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- 11:42, 9 June 2020 diff hist +494 ICP Etching Recipes →SiO2 Etching: added Ning's Ru-masked SiO2 etch Tag: Visual edit
- 11:29, 9 June 2020 diff hist +117 N File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask
- 19:18, 8 June 2020 diff hist -1 m Template:Announcements
- 19:18, 8 June 2020 diff hist +3 m Template:Announcements
- 19:17, 8 June 2020 diff hist +23 m Template:Announcements
- 19:17, 8 June 2020 diff hist -120 Template:Announcements updated COVID response
- 18:12, 8 June 2020 diff hist -142 Template:Announcements →NanoFab Closure: update to "COVID Response"
- 18:08, 8 June 2020 diff hist 0 m Template:News →Raith Velion: FIB/SEM Installation: minor update
- 18:08, 8 June 2020 diff hist +9 m Template:News RAITH minor spelling
- 11:18, 8 June 2020 diff hist +321 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) link to lase rmonitor pages Tag: Visual edit
- 11:17, 8 June 2020 diff hist +93 ICP Etch 2 (Panasonic E626I) link to laser monitor pages Tag: Visual edit
- 11:16, 8 June 2020 diff hist +368 ICP Etch 1 (Panasonic E646V) link to laser etch monitor pages Tag: Visual edit
- 11:14, 8 June 2020 diff hist +306 DSEIII (PlasmaTherm/Deep Silicon Etcher) links to laser monitor pages Tag: Visual edit
- 11:11, 8 June 2020 diff hist +422 N Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers basic description, point to General Procedure page. current Tag: Visual edit
- 08:04, 5 June 2020 diff hist +95 XeF2 Etch (Xetch) →About: added wafer size Tag: Visual edit
- 23:29, 2 June 2020 diff hist 0 m Template:Announcements grammar
- 17:56, 2 June 2020 diff hist +63 m Template:WIP current
- 17:55, 2 June 2020 diff hist +89 Template:WIP link to WIP category
- 17:54, 2 June 2020 diff hist +133 N Category:WIP Created page with "The following pages have a "Work In Progress" label and Image inserted in them. See the WIP template for more info." current
- 17:52, 2 June 2020 diff hist +7 m Dan Read added work in progress sign Tag: Visual edit
- 17:51, 2 June 2020 diff hist +189 N Dan Read initial page
- 17:50, 2 June 2020 diff hist +43 Staff List →Process Group: added link to Dan Read Tag: Visual edit
- 17:48, 2 June 2020 diff hist 0 m Template:Announcements modify post date so closure is at top
- 17:48, 2 June 2020 diff hist +281 Template:Announcements New tool installs - points to NEWS articles
- 17:43, 2 June 2020 diff hist +1,382 Template:News article for Raith Velion & Heidleberg MLA150
- 13:00, 30 May 2020 diff hist +215 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added screenshot of IQC results screen Tag: Visual edit
- 12:58, 30 May 2020 diff hist +114 N File:ASML IQC Focus Mean Correction screenshot.jpg
- 16:50, 28 May 2020 diff hist +562 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error Log full: added Laser refill warning Tag: Visual edit
- 16:45, 28 May 2020 diff hist +259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added brief description of utility Tag: Visual edit
- 16:14, 28 May 2020 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: bolded button Tag: Visual edit
- 16:14, 28 May 2020 diff hist +172 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added to record in logbook Tag: Visual edit
- 10:52, 22 May 2020 diff hist +357 CAIBE (Oxford Ion Mill) linked to Cluster operating instructions Tag: Visual edit
- 10:48, 22 May 2020 diff hist +9 m Tool List →Inspection, Test and Characterization: renaming of sections Tag: Visual edit
- 09:27, 19 May 2020 diff hist +83 m Thermal Evap 2 (Solder) →About Tag: Visual edit
- 09:26, 19 May 2020 diff hist +35 Thermal Evap 2 (Solder) fixed link to recipes, removed duplicate link Tag: Visual edit
- 08:56, 18 May 2020 diff hist +189 m Lift-Off with DUV Imaging + PMGI Underlayer convert process to table, more like a "traveler" Tag: Visual edit
- 10:12, 15 May 2020 diff hist +1,701 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added all Chamber 3 recipes I could find Tag: Visual edit
- 13:52, 13 May 2020 diff hist 0 m MediaWiki:Common.css retry
- 13:51, 13 May 2020 diff hist -1 MediaWiki:Common.css retry
- 13:50, 13 May 2020 diff hist +3 MediaWiki:Common.css retry
- 13:49, 13 May 2020 diff hist +1 m MediaWiki:Common.css retry
- 13:46, 13 May 2020 diff hist +84 MediaWiki:Common.css disable discussion link
- 07:22, 13 May 2020 diff hist +66 m Frequently Asked Questions →Can I take supplies from the Nanofab?: tone down the wording Tag: Visual edit
- 15:52, 12 May 2020 diff hist +42 m MediaWiki:Common.css added comment line
- 15:50, 12 May 2020 diff hist +9 m MediaWiki:Common.css retry h6
- 15:25, 12 May 2020 diff hist +50 MediaWiki:Common.css italicized Heading 4 (h6)
- 15:21, 12 May 2020 diff hist +152 Tool List →Inspection, Test and Characterization: reorganized optical tools Tag: Visual edit
- 20:40, 6 May 2020 diff hist +8 m Stepper 3 (ASML DUV) reduce Heading levels to "heading" not "Page title" Tag: Visual edit
- 17:55, 6 May 2020 diff hist +341 Stepper 3 (ASML DUV) added link to stepper recipes Tag: Visual edit
- 08:50, 29 April 2020 diff hist +51 Template:Announcements bumped COVID closure post, link to BThibeault page