MLA150 Recipes to Maskless Aligner Recipes without leaving a redirect: higher level category
- 23:23, 13 September 2020 diff hist +22 m Direct-Write Lithography Recipes categories
- 23:22, 13 September 2020 diff hist +49 m Lithography Recipes categories
- 23:21, 13 September 2020 diff hist +24 Direct-Write Lithography Recipes caterbgory added
- 23:20, 13 September 2020 diff hist +26 Contact Alignment Recipes category added
- 23:20, 13 September 2020 diff hist +26 Stepper Recipes added category
- 23:17, 13 September 2020 diff hist +5 m Direct-Write Lithography Recipes Tag: Visual edit
- 23:16, 13 September 2020 diff hist +168 Template:LithRecipe Table added example visual
- 23:11, 13 September 2020 diff hist +94 m Template:LithRecipe Table
- 23:04, 13 September 2020 diff hist -389 Lithography Recipes →Photolithography Recipes: correcting row colors
- 22:41, 13 September 2020 diff hist -128 Lithography Recipes deleted erroneous columns Tag: Visual edit
- 22:38, 13 September 2020 diff hist +212 Lithography Recipes →Photolithography Recipes: added MLA150 to PhotoLith recipes table; table color formatting Tag: Visual edit: Switched
- 22:32, 13 September 2020 diff hist +191 Template:LithRecipe Table added MLA150, and NoInclude section, and added to Templates category
- 22:25, 13 September 2020 diff hist +142 Maskless Aligner (Heidelberg MLA150) link to MLA150 recipes Tag: Visual edit
- 22:24, 13 September 2020 diff hist +1,028 Direct-Write Lithography Recipes Table inserted to start Tag: Visual edit
- 22:23, 13 September 2020 diff hist +217 Direct-Write Lithography Recipes inital page
- 22:20, 13 September 2020 diff hist +73 N Direct-Write Lithography Recipes initial page Tag: Visual edit
- 22:10, 13 September 2020 diff hist +11 m Focused Ion-Beam Lithography (Raith Velion) →Recipes: formatting Tag: Visual edit
- 22:09, 13 September 2020 diff hist +4 m Suss Aligners (SUSS MJB-3) →Recipes: italics Tag: Visual edit
- 22:09, 13 September 2020 diff hist +230 Suss Aligners (SUSS MJB-3) link to recipes Tag: Visual edit
- 22:06, 13 September 2020 diff hist +1,114 N Maskless Aligner (Heidelberg MLA150) initial page with placeholders
- 21:56, 13 September 2020 diff hist +42 Tool List →Other Patterning Systems: Link to Maskless Aligner (Heidelberg MLA150) Tag: Visual edit
- 21:54, 13 September 2020 diff hist +51 Dan Read →Tools: Added Raith Velion Tag: Visual edit
- 21:40, 13 September 2020 diff hist +86 Template:Tool added Dan Read contact info
- 21:36, 13 September 2020 diff hist +12 Template:Tool →Arguments with Specific Values: added Dan Read
- 21:34, 13 September 2020 diff hist +126 Template:StaffInfo link to Tool template page for editing staff info
- 21:33, 13 September 2020 diff hist +187 Template:Staff link to Tool Tempalte in documentation current
- 21:25, 13 September 2020 diff hist +169 Lithography Recipes linked to tools in header titles Tag: Visual edit
- 21:15, 13 September 2020 diff hist +137 Focused Ion-Beam Lithography (Raith Velion) linked to Recipes page Tag: Visual edit
- 21:14, 13 September 2020 diff hist +80 Lithography Recipes added Raith Velion section, added model to EBL section title Tag: Visual edit
- 21:12, 13 September 2020 diff hist +1,794 N Focused Ion-Beam Lithography (Raith Velion) initial page, copy/pasted the JEOL EBL page
- 21:08, 13 September 2020 diff hist -35 m E-Beam Lithography System (JEOL JBX-6300FS) deleted erroneous fiels in {tool} template
- 21:06, 13 September 2020 diff hist +49 Tool List →Other Patterning Systems: Added Raith Velion link Tag: Visual edit
- 21:05, 13 September 2020 diff hist +81 Tool List →Lithography: added FEI Sirion Nabity Tag: Visual edit
- 15:39, 13 September 2020 diff hist +1,147 COVID-19 User Policies Initial links for files - files not uploaded yet Tag: Visual edit
- 14:43, 13 September 2020 diff hist +192 N COVID-19 User Policies Initial page Tag: Visual edit
- 10:42, 8 September 2020 diff hist +1 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist -7 m PECVD 1 (PlasmaTherm 790) →Recipes & Process Information: change to Process Data Tag: Visual edit
- 10:41, 8 September 2020 diff hist +206 PECVD 1 (PlasmaTherm 790) link to recipes and data Tag: Visual edit
- 10:34, 8 September 2020 diff hist -129 m Template:Announcements removed labor day
- 14:27, 1 September 2020 diff hist 0 File:UCSB Service Agreement.pdf John d uploaded a new version of File:UCSB Service Agreement.pdf
- 14:21, 1 September 2020 diff hist 0 File:Facility-Use-MOU---Intercampus-UC-User.pdf John d uploaded a new version of File:Facility-Use-MOU---Intercampus-UC-User.pdf
- 21:30, 31 August 2020 diff hist +129 Template:Announcements labor day closure