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- 16:45, 28 May 2020 diff hist +259 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added brief description of utility Tag: Visual edit
- 16:14, 28 May 2020 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: bolded button Tag: Visual edit
- 16:14, 28 May 2020 diff hist +172 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →IQC (Image Quality Control) Calibration Check: added to record in logbook Tag: Visual edit
- 10:52, 22 May 2020 diff hist +357 CAIBE (Oxford Ion Mill) linked to Cluster operating instructions Tag: Visual edit
- 10:48, 22 May 2020 diff hist +9 m Tool List →Inspection, Test and Characterization: renaming of sections Tag: Visual edit
- 09:27, 19 May 2020 diff hist +83 m Thermal Evap 2 (Solder) →About Tag: Visual edit
- 09:26, 19 May 2020 diff hist +35 Thermal Evap 2 (Solder) fixed link to recipes, removed duplicate link Tag: Visual edit
- 08:56, 18 May 2020 diff hist +189 m Lift-Off with DUV Imaging + PMGI Underlayer convert process to table, more like a "traveler" Tag: Visual edit
- 10:12, 15 May 2020 diff hist +1,701 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): added all Chamber 3 recipes I could find Tag: Visual edit
- 13:52, 13 May 2020 diff hist 0 m MediaWiki:Common.css retry
- 13:51, 13 May 2020 diff hist -1 MediaWiki:Common.css retry
- 13:50, 13 May 2020 diff hist +3 MediaWiki:Common.css retry
- 13:49, 13 May 2020 diff hist +1 m MediaWiki:Common.css retry
- 13:46, 13 May 2020 diff hist +84 MediaWiki:Common.css disable discussion link
- 07:22, 13 May 2020 diff hist +66 m Frequently Asked Questions →Can I take supplies from the Nanofab?: tone down the wording Tag: Visual edit
- 15:52, 12 May 2020 diff hist +42 m MediaWiki:Common.css added comment line
- 15:50, 12 May 2020 diff hist +9 m MediaWiki:Common.css retry h6
- 15:25, 12 May 2020 diff hist +50 MediaWiki:Common.css italicized Heading 4 (h6)
- 15:21, 12 May 2020 diff hist +152 Tool List →Inspection, Test and Characterization: reorganized optical tools Tag: Visual edit
- 20:40, 6 May 2020 diff hist +8 m Stepper 3 (ASML DUV) reduce Heading levels to "heading" not "Page title" Tag: Visual edit
- 17:55, 6 May 2020 diff hist +341 Stepper 3 (ASML DUV) added link to stepper recipes Tag: Visual edit
- 08:50, 29 April 2020 diff hist +51 Template:Announcements bumped COVID closure post, link to BThibeault page
- 10:14, 23 April 2020 diff hist +14 Atomic Layer Deposition (Oxford FlexAL) →Procedures & Documentation: changed to "ask tool supervisor" instead of BillM Tag: Visual edit
- 10:13, 23 April 2020 diff hist +28 Atomic Layer Deposition Recipes →Atomic Layer Deposition (Oxford FlexAL): changed to "ask Tool Supervisor" instead of BillM Tag: Visual edit
- 09:58, 23 April 2020 diff hist -3 Sputtering Recipes →Al Deposition (Sputter 2): changed Heading level for Sputter 2 to "page title" to match others Tag: Visual edit
- 09:14, 23 April 2020 diff hist -19 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor format Tag: Visual edit
- 09:12, 23 April 2020 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 09:11, 23 April 2020 diff hist +43 m Test Data of etching SiO2 with CHF3/CF4-ICP1 formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +84 Test Data of etching SiO2 with CHF3/CF4-ICP1 comments on sidewall angle Tag: Visual edit
- 16:18, 22 April 2020 diff hist +495 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide updated to indicate the 2 methods of choosing cals Tag: Visual edit
- 15:44, 22 April 2020 diff hist +1,432 N Measurements and Imaging with Amscope Camera - Quickstart Usage Guide copy/pasted BrianT's email from Jul 26, 2019 Tag: Visual edit
- 15:36, 22 April 2020 diff hist +37 Microscopes →Image Analysis Software: link to Amscope Quickstart Tag: Visual edit
- 12:26, 22 April 2020 diff hist +98 N File:UCSB Service Agreement.pdf UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.
- 14:45, 21 April 2020 diff hist +291 PECVD Recipes →Cleaning Recipes (PECVD #2): changed Clean recipe to link to the screenshot instead of embedding in recipes page. added description of the clean Tag: Visual edit
- 14:42, 21 April 2020 diff hist +228 PECVD Recipes →Cleaning Recipes (PECVD #1): changed cleaning recipe image to Link to image, instead of embedded in page. Small description of the recipe. Tag: Visual edit
- 14:37, 21 April 2020 diff hist +20 m File:PECVD1-cleaning.png description update current
- 18:06, 13 April 2020 diff hist +204 Services formatting/clarify Tag: Visual edit
- 18:02, 13 April 2020 diff hist +62 Template:Links updated remote work/lab access links
- 11:54, 8 April 2020 diff hist +46 m Wafer scanning process traveler added author and spelling Tag: Visual edit
- 11:49, 8 April 2020 diff hist +128 Wafer scanning process traveler added wafers to use section and summary at top
- 09:06, 8 April 2020 diff hist +5 Stocked Chemical List added "IPA" to propanol names/notes Tag: Visual edit
- 08:59, 8 April 2020 diff hist +31 Stocked Chemical List added BHF % concentration Tag: Visual edit
- 12:45, 4 April 2020 diff hist +148 Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to template + CAD files Tag: Visual edit
- 15:49, 30 March 2020 diff hist +12 ICP Etching Recipes →Al Etch (Panasonic 1) Tag: Visual edit
- 15:48, 30 March 2020 diff hist +6 ICP Etching Recipes →Al Etch (Panasonic 2)
- 10:42, 30 March 2020 diff hist +6 ICP-PECVD (Unaxis VLR) →Documentation: fixed link
- 10:21, 30 March 2020 diff hist +4 m Stepper 2 (AutoStep 200) →Staff Procedures Tag: Visual edit
- 10:13, 30 March 2020 diff hist -4,103 Autostep 200 Troubleshooting and Recovery moved system restarting procedure to own page
- 10:11, 30 March 2020 diff hist +193 Stepper 2 (AutoStep 200) added shutartup-shutdown link Tag: Visual edit