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- 09:03, 17 January 2020 diff hist +112 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
- 09:02, 17 January 2020 diff hist +166 ICP Etching Recipes →SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
- 08:59, 17 January 2020 diff hist +46 ICP Etching Recipes →SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit
- 17:25, 16 January 2020 diff hist -36 Template:Announcements asml PM moved
- 17:03, 14 January 2020 diff hist +247 Template:Announcements ASML PM Feb
- 10:27, 13 January 2020 diff hist +18 Template:Announcements ASML up
- 09:13, 13 January 2020 diff hist -3 Template:Announcements ASML down
- 23:36, 9 January 2020 diff hist +57 m Calculators + Utilities →Refractive Indices Tag: Visual edit
- 11:00, 9 January 2020 diff hist -102 Template:Announcements →ASML is DOWN: Repair Expected Monday: system up
- 15:14, 2 January 2020 diff hist -13 Template:Announcements asml update
- 13:33, 2 January 2020 diff hist +24 m Template:Announcements update ASML title
- 13:33, 2 January 2020 diff hist -118 Template:Announcements removed CR=OPEN, ASML update
- 18:57, 1 January 2020 diff hist +587 PECVD Recipes Added section sub-headings Tag: Visual edit
- 18:42, 1 January 2020 diff hist +405 PECVD 2 (Advanced Vacuum) link to recipes page Tag: Visual edit
- 18:33, 1 January 2020 diff hist +2 m Test Data of etching SiO2 with CHF3/CF4 shortened link text Tag: Visual edit: Switched
- 14:00, 30 December 2019 diff hist -5 m Template:Announcements Undo revision 157023 by John d (talk) Tag: Undo
- 14:00, 30 December 2019 diff hist +5 m Template:Announcements br
- 13:58, 30 December 2019 diff hist -2 m Template:Announcements removed whitespace
- 13:57, 30 December 2019 diff hist -5 m Template:Announcements title HR
- 13:56, 30 December 2019 diff hist +16 m Template:Announcements header level remove
- 11:57, 30 December 2019 diff hist -4 m Template:Announcements title heading level 2
- 11:57, 30 December 2019 diff hist +2 m Template:Announcements title heading level 4
- 11:56, 30 December 2019 diff hist +2 Template:Announcements title heading level
- 11:54, 30 December 2019 diff hist -50 Template:Announcements →ASML is DOWN: level sensor update
- 11:01, 30 December 2019 diff hist +68 Template:Announcements →ASML is DOWN: light bulb update
- 09:50, 28 December 2019 diff hist -29 Template:Announcements nanofab open, asml down
- 16:24, 19 December 2019 diff hist -625 Template:Publications updated notes to show how to make new post
- 16:15, 19 December 2019 diff hist +60 Template:Publications try URL in post title
- 16:13, 19 December 2019 diff hist +1,229 Template:Publications added some selected publications
- 15:56, 19 December 2019 diff hist +2,237 N Template:Publications dummy articles
- 11:06, 19 December 2019 diff hist +107 m Tool List →Lithography Support: link to POLOS section Tag: Visual edit
- 11:05, 19 December 2019 diff hist +279 Tool List →Lithography: added POLOS spinners Tag: Visual edit
- 11:02, 19 December 2019 diff hist -191 Wet Benches enabled automatic TOC
- 11:01, 19 December 2019 diff hist +1,501 Wet Benches Added POLOS section, reformatting headings to use correct level. Tag: Visual edit
- 10:25, 19 December 2019 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration typo Tag: Visual edit
- 10:25, 19 December 2019 diff hist +192 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added some common warnings Tag: Visual edit
- 10:22, 19 December 2019 diff hist +454 Stepper 3 (ASML DUV) →Operating Procedures: added Software options section Tag: Visual edit
- 14:48, 10 December 2019 diff hist +2 m Calculators + Utilities →Fabrication Processes & Converters: fixed BYU URL
- 11:03, 6 December 2019 diff hist +152 m Frequently Asked Questions →Specific Equipment Problem: update equipment problem reporting, added SUM contact info Tag: Visual edit
- 17:19, 3 December 2019 diff hist +778 Calculators + Utilities →CAD Layout Programs: added CAD tips re: Cells Tag: Visual edit
- 12:55, 3 December 2019 diff hist +46 Microscopes →Microscope #1: Olympus BHMJL (Char. Lab, Room 1111): added user manual Tag: Visual edit
- 12:49, 3 December 2019 diff hist +211 Microscopes corrected microscope 1 to olympus, afdded # 5, 6 to Olympus Flour/DUV scopes Tag: Visual edit
- 12:47, 3 December 2019 diff hist +63 N File:Microscope 01 Olympus BHMJL crop.png current
- 02:37, 30 November 2019 diff hist +22 m Lift-Off with DUV Imaging + PMGI Underlayer →Images / Examples: image acknowledgement Tag: Visual edit
- 02:31, 30 November 2019 diff hist +38 Lift-Off with DUV Imaging + PMGI Underlayer Acknowledge development by demis Tag: Visual edit
- 15:33, 27 November 2019 diff hist +42 Frequently Asked Questions →Authorship on Publications: added "if images/data included in paper" Tag: Visual edit
- 15:29, 27 November 2019 diff hist -128 Template:Announcements deleted ASML Down
- 15:26, 27 November 2019 diff hist +12 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: bold Tag: Visual edit
- 15:26, 27 November 2019 diff hist +335 ICP-Etch (Unaxis VLR) added Cluster Config / oink to each modules tool page Tag: Visual edit
- 15:24, 27 November 2019 diff hist -32 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: formatting Tag: Visual edit
- 15:23, 27 November 2019 diff hist +368 ICP-PECVD (Unaxis VLR) added cluster configuration / link to each chamber's tool page Tag: Visual edit
- 14:24, 26 November 2019 diff hist +129 m CAIBE (Oxford Ion Mill) added CAIBE acronym expansion to description, for google searchability Tag: Visual edit
- 14:14, 26 November 2019 diff hist +8 m Atomic Layer Deposition (Oxford FlexAL) added CAIBE acronym Tag: Visual edit
- 14:13, 26 November 2019 diff hist -72 m Atomic Layer Deposition (Oxford FlexAL) typo/grammar Tag: Visual edit
- 14:12, 26 November 2019 diff hist +287 CAIBE (Oxford Ion Mill) added cluster config section Tag: Visual edit
- 14:10, 26 November 2019 diff hist +198 Atomic Layer Deposition (Oxford FlexAL) added cluster config section Tag: Visual edit
- 12:32, 22 November 2019 diff hist +102 PECVD Recipes →SiN deposition (Unaxis VLR): SiN recipes under development Tag: Visual edit
- 17:34, 21 November 2019 diff hist +79 m Stepper 3 (ASML DUV) moved/updated "service provider" Tag: Visual edit
- 12:17, 19 November 2019 diff hist +234 m Stepper Recipes →Anti-Reflective Coatings: links to BARC datasheets Tag: Visual edit
- 12:15, 19 November 2019 diff hist +358 Lithography Recipes added ARC row with links to DSK & DUV42P Tag: Visual edit: Switched
- 18:47, 13 November 2019 diff hist +11 m Aidan Hopkins added whitespace in About so tools list shows up correctly. Tag: Visual edit: Switched
- 18:44, 13 November 2019 diff hist +1 m Template:Announcements moved CR shutdown to top
- 13:29, 13 November 2019 diff hist +1 Automated Coat/Develop System (S-Cubed Flexi) added ToolID (link to SUM)
- 17:34, 12 November 2019 diff hist +1 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: saved pasword to end, not usually the culprit Tag: Visual edit
- 17:33, 12 November 2019 diff hist +198 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: cyberduck setting Tag: Visual edit
- 01:43, 8 November 2019 diff hist 0 File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx John d uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx current
- 01:37, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 01:35, 8 November 2019 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 15:05, 25 October 2019 diff hist +231 Chemical List added photolith chemicals Tag: Visual edit
- 14:49, 25 October 2019 diff hist +51 m Rapid Thermal Processor (SSI Solaris 150) comment clarification Tag: Visual edit
- 14:48, 25 October 2019 diff hist +33 m Rapid Thermal Processor (AET RX6) →Detailed Specifications: "Temp" --> "maximum temp" Tag: Visual edit
- 14:30, 25 October 2019 diff hist -51 IR Thermal Microscope (QFI) deleted erroneous email + phone
- 14:30, 25 October 2019 diff hist -5 IR Thermal Microscope (QFI) →Capabilities: updated objectives: nIR --> Vis + nIR Tag: Visual edit
- 16:26, 17 October 2019 diff hist +673 Frequently Asked Questions →General NanoFab Questions: take suplies from Nanofab? Tag: Visual edit
- 17:42, 11 October 2019 diff hist +149 Editing Tutorials →It won't let me "Save" my changes!: added Edit Source mode info/image Tag: Visual edit
- 17:40, 11 October 2019 diff hist +31 N File:Visual Editor - switch to source mode - pen button.png current
- 17:33, 11 October 2019 diff hist +35 m Editing Tutorials →Linking to a PDF or other file: borders on images Tag: Visual edit
- 17:32, 11 October 2019 diff hist +7 m Editing Tutorials →Linking to a PDF or other file: border and cropped image size Tag: Visual edit
- 17:32, 11 October 2019 diff hist 0 File:Editing Tutorials 4b- file info right click URL.png John d uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png current
- 17:30, 11 October 2019 diff hist +272 m Editing Tutorials →Linking to a PDF or other file: minor update Tag: Visual edit
- 17:23, 11 October 2019 diff hist +385 Editing Tutorials →Linking to a PDF or other file: inserted images Tag: Visual edit
- 17:23, 11 October 2019 diff hist +44 N File:Editing Tutorials - 5- insert link into page.png current
- 17:21, 11 October 2019 diff hist +47 N File:Editing Tutorials 4b- file info right click URL.png
- 17:20, 11 October 2019 diff hist +40 N File:Editing Tutorials 3c- modifications etc..png current
- 17:17, 11 October 2019 diff hist +767 Editing Tutorials →Linking to a PDF or other file: more upload PDF... Tag: Visual edit
- 17:10, 11 October 2019 diff hist +512 Editing Tutorials →Basic Editing: start of "insert PDF" section Tag: Visual edit
- 16:56, 11 October 2019 diff hist -245 Template:Announcements removed ASML
- 16:40, 8 October 2019 diff hist +45 N File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png current
- 16:36, 8 October 2019 diff hist +50 N File:Editing Tutorials - Upload PDF - 2- choose file.png current
- 16:35, 8 October 2019 diff hist +49 N File:Editing Tutorials - Upload PDF - 1- upload file.png current
- 16:30, 8 October 2019 diff hist +73 Template:Tool minor updates
- 16:25, 8 October 2019 diff hist -24 m Automated Coat/Develop System (S-Cubed Flexi) fixed ToolTemplate 'type' arg
- 16:18, 8 October 2019 diff hist +56 m Stepper 3 (ASML DUV) →Troubleshooting and Recovery: minor grammar Tag: Visual edit
- 16:17, 8 October 2019 diff hist +67 m Stepper 3 (ASML DUV) toolTemplate added Litho links
- 16:16, 8 October 2019 diff hist +50 m Automated Coat/Develop System (S-Cubed Flexi) ToolTemplate: model & mfg. link
- 16:09, 8 October 2019 diff hist +1 m Editing Tutorials move TOC
- 16:07, 8 October 2019 diff hist +125 m Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): link to tool page Tag: Visual edit
- 16:05, 8 October 2019 diff hist +86 Tool List added S-Cubed Flexi to Wet processing tools as well Tag: Visual edit
- 16:04, 8 October 2019 diff hist -10 m Automated Coat/Develop System (S-Cubed Flexi) edit staff use notice Tag: Visual edit
- 16:03, 8 October 2019 diff hist +233 Automated Coat/Develop System (S-Cubed Flexi) added notice abotu staff use only Tag: Visual edit