User contributions
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- 18:29, 6 April 2020 (diff | hist) . . (+4) . . Test Data of etching SiO2 with CHF3/CF4 (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:29, 6 April 2020 (diff | hist) . . (+1) . . DSEIII (PlasmaTherm/Deep Silicon Etcher) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:28, 6 April 2020 (diff | hist) . . (+2) . . Calculators + Utilities (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:28, 6 April 2020 (diff | hist) . . (+14) . . PECVD Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:28, 6 April 2020 (diff | hist) . . (+1) . . Rapid Thermal Processor (SSI Solaris 150) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 18:28, 6 April 2020 (diff | hist) . . (+2) . . Atomic Layer Deposition (Oxford FlexAL) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:28, 6 April 2020 (diff | hist) . . (+7) . . Stepper Recipes (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:27, 6 April 2020 (diff | hist) . . (+1) . . Lift-Off with DUV Imaging + PMGI Underlayer (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:27, 6 April 2020 (diff | hist) . . (+1) . . YES-150C-Various-Resists (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 18:27, 6 April 2020 (diff | hist) . . (+2) . . Tool List (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:27, 6 April 2020 (diff | hist) . . (+1) . . IR Aligner (SUSS MJB-3 IR) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:27, 6 April 2020 (diff | hist) . . (+2) . . IR Thermal Microscope (QFI) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 18:27, 6 April 2020 (diff | hist) . . (+1) . . Chemical List (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:26, 6 April 2020 (diff | hist) . . (+1) . . Molecular Vapor Deposition (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
- 18:26, 6 April 2020 (diff | hist) . . (+4) . . Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 18:26, 6 April 2020 (diff | hist) . . (+1) . . KLA Tencor P7 - Saving Profile Data (Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") (current)
- 18:25, 6 April 2020 (diff | hist) . . (+3) . . ICP Etching Recipes (Text replacement - "[http://wiki" to "[https://wiki")
- 18:25, 6 April 2020 (diff | hist) . . (+3) . . ASML 5500 Mask Making Guidelines (Text replacement - "[http://wiki" to "[https://wiki")
- 18:24, 4 April 2020 (diff | hist) . . (+6) . . Surface Analysis (KLA/Tencor Surfscan) (Text replacement - "[//wiki" to "[https://wiki")
- 18:24, 4 April 2020 (diff | hist) . . (+6) . . E-Beam 4 (CHA) (Text replacement - "[//wiki" to "[https://wiki") (current)
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