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- 12:43, 28 January 2019 diff hist +632 Wafer Bonder (Logitech WBS7) →About: added more info, placeholders for detailed info Tag: Visual edit
- 12:29, 28 January 2019 diff hist +2 m Dry Etching Recipes fixed ICP2 PR etching link Tag: Visual edit
- 18:04, 25 January 2019 diff hist +117 Staff List moved Admin to top, moved BrianT into Admin group. Changed Equip --> Equip + Faciltiies.
- 10:46, 24 January 2019 diff hist -404 Template:Announcements Cleared announcements
- 08:50, 24 January 2019 diff hist +2 m Dicing Saw (ADT) →Operating Procedures: minor formatting Tag: Visual edit
- 10:09, 23 January 2019 diff hist +206 m Dicing Saw (ADT) →Operating Procedures: links to operating procedures Tag: Visual edit
- 00:23, 17 January 2019 diff hist +179 m Frequently Asked Questions →How do I get my files from the NanoFab computers?: 24hr wait for new group folders
- 00:20, 17 January 2019 diff hist +176 m Calculators + Utilities →CAD Layout Programs: Klayout set database unit
- 12:37, 7 January 2019 diff hist +79 Tool List →Inspection, Test and Characterization: link for Filmetrics profilm3D Tag: Visual edit
- 12:32, 3 January 2019 diff hist -414 Template:Announcements deleted shutdowns, asml issue, updated filmetrics note.
- 22:57, 26 December 2018 diff hist +280 Editing Tutorials →It won't let me "Save" my changes!: pasted actual error message Tag: Visual edit
- 22:55, 26 December 2018 diff hist +1,692 Editing Tutorials FAQ: can't save page / can't upload file Tag: Visual edit
- 19:20, 26 December 2018 diff hist +54 N Stepper 2 (AutoStep 200) Operating Procedures initial placeholder page Tag: Visual edit
- 16:38, 19 December 2018 diff hist -45 Lab Rules finished heading levels! Now need images Tag: Visual edit
- 16:26, 19 December 2018 diff hist +2 m Lab Rules title heading level reduction Tag: Visual edit
- 16:25, 19 December 2018 diff hist -1,964 Lab Rules still updating headings Tag: Visual edit
- 18:23, 18 December 2018 diff hist +130 Calculators + Utilities →Scripts + Programs: added example AFM scan Tag: Visual edit
- 16:39, 18 December 2018 diff hist +1,063 Fluorescence Microscope (Olympus MX51) updated details / FLuorescence filters Tag: Visual edit
- 16:15, 18 December 2018 diff hist +4 m Template:Announcements bolded dates
- 16:10, 18 December 2018 diff hist -292 Template:Announcements deleted email/google issue
- 11:58, 18 December 2018 diff hist +40 Nano-Imprint (Nanonex NX2000) added wikipage to template current
- 11:57, 18 December 2018 diff hist +18 m Tony Bosch fixed typo/spacing
- 11:55, 18 December 2018 diff hist +479 Template:Announcements email issue, asml update
- 11:43, 18 December 2018 diff hist -1,251 Tony Bosch deleted placeholder text Tag: Visual edit: Switched
- 09:30, 18 December 2018 diff hist +97 m Calculators + Utilities →CAD Layout Programs: viewiing update Tag: Visual edit
- 23:03, 17 December 2018 diff hist +119 Template:News →Filmetrics Optical Profilometer: links
- 11:59, 14 December 2018 diff hist +310 Template:News filmetrics profilometer
- 16:26, 12 December 2018 diff hist +39 m Template:News link to KLA P-7 page
- 16:24, 12 December 2018 diff hist +383 Template:News KLATencor: past-tense / Filmetrics installs
- 16:21, 12 December 2018 diff hist +263 Template:Announcements lab shutdown, delete DSEiii issue
- 11:05, 12 December 2018 diff hist +4,303 N Filmetrics F10-RT-UVX Operating Procedure copy/pasted Ning's instructions, converted to wiki format
- 10:46, 12 December 2018 diff hist +72 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) link to SOP
- 09:24, 8 December 2018 diff hist +19 m ASML 5500: Recovering from an Error minor formats Tag: Visual edit
- 09:19, 8 December 2018 diff hist +13 m Calculators + Utilities →CAD Layout Programs: format folder path Tag: Visual edit
- 09:19, 8 December 2018 diff hist +144 Calculators + Utilities →CAD Layout Programs: Users can download LEdit from Nanofiles SFTP Tag: Visual edit
- 16:45, 7 December 2018 diff hist +328 Stepper 2 (AutoStep 200) moved PR's out of paragraph into separate table. Tag: Visual edit
- 23:05, 6 December 2018 diff hist +1,370 N Optical Film Thickness & Wafer-Mapping (Filmetrics F50) pasted F20 text, update for F50
- 22:57, 6 December 2018 diff hist +1,458 N Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) copied F20 page, updated for f10-rt-uvx
- 22:42, 6 December 2018 diff hist +215 Tool List →Thin-Film Analysis/Measurement: Add links to Filmetrics F10RT-UVX & F50 Tag: Visual edit
- 22:47, 4 December 2018 diff hist +158 m Calculators + Utilities →Refractive Indices: description of why RIx is useful for NanoFab users Tag: Visual edit
- 18:15, 29 November 2018 diff hist +74 m Vacuum Deposition Recipes fixed AJA3 Cr link Tag: Visual edit
- 14:52, 28 November 2018 diff hist +219 Suss MA-6 Backside Alignment QuickStart how to expose more wafers current Tag: Visual edit
- 14:42, 28 November 2018 diff hist +49 Suss MA-6 Backside Alignment QuickStart added illumination knob setting Tag: Visual edit
- 09:11, 27 November 2018 diff hist +33 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: minor update to laser mon description Tag: Visual edit
- 09:10, 27 November 2018 diff hist +77 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: corrected link to recipes sub-heading Tag: Visual edit
- 09:07, 27 November 2018 diff hist +23 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: corrected subscripts Tag: Visual edit
- 16:59, 21 November 2018 diff hist +2 m ICP Etching Recipes →Photoresist and ARC Etching: corrected link Tag: Visual edit
- 11:52, 19 November 2018 diff hist 0 File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx John d uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx
- 11:30, 19 November 2018 diff hist +33 N File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx ASML Reticle programming template
- 11:11, 16 November 2018 diff hist +178 Frequently Asked Questions →Specific Equipment Problem: updated equipment problem procedure Tag: Visual edit
- 08:46, 14 November 2018 diff hist +231 Calculators + Utilities klayout> draw circles Tag: Visual edit
- 11:17, 9 November 2018 diff hist +135 Tool List →Dry Etch: link to etch monitors, specifically Laser Etch Monitoring page Tag: Visual edit
- 11:14, 9 November 2018 diff hist 0 m Laser Etch Monitoring John d moved page Intellemetrics Laser Etch Monitoring to Laser Etch Monitoring without leaving a redirect: make it generic to all laser etch monitors
- 11:14, 9 November 2018 diff hist +2,080 N Laser Etch Monitoring initial page, overview of laser monitoring, references and links to non-existent (desired) procedures Tag: Visual edit
- 09:08, 9 November 2018 diff hist +195 Template:Announcements deleted Cary500, added FIlmetrics announcements
- 10:35, 2 November 2018 diff hist +69,241 N Lab Rules initial copy/paste, partially formatted headings. Tag: Visual edit
- 09:56, 1 November 2018 diff hist +122 Photoluminescence PL Setup (Custom) Added spectrometer Tag: Visual edit
- 17:45, 29 October 2018 diff hist +225 Atomic Layer Deposition Recipes added temps and plasma/reactant info Tag: Visual edit
- 17:41, 29 October 2018 diff hist +4 Atomic Layer Deposition Recipes →ZnO Deposition (ALD Chamber 1): added approx rate from old notes Tag: Visual edit
- 13:37, 24 October 2018 diff hist +57 Stepper Recipes →Positive Resist (ASML DUV): UV6-0.7 recipe - mentioned replaced by -0.8 Tag: Visual edit
- 10:40, 23 October 2018 diff hist -139 m Wet Etching Recipes deleted test stuff Tag: Visual edit
- 10:38, 23 October 2018 diff hist +84 m Wet Etching Recipes table test Tag: Visual edit
- 10:34, 23 October 2018 diff hist +57 m Wet Etching Recipes example testing Tag: Visual edit
- 10:30, 22 October 2018 diff hist +29 Packaging Recipes →Mounting/Unmounting Samples: corrected tape model # and link to image
- 10:29, 22 October 2018 diff hist 0 m ADT UV-Tape Table 1042R John d moved page ? to ADT UV-Tape Table 1042R without leaving a redirect: give a name to page current
- 07:15, 22 October 2018 diff hist -360 Template:Announcements deleted lab closed
- 14:09, 17 October 2018 diff hist +2,218 N RIE5 - Standard Operating procedure (Cortex Software) pasted Don's SOP's current Tag: Visual edit
- 13:58, 17 October 2018 diff hist +40 RIE 5 (PlasmaTherm) →Documentation: link to new SOP Tag: Visual edit
- 13:49, 17 October 2018 diff hist -36 Packaging Recipes →Cutting Parameters: made header row Tag: Visual edit
- 13:47, 17 October 2018 diff hist +707 N Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond pasted draft procedure
- 13:47, 17 October 2018 diff hist -513 Packaging Recipes moved logitech procedure to separate page. Tag: Visual edit
- 12:19, 17 October 2018 diff hist 0 m Editing Tutorials →Inserting images into a page: adjut recommended image height
- 12:18, 17 October 2018 diff hist +119 m Editing Tutorials →Inserting images into a page: moved floating image to end of sentence
- 12:15, 17 October 2018 diff hist +1,717 Editing Tutorials →Inserting images into a page: added instructions for inserting images Tag: Visual edit
- 11:33, 17 October 2018 diff hist +13 N File:MacOS - Happy Mac.png current
- 17:33, 16 October 2018 diff hist +48 Atomic Layer Deposition Recipes →Al O deposition (ALD CHAMBER 3): converted to regular subscripts, indented each recipe param Tag: Visual edit
- 14:40, 16 October 2018 diff hist +7 Template:Announcements lab closed thurs, deleted RIE5 SiCl4
- 14:39, 16 October 2018 diff hist -55 Template:Announcements updates to RIE5, PECVD1
- 09:15, 16 October 2018 diff hist +59 Dicing Saw (ADT) added sections for SOP, Detials Tag: Visual edit
- 09:14, 16 October 2018 diff hist +366 Wafer Bonder (Logitech WBS7) added link to recipes, short About statement. Tag: Visual edit
- 09:12, 16 October 2018 diff hist +893 Packaging Recipes added Logitech Wafer bonder section, initial draft of procedure for wax mounting Tag: Visual edit
- 09:03, 16 October 2018 diff hist +648 Tube Furnace AlGaAs Oxidation (Lindberg) added Description, and blanks secitons for Procedures/Recipes Tag: Visual edit
- 08:58, 16 October 2018 diff hist +287 Dicing Saw (ADT) linked to Dicing Recipes Tag: Visual edit
- 22:28, 15 October 2018 diff hist +1,228 N Packaging Recipes inital pages Tag: Visual edit
- 22:01, 15 October 2018 diff hist +36 MediaWiki:Sidebar added link to Packaging recipes
- 21:44, 15 October 2018 diff hist +228 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: red-link for calibration method Tag: Visual edit
- 21:41, 15 October 2018 diff hist +141 m Ion Beam Deposition (Veeco NEXUS) →Detailed Specifications: added TiN, Argon sample cleaning, nIR DBRs Tag: Visual edit
- 14:52, 15 October 2018 diff hist +2,102 Thermal Processing Recipes Updated thermal ox Recipe names, added Logitech Bonder, Finetech Bonder, Tystar AlGaAs, Lindberg AlGaAs basic info. Tag: Visual edit
- 10:48, 12 October 2018 diff hist +75 PECVD Recipes →PECVD 1 (PlasmaTherm 790): note about software upgrade Tag: Visual edit
- 23:25, 10 October 2018 diff hist -24 m Step Profilometer (KLA Tencor P-7) deleted erroneous "email" field from {tool} template
- 23:24, 10 October 2018 diff hist -2 Template:Tool update Brian Linng's email
- 23:19, 10 October 2018 diff hist +89 Probe Station & Curve Tracer →Equipment Specifications: included Windows PC & scripting environments Tag: Visual edit
- 23:18, 10 October 2018 diff hist +217 Probe Station & Curve Tracer →Equipment Specifications: deleted HP ParamAnalyzer Tag: Visual edit
- 23:16, 10 October 2018 diff hist -62 Tool List →Topographical Metrology: removed Rudolph Ellips & old Dektak Tag: Visual edit
- 23:13, 10 October 2018 diff hist +459 Filmetrics F40-UV Microscope-Mounted added capabilities section Tag: Visual edit
- 23:06, 10 October 2018 diff hist +161 Ellipsometer (Rudolph) note that tool has been removed current
- 13:51, 5 October 2018 diff hist +72 m ASML 5500: Recovering from an Error minor wording Tag: Visual edit
- 08:34, 5 October 2018 diff hist +1,259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration moved some procedures onto this one common page Tag: Visual edit
- 08:33, 5 October 2018 diff hist -348 Stepper 3 (ASML DUV) →Troubleshooting and Recovery: removed uneeded links Tag: Visual edit
- 08:03, 5 October 2018 diff hist +184 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration link to wafer recovery page Tag: Visual edit