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- 16:03, 22 August 2018 diff hist 0 Tool List →Thermal Processing: corrected Logitech bonder model # & link Tag: Visual edit
- 16:02, 22 August 2018 diff hist +42 N Wafer Bonder (Logitech WSB7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number current
- 16:02, 22 August 2018 diff hist 0 m Wafer Bonder (Logitech WBS7) John d moved page Wafer Bonder (Logitech WSB7) to Wafer Bonder (Logitech WBS7): Correct erroneous model number
- 15:20, 22 August 2018 diff hist -15 m Wafer Bonder (Logitech WBS7) removed wrong picture
- 15:17, 22 August 2018 diff hist +288 N Wafer Bonder (Logitech WBS7) initial page, copied source from existing page
- 15:14, 22 August 2018 diff hist 0 Tool List correct Logitech link with model: WSB7 Tag: Visual edit
- 11:54, 22 August 2018 diff hist +77 Tool List →Thermal Processing: link to Logitech wafer bonder Tag: Visual edit
- 11:28, 18 August 2018 diff hist -27 Template:Announcements EBeam #2 heater repair
- 15:04, 16 August 2018 diff hist +188 m Filmetrics F40-UV Microscope-Mounted →About: minor text updates, curve fitting mentioned Tag: Visual edit
- 06:38, 15 August 2018 diff hist +39 Template:Announcements PECVD software upgrade
- 13:57, 14 August 2018 diff hist +127 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: max # connections Tag: Visual edit
- 10:45, 14 August 2018 diff hist 0 m Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: correct nanofabadmin email address Tag: Visual edit
- 10:43, 14 August 2018 diff hist +362 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: links to set your FTP client to limit # of connections Tag: Visual edit
- 07:36, 14 August 2018 diff hist +1,164 Frequently Asked Questions blocked form nanofiles solution/faq Tag: Visual edit
- 09:55, 7 August 2018 diff hist -96 Template:Announcements pecvd s/w upgrade date sept.
- 23:46, 5 August 2018 diff hist +354 m ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": updated description of plate Tag: Visual edit
- 23:40, 5 August 2018 diff hist +687 ASML Stepper 3 Dicing Guide Programming Added negative PR image Tag: Visual edit
- 09:34, 3 August 2018 diff hist +3,277 ASML Stepper 3 - UCSB Test Reticles →Coords for "UCSB_Cal" Calibration Patterns: added coords for each resolution_chart_ORIG Tag: Visual edit
- 08:07, 3 August 2018 diff hist -2 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: rename multipurpose to EBL Tag: Visual edit
- 22:35, 1 August 2018 diff hist -463 Template:Announcements Deleted old UP items
- 17:31, 1 August 2018 diff hist +44 m ASML Stepper 3 - UCSB Test Reticles White is Chrome, Striped area is Clear Tag: Visual edit
- 17:24, 1 August 2018 diff hist +81 ASML Stepper 3 - UCSB Test Reticles →Reticle ID: "UCSB-OPC1": mention reticle is always installed in Box #1 Tag: Visual edit
- 17:22, 1 August 2018 diff hist +341 m ASML Stepper 3 - UCSB Test Reticles →Calibration Chart Layout: update table and "UCSB_Cal" descriptions/coords for clarity Tag: Visual edit
- 03:29, 1 August 2018 diff hist +338 ASML Stepper 3 - UCSB Test Reticles added contact_mark Tag: Visual edit
- 03:28, 1 August 2018 diff hist +47 N File:Align Front - Screen Shot 2018-07-23 at 11.32.16 AM.png current
- 03:24, 1 August 2018 diff hist +17 m ASML Stepper 3 - UCSB Test Reticles typo
- 03:20, 1 August 2018 diff hist +3,940 ASML Stepper 3 - UCSB Test Reticles added resolution charts + coords etc. Tag: Visual edit
- 03:17, 1 August 2018 diff hist +82 N File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png current
- 03:14, 1 August 2018 diff hist +36 N File:Resolution Chart - Screen Shot 2018-07-23 at 1.36.31 PM.png current
- 03:05, 1 August 2018 diff hist +42 N File:UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png current
- 02:58, 1 August 2018 diff hist +1,167 N ASML Stepper 3 - UCSB Test Reticles added UCSB-OPC1 and alignment marks for that reticle Tag: Visual edit
- 02:57, 1 August 2018 diff hist +51 N File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png current
- 02:54, 1 August 2018 diff hist +37 N File:GlobalMulti POS - Screen Shot 2018-07-23 at 11.17.23 AM.png current
- 02:52, 1 August 2018 diff hist +29 N File:Stepper align - Screen Shot 2018-07-23 at 11.24.31 AM.png current
- 02:44, 1 August 2018 diff hist +86 Stepper 3 (ASML DUV) →Operating Procedures: Link to UCSB Test Reticles Tag: Visual edit
- 02:40, 1 August 2018 diff hist +1,722 N ASML Stepper 3 Dicing Guide Programming initial page, included screenshot and basic programming Tag: Visual edit
- 02:32, 1 August 2018 diff hist +41 N File:UCSB Dicing Guides - Die Location - 800px.png current
- 02:26, 1 August 2018 diff hist +50 N File:UCSB Dicing Guides - Image Location on Reticle - 800px.png current
- 02:24, 1 August 2018 diff hist +34 N File:UCSB Dicing Guides - IMG 1199 annotated.jpg current
- 18:28, 27 July 2018 diff hist -123 Template:Announcements Sem up
- 16:12, 27 July 2018 diff hist -129 Template:Announcements sem2 down
- 11:35, 26 July 2018 diff hist -99 Template:Announcements THERMco furnace up, deleted DSEiii
- 11:33, 26 July 2018 diff hist +146 Template:Announcements Sem2 update
- 18:19, 25 July 2018 diff hist +51 m Olympus LEXT OLS4000 Confocal uScope - Quick Start clarified log off button current Tag: Visual edit
- 18:17, 25 July 2018 diff hist +1,417 Olympus LEXT OLS4000 Confocal uScope - Quick Start Inserted screenshots and images Tag: Visual edit
- 18:16, 25 July 2018 diff hist +48 N File:Olympus LEXT - log out-close buttons highlighted.png current
- 18:14, 25 July 2018 diff hist +42 N File:Olympus LEXT - sample load position button.png current
- 18:13, 25 July 2018 diff hist +34 N File:Olympus LEXT - 5x objective button.png current
- 18:11, 25 July 2018 diff hist +29 N File:Olympus LEXT - Imaging Button.png current
- 18:10, 25 July 2018 diff hist +31 N File:Olympus LEXT - Save File button.png current
- 18:05, 25 July 2018 diff hist +37 N File:Olympus LEXT - Cursor Averaging.png current
- 18:03, 25 July 2018 diff hist 0 File:Olympus LEXT - Image Correction button.png John d uploaded a new version of File:Olympus LEXT - Image Correction button.png current
- 18:02, 25 July 2018 diff hist +57 N File:Olympus LEXT - Saturation Highlighting button highlighted.png current
- 17:57, 25 July 2018 diff hist +38 N File:Olympus LEXT - Image Correction button.png
- 17:54, 25 July 2018 diff hist +50 N File:Olympus LEXT - 3-point Leveling Screen highlighted.png current
- 17:49, 25 July 2018 diff hist +51 N File:Olympus LEXT - Profile 2-point Buttons.png current
- 17:40, 25 July 2018 diff hist +26 N File:Olympus LEXT - login guest.png current
- 17:38, 25 July 2018 diff hist +44 N File:Olympus LEXT - Imaging + Measurement Buttons.png current
- 17:35, 25 July 2018 diff hist +33 N File:Olympus LEXT - Acquisition Button.png current
- 17:31, 25 July 2018 diff hist +41 N File:Olympus LEXT - Top-Bottom Setting.png current
- 17:23, 25 July 2018 diff hist +62 N File:Olympus LEXT - acquisition settings - Fine, manual annot.png current
- 17:16, 25 July 2018 diff hist +167 Olympus LEXT OLS4000 Confocal uScope - Quick Start inserted images, partially done Tag: Visual edit
- 17:15, 25 July 2018 diff hist +35 N File:Olympus LEXT - laser imaging button.png current
- 17:12, 25 July 2018 diff hist +33 N File:Olympus LEXT - Live halo.png current
- 17:10, 25 July 2018 diff hist +35 N File:Olympus LEXT - Color imaging button.png current
- 17:07, 25 July 2018 diff hist +38 N File:Olympus LEXT - Button Flag measurement position.png current
- 16:58, 25 July 2018 diff hist +1,784 Laser Scanning Confocal M-scope (Olympus LEXT) describe technique & insert example measurement pic Tag: Visual edit
- 16:57, 25 July 2018 diff hist +37 N File:Olypmus LEXT Example Profile Measurement.png current
- 13:51, 25 July 2018 diff hist +225 Template:Announcements E-Beam 2 heater down
- 13:46, 25 July 2018 diff hist +213 Template:Announcements Sem2 down
- 10:53, 25 July 2018 diff hist +492 Microscopes added LEXT Tag: Visual edit
- 11:49, 24 July 2018 diff hist -22 Template:Announcements sputter 3 up
- 09:30, 24 July 2018 diff hist +153 Template:Announcements thermco furnace down
- 13:26, 23 July 2018 diff hist -56 Template:Announcements DSEiii up
- 18:35, 20 July 2018 diff hist +278 m Olympus LEXT OLS4000 Confocal uScope - Quick Start →Quick-Start General Procedure: Minor grammar etc. Tag: Visual edit
- 17:28, 20 July 2018 diff hist +8 m Template:Announcements →DSE-iii Down: update
- 17:28, 20 July 2018 diff hist +38 Template:Announcements Delete ASML, add sputter 3
- 22:47, 19 July 2018 diff hist +46 m Olympus LEXT OLS4000 Confocal uScope - Quick Start Tag: Visual edit
- 22:44, 19 July 2018 diff hist +4,994 N Olympus LEXT OLS4000 Confocal uScope - Quick Start copy/pasted word doc, no images yet
- 21:32, 19 July 2018 diff hist +99 Laser Scanning Confocal M-scope (Olympus LEXT) link to quickstart page Tag: Visual edit
- 21:26, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 21:25, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 21:24, 19 July 2018 diff hist 0 File:Filmetrics F40-UV - spectrum curve fit 07.jpg John d uploaded a new version of File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 19:31, 18 July 2018 diff hist +149 Template:Announcements DSEiii clasp broke
- 22:13, 17 July 2018 diff hist +14 N UCSB NanoFab Microscope Training coming soon Tag: Visual edit
- 22:09, 17 July 2018 diff hist +116 Microscopes →Documentation: link to microscope training Tag: Visual edit
- 22:07, 17 July 2018 diff hist +15 m Filmetrics F40-UV Quick Start →Sample Measurement Tag: Visual edit
- 22:04, 17 July 2018 diff hist -173 m Filmetrics F40-UV Quick Start delete header pic Tag: Visual edit: Switched
- 18:44, 17 July 2018 diff hist +202 Filmetrics F40-UV Quick Start image reorg Tag: Visual edit
- 18:40, 17 July 2018 diff hist +61 Filmetrics F40-UV Quick Start image reflow editing Tag: Visual edit: Switched
- 18:09, 17 July 2018 diff hist +120 Filmetrics F40-UV Microscope-Mounted added photo Tag: Visual edit
- 18:08, 17 July 2018 diff hist +3,565 N Filmetrics F40-UV Quick Start initial quick start. numbering is kinda messe dup, wrote in 10 min! Tag: Visual edit
- 18:05, 17 July 2018 diff hist +18 N File:Filmetrics F40-UV - spectrum curve fit 07.jpg
- 18:04, 17 July 2018 diff hist +78 N File:Filmetrics F40-UV - dark meas thru hole 06.jpg current
- 18:03, 17 July 2018 diff hist +28 N File:Filmetrics F40-UV - objective choice 05.jpg current
- 18:02, 17 July 2018 diff hist +33 N File:Filmetrics F40-UV - focus on bare silicon 04.jpg current
- 18:01, 17 July 2018 diff hist +15 N File:Filmetrics F40-UV - wafer placement 03.jpg current
- 17:59, 17 July 2018 diff hist +20 N File:Filmetrics F40-UV - light source setting 02.jpg current
- 17:58, 17 July 2018 diff hist +15 N File:Filmetrics F40-UV - system pic 01.jpg current
- 17:57, 17 July 2018 diff hist +457 N Filmetrics F40-UV Microscope-Mounted initial description, link to quick start Tag: Visual edit
- 17:48, 17 July 2018 diff hist +41 Tool List →Inspection, Test and Characterization: link to Filmetrics F-40-UV page Tag: Visual edit
- 17:47, 17 July 2018 diff hist +7 Template:Announcements →ASML Maintenance: timeline update
- 16:39, 17 July 2018 diff hist +355 Atomic Layer Deposition Recipes split up bullets, clarified recipe name, formatting Tag: Visual edit
- 16:34, 17 July 2018 diff hist +155 Atomic Layer Deposition Recipes split into Chamber 1 & Chamber 3 Tag: Visual edit
- 15:57, 17 July 2018 diff hist +208 UV Ozone Reactor add description and model
- 15:53, 17 July 2018 diff hist +4 m UV Ozone Reactor bullet list Tag: Visual edit: Switched
- 15:53, 17 July 2018 diff hist +111 UV Ozone Reactor link to Quick start from TBosch email, and user manual PDF Tag: Visual edit: Switched
- 15:41, 17 July 2018 diff hist +36 N File:UV Ozone Manual Jelight M-144AX.pdf current
- 15:40, 17 July 2018 diff hist +989 N UV Ozone Quick Start quick start from Tony's email current Tag: Visual edit
- 14:40, 17 July 2018 diff hist +23 m Stepper 3 (ASML DUV) →Operating Procedures: added wafer recovery
- 14:39, 17 July 2018 diff hist +6 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Wafer Recovery / Wafer Handler Issues during Batch operation: bold Tag: Visual edit
- 14:38, 17 July 2018 diff hist -10 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Error, Calibration, Error logging Procedures for Users: remove header formatting Tag: Visual edit
- 14:35, 17 July 2018 diff hist +293 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration moved wafer recovery to top Tag: Visual edit
- 14:31, 17 July 2018 diff hist +2,129 N ASML Stepper 3 Error Recovery, Troubleshooting and Calibration copy/pasted BT's procedures, fomratting Tag: Visual edit
- 14:19, 17 July 2018 diff hist +76 m Stepper 3 (ASML DUV) →Operating Procedures: moved Error recovery to "troubleshootin" section Tag: Visual edit
- 14:17, 17 July 2018 diff hist +315 ASML 5500: Choose Marks for Prealignment added global mark updating current Tag: Visual edit
- 14:14, 17 July 2018 diff hist +117 Stepper 3 (ASML DUV) →Operating Procedures: link to error & calibration procedure Tag: Visual edit
- 14:13, 17 July 2018 diff hist -2 m ASML Stepper 3 Standard Operating Procedure remove colons Tag: Visual edit
- 14:12, 17 July 2018 diff hist -397 ASML Stepper 3 Standard Operating Procedure finalized formatting Tag: Visual edit
- 11:33, 17 July 2018 diff hist -263 m ASML Stepper 3 Standard Operating Procedure partial indenting Tag: Visual edit
- 11:25, 17 July 2018 diff hist +161 ASML Stepper 3 Standard Operating Procedure update indentation Tag: Visual edit
- 11:23, 17 July 2018 diff hist +6,403 N ASML Stepper 3 Standard Operating Procedure initial version, indenting in progress Tag: Visual edit
- 11:19, 17 July 2018 diff hist +80 Stepper 3 (ASML DUV) link to SOP Tag: Visual edit
- 11:16, 17 July 2018 diff hist -1 m Template:Announcements spacing fixes
- 11:15, 17 July 2018 diff hist +37 Template:Announcements delete SLR turbo fail, AMSL maint.
- 09:26, 17 July 2018 diff hist +103 Template:News LaserMon update ICP1
- 07:06, 16 July 2018 diff hist -58 m Sputtering Recipes →Sputter 5 (AJA ATC 2200-V): correct signupmonkey link, footnote star Tag: Visual edit
- 07:04, 16 July 2018 diff hist +74 m Vacuum Deposition Recipes link to sputter 5 section Tag: Visual edit
- 22:43, 14 July 2018 diff hist -168 Template:Announcements remove asml
- 19:02, 14 July 2018 diff hist -1 m Template:Announcements spacing fixes
- 19:02, 14 July 2018 diff hist -234 Template:Announcements stepper 3 wafer stuck
- 08:17, 13 July 2018 diff hist +92 Lithography Recipes →Photolithography Recipes: fixed links to Stepp3 pos PR Tag: Visual edit
- 09:09, 9 July 2018 diff hist +74 Vacuum Deposition Recipes sputt4 link to TiN - recipes table Tag: Visual edit
- 08:17, 9 July 2018 diff hist +23 Template:Announcements holiday fire update
- 16:26, 7 July 2018 diff hist -13 m Template:Announcements delete unaries
- 10:15, 7 July 2018 diff hist +6 m Template:Announcements Bullets
- 10:14, 7 July 2018 diff hist -1 m Template:Announcements →LAB OPEN: formatting
- 10:14, 7 July 2018 diff hist +64 Template:Announcements Lab open
- 22:26, 6 July 2018 diff hist -384 Template:Announcements Lab closed, deleted non-urgent announcements
- 22:04, 6 July 2018 diff hist -17 Template:Announcements SLR down failed turbo
- 22:03, 6 July 2018 diff hist -73 Template:Announcements Ma6 up
- 13:21, 6 July 2018 diff hist +166 Template:Announcements MA-6 down
- 13:20, 6 July 2018 diff hist +103 Template:Announcements lab open update
- 10:22, 6 July 2018 diff hist -295 Template:Announcements lab open
- 08:23, 6 July 2018 diff hist +378 Template:Announcements high humidity
- 23:45, 3 July 2018 diff hist -2 Staff List updated job titles Tag: Visual edit
- 23:25, 3 July 2018 diff hist +333 IR Thermal Microscope (QFI) added link to manual Tag: Visual edit
- 23:15, 3 July 2018 diff hist +12 m Tool List →Thermal Processing: fix table
- 23:09, 3 July 2018 diff hist +76 m Tool List →Thermal Processing: tabled Tag: Visual edit: Switched
- 23:00, 3 July 2018 diff hist +196 Tool List →Dry Etch: categories Tag: Visual edit
- 22:56, 3 July 2018 diff hist +117 Tool List →Vacuum Deposition: categories Tag: Visual edit
- 22:51, 3 July 2018 diff hist +18 m Tool List →Inspection, Test and Characterization: styled table Tag: Visual edit
- 22:50, 3 July 2018 diff hist -112 m Template:Announcements deleted icp2
- 16:41, 3 July 2018 diff hist +34 m Wet Benches →General Information: how to label glassware Tag: Visual edit
- 16:39, 3 July 2018 diff hist 0 m Bill Mitchell code/typo Tag: Visual edit: Switched
- 16:38, 3 July 2018 diff hist +47 Bill Mitchell →Tools: link to ALD Tag: Visual edit
- 16:38, 3 July 2018 diff hist +4 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: link to bill mitchell Tag: Visual edit
- 16:37, 3 July 2018 diff hist +774 Atomic Layer Deposition (Oxford FlexAL) →About: explained dual-chamber setup, added 50nm restriction Tag: Visual edit
- 16:10, 3 July 2018 diff hist +178 m Calculators + Utilities →CAD Layout Programs: credits fo L-edit tutotiral Tag: Visual edit
- 15:58, 3 July 2018 diff hist +1,382 N Suss MA-6 Backside Alignment QuickStart Demis' backside alignmetn quick-start instructions Tag: Visual edit
- 15:48, 3 July 2018 diff hist +45 Contact Aligner (SUSS MA-6) →Documentation: Link to Backside ALignment quickstart Tag: Visual edit
- 15:47, 3 July 2018 diff hist -159 Contact Aligner (SUSS MA-6) →Documentation: combined 4 pages into one PDF Tag: Visual edit
- 15:38, 3 July 2018 diff hist +788 Calculators + Utilities →Scripts + Programs: added CAD/L-Edit/KLayout info Tag: Visual edit
- 14:59, 3 July 2018 diff hist +259 Tool List →Inspection, Test and Characterization: added categories Tag: Visual edit
- 14:27, 3 July 2018 diff hist +131 m Wet Benches →Detailed Specifications: split temps into separate benches Tag: Visual edit
- 14:25, 3 July 2018 diff hist +495 Tool List categories for lithography tools Tag: Visual edit
- 17:00, 26 June 2018 diff hist 0 m Thermal Evaporation Recipes moved In to bottom of table current
- 16:47, 26 June 2018 diff hist +106 ICP Etching Recipes →Ti Etch (Panasonic 1): link to elecrochem paper Tag: Visual edit
- 08:46, 26 June 2018 diff hist -111 Template:Announcements ICP2 up
- 16:23, 25 June 2018 diff hist 0 m Template:Announcements Update timestamp
- 16:20, 25 June 2018 diff hist +124 Template:Announcements ICP he
- 10:04, 25 June 2018 diff hist -137 Template:Announcements icp2 update
- 22:19, 23 June 2018 diff hist +236 Template:Announcements icp2 vac error
- 17:00, 22 June 2018 diff hist 0 m Frequently Asked Questions minor reorg Tag: Visual edit
- 16:56, 22 June 2018 diff hist +634 Lab Rules OLD 2018 →Wet Bench Housekeeping: added descriptions of how to dispose of soaked wipes, for solvent and corrosive. Tag: Visual edit
- 16:49, 22 June 2018 diff hist +195 Lab Rules OLD 2018 →Nanofab Wipes: Non-shedding by request only, s/Pec described particulates a bit. Tag: Visual edit
- 16:46, 22 June 2018 diff hist 0 m Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: puncutation Tag: Visual edit
- 16:44, 22 June 2018 diff hist +45 m Frequently Asked Questions →General NanoFab Questions: record issues in tool logbook Tag: Visual edit
- 15:29, 22 June 2018 diff hist 0 Thermal Evaporation Recipes fixed table syntax, which caused both tables to land Outside the expected section
- 15:23, 22 June 2018 diff hist +4 m Thermal Evaporation Recipes corrected materials table subheading --> level 2 (was level 1)
- 15:05, 20 June 2018 diff hist +417 Template:Announcements pecvd1 s/w upgrade
- 13:53, 20 June 2018 diff hist -1 m Sputtering Recipes →Al2O3 deposition (IBD): AlOx recipe name Tag: Visual edit
- 13:31, 20 June 2018 diff hist -361 m Template:Announcements delted old notes
- 18:14, 18 June 2018 diff hist +126 N TEST PAGE testing link to gDrive MSDS folder current Tag: Visual edit
- 17:24, 15 June 2018 diff hist -23 Template:Announcements AFM up
- 17:23, 15 June 2018 diff hist +135 Template:Announcements IBD Update
- 17:22, 15 June 2018 diff hist +197 Template:Announcements RIE5 SiCl4 issue 5min max
- 17:20, 15 June 2018 diff hist +13 Chemical List - OLD 2018-09-05 H2O2 "30%" added Tag: Visual edit
- 15:05, 15 June 2018 diff hist +226 Template:Announcements stepper 2 up
- 15:04, 15 June 2018 diff hist -367 m Template:Announcements PECVD2 deleted
- 16:18, 12 June 2018 diff hist +21 m Template:Announcements pecvd2 retraining required
- 16:17, 12 June 2018 diff hist -185 Template:Announcements rie5 SiCl4 UP, deleted "lab open"
- 16:14, 11 June 2018 diff hist -583 Template:Announcements lab reopened update, deleted DSE wafer removed
- 11:07, 8 June 2018 diff hist +266 Template:Announcements afm down
- 09:33, 8 June 2018 diff hist +9 Template:Announcements dse update, up
- 11:46, 7 June 2018 diff hist +12 Template:Announcements less startling title for lab closed
- 11:45, 7 June 2018 diff hist +489 Template:Announcements lab shutdown Monday june 11
- 09:30, 7 June 2018 diff hist +128 ICP Etch 1 (Panasonic E646V) →About: additional description of Ashing chamber utility Tag: Visual edit
- 09:28, 7 June 2018 diff hist +135 ICP Etch 1 (Panasonic E646V) →Detailed Specifications: added chuck temperatures Tag: Visual edit
- 09:25, 7 June 2018 diff hist +52 ICP Etch 2 (Panasonic E626I) →Detailed Specifications: default chuck temp shown Tag: Visual edit
- 17:18, 6 June 2018 diff hist +15 Template:Announcements bench 7 heated bath update
- 16:19, 5 June 2018 diff hist +18 m Editing Tutorials changed headers to "heading" style Tag: Visual edit
- 16:18, 5 June 2018 diff hist +69 m Editing Tutorials rearrange, minor edits Tag: Visual edit
- 14:37, 5 June 2018 diff hist -211 Template:Announcements deleted rie5 broken wafer
- 17:19, 4 June 2018 diff hist +185 m Calculators + Utilities →Wet Etching: minor description updates Tag: Visual edit
- 17:00, 4 June 2018 diff hist +40 Template:Announcements RIE#5 SiCl4 update
- 16:59, 4 June 2018 diff hist +212 Template:Announcements rie5 wafers in chamber
- 13:41, 4 June 2018 diff hist +4 m Stepper 3 (ASML DUV) →Process Information: italics on sub-bullet Tag: Visual edit
- 13:40, 4 June 2018 diff hist +127 Stepper 3 (ASML DUV) →About: copied info to "process info" Tag: Visual edit
- 12:23, 4 June 2018 diff hist +131 Stepper 3 (ASML DUV) approx maximum wafer bow Tag: Visual edit
- 10:49, 31 May 2018 diff hist +296 ICP Etch 1 (Panasonic E646V) updates, listed SEMI-std. flats Tag: Visual edit
- 20:58, 30 May 2018 diff hist +67 Chemical List - OLD 2018-09-05 →Lithography Chemicals: bolded some stocked chemicals Tag: Visual edit
- 17:26, 30 May 2018 diff hist +12 Template:Announcements many updates
- 15:50, 30 May 2018 diff hist 0 m Chemical List - OLD 2018-09-05 →Lithography Chemicals Tag: Visual edit
- 15:50, 30 May 2018 diff hist +200 Chemical List - OLD 2018-09-05 →Lithography Chemicals: links to NMP MSDS/Datasheets Tag: Visual edit
- 15:31, 30 May 2018 diff hist +17 N File:AZ NMP RINSE MSDS.pdf AZ_NMP_RINSE_MSDS current
- 17:53, 22 May 2018 diff hist +232 N Usage Data and Statistics added link to NanoFab usage presenation Tag: Visual edit
- 09:16, 18 May 2018 diff hist +20 Field Emission SEM 2 (JEOL IT800SHL) added 25x25mm Tag: Visual edit
- 09:09, 18 May 2018 diff hist -238 Template:Announcements fab open, maintenance complete
- 21:40, 16 May 2018 diff hist 0 Template:Announcements rie5 date correction
- 21:40, 16 May 2018 diff hist +166 Template:Announcements RIE5 SiCl ETA
- 16:19, 16 May 2018 diff hist -124 Template:Announcements stepper 2 up
- 16:43, 15 May 2018 diff hist +246 Template:Announcements PECVD2 update
- 16:41, 15 May 2018 diff hist +42 Template:Announcements stepper 2 update
- 13:25, 14 May 2018 diff hist +386 Template:Announcements exhaust shutdown
- 11:43, 14 May 2018 diff hist -19 Template:Announcements stepper 2 update
- 19:23, 12 May 2018 diff hist -316 Template:Announcements stepper 2 down, deleted >1 week old annc.
- 20:25, 10 May 2018 diff hist +157 Molecular Vapor Deposition link to nanoimprint FDTS recipe Tag: Visual edit
- 21:07, 5 May 2018 diff hist 0 Lithography Recipes reorder - recipes at top
- 09:44, 4 May 2018 diff hist -1 m Sputter 5 (AJA ATC 2200-V) moved tool info to top
- 15:02, 30 April 2018 diff hist +115 Template:Announcements jeol up
- 10:50, 30 April 2018 diff hist +406 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): old delted recipes ection Tag: Visual edit
- 10:47, 30 April 2018 diff hist 0 m Template:Announcements reorder
- 10:46, 30 April 2018 diff hist +6 m Template:Announcements jeol typo
- 10:45, 30 April 2018 diff hist -204 m Template:Announcements reduce jeol text
- 10:45, 30 April 2018 diff hist +424 Template:Announcements jeol sem service
- 10:27, 30 April 2018 diff hist +12 m Template:Tool formatting
- 10:26, 30 April 2018 diff hist +419 Template:Tool documented available options for super & ToolType
- 10:18, 30 April 2018 diff hist +133 Vapor HF Etch →Recipes: link to general Dry Etching recipes Tag: Visual edit
- 10:16, 30 April 2018 diff hist -4 m Template:Tool change all types to show general recipe link text
- 10:12, 30 April 2018 diff hist -2 Template:Tool change recipes link to state general recipes, not specific to this tool
- 10:03, 30 April 2018 diff hist -52 Vapor HF Etch link to Vapor HF recipes
- 15:01, 27 April 2018 diff hist 0 m Template:Announcements rearrange, newest on top
- 15:00, 27 April 2018 diff hist +88 Template:Announcements RIE5 sicl4 update
- 14:58, 27 April 2018 diff hist +224 m Template:Announcements moved isntructions to bottom of page
- 16:48, 26 April 2018 diff hist -15 Template:Announcements pecvd 2 title
- 16:48, 26 April 2018 diff hist +52 Template:Announcements pecvd2 update
- 16:15, 26 April 2018 diff hist +57 Template:Announcements rie5 sicl4 down
- 12:50, 25 April 2018 diff hist -80 Template:Announcements stepper 2 up
- 16:55, 24 April 2018 diff hist -377 Template:Announcements deleted ADT