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- 13:49, 4 March 2019 diff hist 0 m Template:Announcements →Lab Closed Mar. 6th 7-8am: Fire Alarm Testing: corrected date typo
- 13:49, 4 March 2019 diff hist +37 Template:Announcements added date to fire alarm testing
- 11:25, 26 February 2019 diff hist +180 Stepper 2 (AutoStep 200) →Detailed Specifications: info on quadrant mask field sizes Tag: Visual edit
- 10:07, 25 February 2019 diff hist +26 N User:Freeborn d redirect to staff page current
- 10:06, 25 February 2019 diff hist +27 N User:Hopkins a redirect to staff page current
- 10:05, 25 February 2019 diff hist +24 N User:Sawyer l redirect to Lee's staff page current
- 10:01, 25 February 2019 diff hist +29 User:John d redirect to Demis' staff page current
- 13:10, 20 February 2019 diff hist +490 Template:News s-cubed
- 12:56, 20 February 2019 diff hist +135 ASML Stepper 3 Standard Operating Procedure bring reportto sem Tag: Visual edit
- 12:05, 15 February 2019 diff hist +53 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: note polarity Tag: Visual edit
- 12:04, 15 February 2019 diff hist -41 m ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: deleted dicing alignment guides comment Tag: Visual edit
- 12:02, 15 February 2019 diff hist +267 Template:Announcements asml PM, added // to Mike's signatures.
- 00:40, 8 February 2019 diff hist 0 m Demis D. John Corrected phone nimber
- 11:39, 6 February 2019 diff hist +176 m Calculators + Utilities →Analysis Programs: link to AFM/profilm3d Tag: Visual edit
- 11:37, 6 February 2019 diff hist +10 m Tool List →Topographical Metrology: Profilm3D new URL Tag: Visual edit
- 11:36, 6 February 2019 diff hist +96 N White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D) John d moved page White-Light/Phase-Shift Interference Profilometer (Filmetrics Profilm3D) to Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D): clarify capability in title/links current
- 16:58, 4 February 2019 diff hist +352 m Template:Announcements added comments with RSS feed URLs
- 15:10, 4 February 2019 diff hist +252 m Wet Etching Recipes prominent link to master table Tag: Visual edit
- 11:15, 4 February 2019 diff hist -1 m Lee Sawyer fixed spacing error
- 11:04, 4 February 2019 diff hist +86 Template:Announcements test 2
- 11:03, 4 February 2019 diff hist +51 Template:Announcements test post
- 16:31, 31 January 2019 diff hist +33 N File:ASML On Wafer Mark.gds CAD file for ASML Alignment Marks current
- 01:19, 30 January 2019 diff hist +83 m Stocked Chemical List sorting Tag: Visual edit
- 01:17, 30 January 2019 diff hist +2 m Staff List →Process Group: minor formatting Tag: Visual edit
- 01:13, 30 January 2019 diff hist +219 N Lee Sawyer initial page
- 01:11, 30 January 2019 diff hist -25 m Demis D. John →Tools: removed table
- 01:10, 30 January 2019 diff hist +183 Demis D. John →Current Work: added stepper 3, managing role Tag: Visual edit: Switched
- 01:03, 30 January 2019 diff hist +247 Biljana Stamenic →Tools: added stepper #1/2 + Surfscan
- 00:58, 30 January 2019 diff hist -89 Tom Reynolds deleted "directs the lab" text Tag: Visual edit: Switched
- 00:58, 30 January 2019 diff hist +93 Brian Thibeault →Tools: removes JAW, added Stepper #3. Moved text from Tom's to BrianT's. Tag: Visual edit: Switched
- 00:10, 30 January 2019 diff hist +8 m ICP Etching Recipes →Photoresist and ARC etching: ARC --> BARC Tag: Visual edit
- 00:07, 30 January 2019 diff hist +17 Test Data of etching SiO2 with CHF3/CF4 move SEM image to table, changed File: --> direct URL Tag: Visual edit
- 00:05, 30 January 2019 diff hist +12 Test Data of etching SiO2 with CHF3/CF4-ICP1 moved SEM iamge to table, changed File: --> direct link Tag: Visual edit
- 00:03, 30 January 2019 diff hist +14 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) moved SEM images to table, changed "File:" link --> Direct link to file Tag: Visual edit
- 12:29, 29 January 2019 diff hist +240 Template:News Profilm3D links/update
- 12:23, 29 January 2019 diff hist +6 Template:Announcements changed title to equip. status
- 12:21, 29 January 2019 diff hist +6 Template:Links Added job submission/lab access link
- 12:20, 29 January 2019 diff hist +83 Template:Links Added job submission link
- 03:15, 29 January 2019 diff hist +156 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: explain group folder and re-sending teh email Tag: Visual edit
- 14:12, 28 January 2019 diff hist +4 m Frequently Asked Questions →"Somethign went wrong" while saving my edits! How do i keep my edits?: corrected spelling Tag: Visual edit
- 14:11, 28 January 2019 diff hist +62 m Frequently Asked Questions →"Somethign went wrong" while saving my edits! How do i keep my edits?: updated button names Tag: Visual edit
- 14:09, 28 January 2019 diff hist +1,025 Frequently Asked Questions →Wiki Questions: logged out while editing Tag: Visual edit
- 14:00, 28 January 2019 diff hist +23 m Ellipsometer (Woollam) →Specifications: added lorentz/drude Tag: Visual edit
- 13:59, 28 January 2019 diff hist 0 m Ellipsometer (Woollam) updated ning's phone #
- 13:52, 28 January 2019 diff hist +49 m Ellipsometer (Woollam) set to NingC super + added model; light source type
- 13:49, 28 January 2019 diff hist +242 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →About: link to JAw for RIx data Tag: Visual edit
- 13:43, 28 January 2019 diff hist +798 Ellipsometer (Woollam) added specs Tag: Visual edit
- 13:03, 28 January 2019 diff hist +104 Ning Cao →Tools: added JAW ellipsometer Tag: Visual edit
- 13:03, 28 January 2019 diff hist +346 Ning Cao added filmetrics tools Tag: Visual edit
- 12:58, 28 January 2019 diff hist +39 Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: max thickness → 30nm Tag: Visual edit
- 12:54, 28 January 2019 diff hist +64 m Editing Tutorials →Inserting images into a page: minor mistakes Tag: Visual edit
- 12:46, 28 January 2019 diff hist +641 N Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick draft recipe
- 12:43, 28 January 2019 diff hist +632 Wafer Bonder (Logitech WBS7) →About: added more info, placeholders for detailed info Tag: Visual edit
- 12:29, 28 January 2019 diff hist +2 m Dry Etching Recipes fixed ICP2 PR etching link Tag: Visual edit
- 18:04, 25 January 2019 diff hist +117 Staff List moved Admin to top, moved BrianT into Admin group. Changed Equip --> Equip + Faciltiies.
- 10:46, 24 January 2019 diff hist -404 Template:Announcements Cleared announcements
- 08:50, 24 January 2019 diff hist +2 m Dicing Saw (ADT) →Operating Procedures: minor formatting Tag: Visual edit
- 10:09, 23 January 2019 diff hist +206 m Dicing Saw (ADT) →Operating Procedures: links to operating procedures Tag: Visual edit
- 00:23, 17 January 2019 diff hist +179 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: 24hr wait for new group folders
- 00:20, 17 January 2019 diff hist +176 m Calculators + Utilities →CAD Layout Programs: Klayout set database unit
- 12:37, 7 January 2019 diff hist +79 Tool List →Inspection, Test and Characterization: link for Filmetrics profilm3D Tag: Visual edit
- 12:32, 3 January 2019 diff hist -414 Template:Announcements deleted shutdowns, asml issue, updated filmetrics note.
- 22:57, 26 December 2018 diff hist +280 Editing Tutorials →It won't let me "Save" my changes!: pasted actual error message Tag: Visual edit
- 22:55, 26 December 2018 diff hist +1,692 Editing Tutorials FAQ: can't save page / can't upload file Tag: Visual edit
- 19:20, 26 December 2018 diff hist +54 N Stepper 2 (AutoStep 200) Operating Procedures initial placeholder page Tag: Visual edit
- 16:38, 19 December 2018 diff hist -45 Lab Rules finished heading levels! Now need images Tag: Visual edit
- 16:26, 19 December 2018 diff hist +2 m Lab Rules title heading level reduction Tag: Visual edit
- 16:25, 19 December 2018 diff hist -1,964 Lab Rules still updating headings Tag: Visual edit
- 18:23, 18 December 2018 diff hist +130 Calculators + Utilities →Scripts + Programs: added example AFM scan Tag: Visual edit
- 16:39, 18 December 2018 diff hist +1,063 Fluorescence Microscope (Olympus MX51) updated details / FLuorescence filters Tag: Visual edit
- 16:15, 18 December 2018 diff hist +4 m Template:Announcements bolded dates
- 16:10, 18 December 2018 diff hist -292 Template:Announcements deleted email/google issue
- 11:58, 18 December 2018 diff hist +40 Nano-Imprint (Nanonex NX2000) added wikipage to template current
- 11:57, 18 December 2018 diff hist +18 m Tony Bosch fixed typo/spacing
- 11:55, 18 December 2018 diff hist +479 Template:Announcements email issue, asml update
- 11:43, 18 December 2018 diff hist -1,251 Tony Bosch deleted placeholder text Tag: Visual edit: Switched
- 09:30, 18 December 2018 diff hist +97 m Calculators + Utilities →CAD Layout Programs: viewiing update Tag: Visual edit
- 23:03, 17 December 2018 diff hist +119 Template:News →Filmetrics Optical Profilometer: links
- 11:59, 14 December 2018 diff hist +310 Template:News filmetrics profilometer
- 16:26, 12 December 2018 diff hist +39 m Template:News link to KLA P-7 page
- 16:24, 12 December 2018 diff hist +383 Template:News KLATencor: past-tense / Filmetrics installs
- 16:21, 12 December 2018 diff hist +263 Template:Announcements lab shutdown, delete DSEiii issue
- 11:05, 12 December 2018 diff hist +4,303 N Filmetrics F10-RT-UVX Operating Procedure copy/pasted Ning's instructions, converted to wiki format
- 10:46, 12 December 2018 diff hist +72 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) link to SOP
- 09:24, 8 December 2018 diff hist +19 m ASML 5500: Recovering from an Error minor formats Tag: Visual edit
- 09:19, 8 December 2018 diff hist +13 m Calculators + Utilities →CAD Layout Programs: format folder path Tag: Visual edit
- 09:19, 8 December 2018 diff hist +144 Calculators + Utilities →CAD Layout Programs: Users can download LEdit from Nanofiles SFTP Tag: Visual edit
- 16:45, 7 December 2018 diff hist +328 Stepper 2 (AutoStep 200) moved PR's out of paragraph into separate table. Tag: Visual edit
- 23:05, 6 December 2018 diff hist +1,370 N Optical Film Thickness & Wafer-Mapping (Filmetrics F50) pasted F20 text, update for F50
- 22:57, 6 December 2018 diff hist +1,458 N Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) copied F20 page, updated for f10-rt-uvx
- 22:42, 6 December 2018 diff hist +215 Tool List →Thin-Film Analysis/Measurement: Add links to Filmetrics F10RT-UVX & F50 Tag: Visual edit
- 22:47, 4 December 2018 diff hist +158 m Calculators + Utilities →Refractive Indices: description of why RIx is useful for NanoFab users Tag: Visual edit
- 18:15, 29 November 2018 diff hist +74 m Vacuum Deposition Recipes fixed AJA3 Cr link Tag: Visual edit
- 14:52, 28 November 2018 diff hist +219 Suss MA-6 Backside Alignment QuickStart how to expose more wafers current Tag: Visual edit
- 14:42, 28 November 2018 diff hist +49 Suss MA-6 Backside Alignment QuickStart added illumination knob setting Tag: Visual edit
- 09:11, 27 November 2018 diff hist +33 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: minor update to laser mon description Tag: Visual edit
- 09:10, 27 November 2018 diff hist +77 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: corrected link to recipes sub-heading Tag: Visual edit
- 09:07, 27 November 2018 diff hist +23 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: corrected subscripts Tag: Visual edit
- 16:59, 21 November 2018 diff hist +2 m ICP Etching Recipes →Photoresist and ARC Etching: corrected link Tag: Visual edit
- 11:52, 19 November 2018 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx