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- 13:33, 30 March 2020 diff hist +1 ICP-PECVD (Unaxis VLR) →Documentation
- 13:33, 30 March 2020 diff hist -1 ICP-PECVD (Unaxis VLR) →Documentation
- 13:32, 30 March 2020 diff hist +1 Wafer Coating Process Traveler1 current
- 13:32, 30 March 2020 diff hist -12 Wafer Coating Process Traveler1
- 13:30, 30 March 2020 diff hist -208 Wafer Coating Process Traveler1 →1. Unaxis deposition - 300nm SiO2 LDR film @250°C Tag: Visual edit
- 13:15, 30 March 2020 diff hist -41 Wafer Coating Process Traveler1 →1. Unaxis deposition - 300nm of SiO2 LDR film @250°C Tag: Visual edit
- 13:12, 30 March 2020 diff hist -74 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:54, 30 March 2020 diff hist +21 Wafer Coating Process Traveler1 subheadings Tag: Visual edit
- 12:53, 30 March 2020 diff hist +4,656 Wafer Coating Process Traveler1 subheading Tag: Visual edit
- 12:52, 30 March 2020 diff hist +25 Wafer Coating Process Traveler1 Tag: Visual edit
- 12:50, 30 March 2020 diff hist -29 Wafer Coating Process Traveler1 Blanked the page Tags: Blanking Visual edit
- 12:49, 30 March 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:48, 30 March 2020 diff hist -5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:46, 30 March 2020 diff hist +1 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating Tag: Visual edit
- 12:44, 30 March 2020 diff hist +4 Wafer Coating Process Traveler1 Tag: Visual edit
- 12:09, 30 March 2020 diff hist +25 N Wafer Coating Process Traveler1 Created page with "Unaxis_SOP_3-30-2020.docx" Tag: Visual edit
- 12:08, 30 March 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:04, 30 March 2020 diff hist -98 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 12:02, 30 March 2020 diff hist 0 N File:Unaxis SOP 3-30-2020.docx current
- 12:01, 30 March 2020 diff hist +33 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating Tag: Visual edit
- 12:00, 30 March 2020 diff hist +1 ICP-PECVD (Unaxis VLR) →Documentation
- 10:53, 30 March 2020 diff hist +276 ICP-PECVD (Unaxis VLR) link to Wafer Coating Process Traveler + Recipes page Tag: Visual edit
- 10:47, 30 March 2020 diff hist -86 PECVD Recipes →ICP-PECVD (Unaxis VLR): move Process SOP to Tool page Tag: Visual edit
- 10:38, 30 March 2020 diff hist +8 PECVD Recipes →ICP-PECVD (Unaxis VLR): subheading Tag: Visual edit
- 10:35, 30 March 2020 diff hist +6 Troubleshooting and Recovery
- 10:27, 30 March 2020 diff hist +8 Troubleshooting and Recovery
- 10:25, 30 March 2020 diff hist +22 Troubleshooting and Recovery sub-heading level1 Tag: Visual edit
- 10:43, 27 March 2020 diff hist +68 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:42, 27 March 2020 diff hist +4 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:23, 27 March 2020 diff hist -112 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:22, 27 March 2020 diff hist -20 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 10:22, 27 March 2020 diff hist +1 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 10:22, 27 March 2020 diff hist +94 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 10:19, 27 March 2020 diff hist +29 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:19, 27 March 2020 diff hist +21 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 10:18, 27 March 2020 diff hist -1 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:17, 27 March 2020 diff hist -42 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:16, 27 March 2020 diff hist +29 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:15, 27 March 2020 diff hist -30 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:15, 27 March 2020 diff hist 0 N File:Unaxis SOP 3-27-2020.pdf current
- 10:13, 27 March 2020 diff hist -87 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:03, 27 March 2020 diff hist +29 N Unaxis SOP 3-12-2020.docx Created page with "Unaxis_SOP_3-12-2020.docx" current Tag: Visual edit
- 10:02, 27 March 2020 diff hist +30 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 10:00, 27 March 2020 diff hist 0 N File:Unaxis SOP 3-12-2020.docx current
- 10:00, 27 March 2020 diff hist +12 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 09:59, 27 March 2020 diff hist -17 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 09:58, 27 March 2020 diff hist +86 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 09:55, 27 March 2020 diff hist +35 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 09:54, 27 March 2020 diff hist +4 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 16:49, 26 March 2020 diff hist -42 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 16:49, 26 March 2020 diff hist +113 Autostep 200 Troubleshooting and Recovery →System restarting procedure Tag: Visual edit
- 16:47, 26 March 2020 diff hist +117 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 16:44, 26 March 2020 diff hist -14 Autostep 200 Troubleshooting and Recovery →System restarting procedure Tag: Visual edit
- 16:43, 26 March 2020 diff hist 0 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 16:41, 26 March 2020 diff hist +7 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 16:40, 26 March 2020 diff hist +7 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 16:40, 26 March 2020 diff hist -46 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 16:38, 26 March 2020 diff hist -94 Autostep 200 Troubleshooting and Recovery
- 16:36, 26 March 2020 diff hist -16 Autostep 200 Troubleshooting and Recovery →Troubleshooting Tag: Visual edit
- 15:25, 26 March 2020 diff hist +3 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 15:24, 26 March 2020 diff hist +1,567 Autostep 200 Troubleshooting and Recovery →How to power up components Tag: Visual edit
- 15:09, 26 March 2020 diff hist +16 N File:Autostep 200 panel door.png current
- 14:56, 26 March 2020 diff hist +1 Autostep 200 Troubleshooting and Recovery →How to power up components Tag: Visual edit
- 14:55, 26 March 2020 diff hist -41 Autostep 200 Troubleshooting and Recovery →How to power up components Tag: Visual edit
- 14:45, 26 March 2020 diff hist +481 Autostep 200 Troubleshooting and Recovery →How to power up components
- 14:43, 26 March 2020 diff hist -245 Autostep 200 Troubleshooting and Recovery →How to power up components Tag: Visual edit
- 14:44, 25 March 2020 diff hist 0 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:40, 25 March 2020 diff hist -3 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:39, 25 March 2020 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:38, 25 March 2020 diff hist +30 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:36, 25 March 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 14:36, 25 March 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:35, 25 March 2020 diff hist -2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:34, 25 March 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 14:34, 25 March 2020 diff hist +8 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:32, 25 March 2020 diff hist +21 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 14:29, 25 March 2020 diff hist +10 PECVD Recipes →SiO2 deposition (Unaxis VLR) Tag: Visual edit
- 14:28, 25 March 2020 diff hist +19 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:25, 25 March 2020 diff hist -1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 14:24, 25 March 2020 diff hist +23 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:22, 25 March 2020 diff hist -1 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:21, 25 March 2020 diff hist -5 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 14:07, 25 March 2020 diff hist -6 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:06, 25 March 2020 diff hist -20 PECVD Recipes →SiN 250C data
- 14:05, 25 March 2020 diff hist +28 PECVD Recipes →SiN deposition (Unaxis VLR)
- 14:01, 25 March 2020 diff hist -1 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 13:57, 25 March 2020 diff hist +39 PECVD Recipes →SiN deposition (Unaxis VLR)
- 13:56, 25 March 2020 diff hist +7 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 09:55, 25 March 2020 diff hist +89 Autostep 200 Troubleshooting and Recovery →How to power up components Tag: Visual edit
- 09:49, 25 March 2020 diff hist +180 Autostep 200 Troubleshooting and Recovery →How to power down components Tag: Visual edit
- 09:15, 25 March 2020 diff hist -3 Stepper 2 (AutoStep 200) Tag: Visual edit
- 15:15, 24 March 2020 diff hist -3 Biljana Stamenic Tag: Visual edit
- 15:14, 24 March 2020 diff hist +438 Biljana Stamenic →About Tag: Visual edit
- 13:55, 24 March 2020 diff hist +4 Autostep 200 Troubleshooting and Recovery Tag: Visual edit: Switched
- 13:53, 24 March 2020 diff hist +2 Autostep 200 Troubleshooting and Recovery →How to power down components
- 13:52, 24 March 2020 diff hist +120 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 13:50, 24 March 2020 diff hist +3 Autostep 200 Troubleshooting and Recovery
- 13:48, 24 March 2020 diff hist +46 Autostep 200 Troubleshooting and Recovery
- 13:46, 24 March 2020 diff hist 0 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 13:45, 24 March 2020 diff hist +34 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 13:30, 24 March 2020 diff hist +161 Autostep 200 Troubleshooting and Recovery RESTART POWER DOWN Tag: Visual edit
- 13:20, 24 March 2020 diff hist +3 N File:RMS control.png current
- 13:17, 24 March 2020 diff hist +13 N File:Autostep stage control.png current
- 13:15, 24 March 2020 diff hist +3 N File:Autostep DSW.png current
- 13:09, 24 March 2020 diff hist +1 Autostep 200 Troubleshooting and Recovery rest Tag: Visual edit
- 10:21, 24 March 2020 diff hist +465 Autostep 200 Troubleshooting and Recovery →Restarting procedure: add Tag: Visual edit
- 09:15, 24 March 2020 diff hist +749 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 09:03, 24 March 2020 diff hist +20 N File:Autostep main computer switch.png current
- 09:01, 24 March 2020 diff hist +13 N File:Autostep main computer -1.png current
- 08:56, 24 March 2020 diff hist +19 N File:Autostep Cabinet .png current
- 08:48, 24 March 2020 diff hist +10 N File:Computer-2 -smart set.png current
- 08:35, 24 March 2020 diff hist +8 N File:Lower keyboard.png current
- 08:32, 24 March 2020 diff hist -2 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 08:25, 24 March 2020 diff hist +152 Autostep 200 Troubleshooting and Recovery
- 08:22, 24 March 2020 diff hist -158 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 08:18, 24 March 2020 diff hist +1 Autostep 200 Troubleshooting and Recovery
- 08:17, 24 March 2020 diff hist +12 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 08:15, 24 March 2020 diff hist +163 Autostep 200 Troubleshooting and Recovery
- 08:02, 24 March 2020 diff hist +55 Autostep 200 Troubleshooting and Recovery →Restarting procedure Tag: Visual edit
- 08:00, 24 March 2020 diff hist +8 N File:Autostep 200 Upper keyboard.png current
- 07:57, 24 March 2020 diff hist +1 Autostep 200 Troubleshooting and Recovery →Restarting procedure
- 07:55, 24 March 2020 diff hist +7 Autostep 200 Troubleshooting and Recovery →Powering down Tag: Visual edit
- 22:14, 23 March 2020 diff hist +3 Autostep 200 Troubleshooting and Recovery →Powering down Tag: Visual edit
- 22:08, 23 March 2020 diff hist +237 Autostep 200 Troubleshooting and Recovery
- 21:58, 23 March 2020 diff hist -1 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 21:56, 23 March 2020 diff hist +1,822 Autostep 200 Troubleshooting and Recovery Tag: Visual edit
- 21:41, 23 March 2020 diff hist -9 Old Training Manual current
- 14:36, 23 March 2020 diff hist +32 Autostep 200 Old training manual current
- 14:34, 23 March 2020 diff hist +88 N Autostep 200 Old training manual Created page with "[https://wiki.nanotech.ucsb.edu/w/images/5/54/Autostep200_Training_Manual_3-23-2020.pdf]" Tag: Visual edit
- 14:34, 23 March 2020 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 14:30, 23 March 2020 diff hist 0 N File:Autostep200 Training Manual 3-23-2020.pdf current
- 14:30, 23 March 2020 diff hist +34 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 14:29, 23 March 2020 diff hist -145 Stepper 2 (AutoStep 200) →Operating Procedures
- 14:16, 23 March 2020 diff hist +25 Old Training Manual Tag: Visual edit
- 14:16, 23 March 2020 diff hist +17 Old Training Manual
- 14:15, 23 March 2020 diff hist +1 Old Training Manual
- 14:15, 23 March 2020 diff hist -103 Stepper 1 (GCA 6300) →Operating Procedures
- 14:14, 23 March 2020 diff hist +86 N Old Training Manual Created page with "[https://wiki.nanotech.ucsb.edu/w/images/5/5a/GCA_6300_Training_Manual-_3-23-2020.pdf]" Tag: Visual edit
- 14:13, 23 March 2020 diff hist +2 Stepper 1 (GCA 6300) →Operating Procedures
- 14:13, 23 March 2020 diff hist +24 Stepper 1 (GCA 6300) →Operating Procedures
- 14:11, 23 March 2020 diff hist 0 N File:GCA 6300 Training Manual- 3-23-2020.pdf current
- 14:05, 23 March 2020 diff hist 0 N File:GCA 6300 Training Manual-3-23-2020.pdf current
- 14:00, 23 March 2020 diff hist -97 Stepper 1 (GCA 6300) →Operating Procedures
- 14:00, 23 March 2020 diff hist +71 Stepper 1 (GCA 6300) →Operating Procedures
- 13:58, 23 March 2020 diff hist -32 Stepper 1 (GCA 6300) →Operating Procedures
- 13:58, 23 March 2020 diff hist +36 Stepper 1 (GCA 6300) →Operating Procedures
- 13:57, 23 March 2020 diff hist +16 Stepper 1 (GCA 6300) →Operating Procedures
- 13:56, 23 March 2020 diff hist -16 Stepper 1 (GCA 6300) →Operating Procedures
- 13:52, 23 March 2020 diff hist -687 Old training manual Blanked the page current Tags: Blanking Visual edit
- 13:50, 23 March 2020 diff hist +426 Old training manual
- 12:34, 23 March 2020 diff hist +134 Old training manual
- 11:39, 23 March 2020 diff hist -3 Old training manual Tag: Visual edit
- 11:38, 23 March 2020 diff hist 0 Old training manual Tag: Visual edit: Switched
- 11:37, 23 March 2020 diff hist -244 Old training manual Tag: Visual edit
- 11:37, 23 March 2020 diff hist -67 Old training manual
- 11:36, 23 March 2020 diff hist +5 Old training manual
- 11:35, 23 March 2020 diff hist +4 Old training manual Tag: Visual edit
- 11:35, 23 March 2020 diff hist +5 Old training manual Tag: Visual edit
- 11:34, 23 March 2020 diff hist +54 Old training manual Tag: Visual edit
- 11:32, 23 March 2020 diff hist +166 Old training manual Tag: Visual edit
- 11:30, 23 March 2020 diff hist 0 Old training manual
- 11:28, 23 March 2020 diff hist +60 Old training manual Tag: Visual edit
- 11:23, 23 March 2020 diff hist -210 Old training manual
- 11:22, 23 March 2020 diff hist +1 Old training manual
- 11:21, 23 March 2020 diff hist -1 Old training manual
- 11:21, 23 March 2020 diff hist +84 Old training manual
- 11:17, 23 March 2020 diff hist +4 Old training manual
- 11:17, 23 March 2020 diff hist +58 Old training manual
- 11:16, 23 March 2020 diff hist -1 Old training manual
- 11:15, 23 March 2020 diff hist +107 Old training manual
- 11:13, 23 March 2020 diff hist +2 Old training manual
- 11:13, 23 March 2020 diff hist +28 Old training manual
- 11:12, 23 March 2020 diff hist -2 Old training manual
- 11:11, 23 March 2020 diff hist +77 Old training manual
- 11:01, 23 March 2020 diff hist -60 Old training manual Blanked the page Tag: Blanking
- 10:17, 23 March 2020 diff hist +4 Old training manual Tag: Visual edit
- 10:16, 23 March 2020 diff hist +56 Old training manual Tag: Visual edit
- 10:03, 23 March 2020 diff hist -32 Old training manual Blanked the page Tag: Blanking
- 09:58, 23 March 2020 diff hist -7 GCA Old full training manual current
- 09:57, 23 March 2020 diff hist +2 GCA Old full training manual
- 09:57, 23 March 2020 diff hist -45 GCA Old full training manual
- 09:56, 23 March 2020 diff hist +34 GCA Old full training manual
- 09:53, 23 March 2020 diff hist -21 GCA Old full training manual Tag: Visual edit
- 09:53, 23 March 2020 diff hist +48 GCA Old full training manual Tag: Visual edit
- 09:52, 23 March 2020 diff hist +87 N GCA Old full training manual Created page with "Media:Example.ogg Media: GCA 6300 Stepper Training Manual- Full version 2020.pdf"
- 09:47, 23 March 2020 diff hist +32 Old training manual old stepper training Tag: Visual edit
- 09:40, 23 March 2020 diff hist +11 N File:GCA 6300 Stepper Training Manual- Full version 2020.pdf current
- 09:24, 23 March 2020 diff hist -50 Old training manual Blanked the page Tag: Blanking
- 09:00, 23 March 2020 diff hist +6 N File:GCA 6300 Stepper Training Manual- Full version 2019.pdf current
- 08:58, 23 March 2020 diff hist +1 Old training manual
- 08:57, 23 March 2020 diff hist +49 N Old training manual Created page with "GCA 6300 Stepper Training MAnual-Full version" Tag: Visual edit
- 08:53, 23 March 2020 diff hist +26 Stepper 1 (GCA 6300) →Operating Procedures
- 08:53, 23 March 2020 diff hist -90 Stepper 1 (GCA 6300) →Operating Procedures
- 08:49, 23 March 2020 diff hist -9 GCA 6300 training manual -old instructions current Tag: Visual edit
- 08:48, 23 March 2020 diff hist +35,779 N GCA 6300 training manual -old instructions Created page with "Updated 4-24-2019 GCA Stepper Training Guide & References General Information about system 1 Aligning reticle (mask) to system 2 Logging into computer/checking the system 3..."
- 08:36, 23 March 2020 diff hist +5 Stepper 1 (GCA 6300) →Operating Procedures
- 08:34, 23 March 2020 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 08:34, 23 March 2020 diff hist -1 Stepper 1 (GCA 6300) →Operating Procedures
- 08:33, 23 March 2020 diff hist +45 Stepper 1 (GCA 6300) →Operating Procedures
- 08:31, 23 March 2020 diff hist -1 GCA 6300 Reboot Procedures Tag: Visual edit
- 08:22, 23 March 2020 diff hist +3 GCA 6300 Reboot Procedures
- 08:19, 23 March 2020 diff hist +1,576 N GCA 6300 Reboot Procedures Created page with "Reboot – When terminal keyboard locks up (frozen keyboard), etc. 1. If the terminal keyboard (the main keyboard used for alignment) is not responding, first make sure the NO..."
- 08:14, 23 March 2020 diff hist +9 N File:GCA 6300 Reboot computers.docx current
- 08:10, 23 March 2020 diff hist +32 Stepper 1 (GCA 6300) →Operating Procedures
- 20:01, 22 March 2020 diff hist +42 Stepper 2 (AutoStep 200) →Operating Procedures
- 20:01, 22 March 2020 diff hist +47 Autostep 200 Troubleshooting and Recovery
- 20:00, 22 March 2020 diff hist -2 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:59, 22 March 2020 diff hist -1 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:58, 22 March 2020 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:57, 22 March 2020 diff hist -8 Stepper 2 (AutoStep 200) Operating Procedures
- 19:56, 22 March 2020 diff hist +39 Stepper 2 (AutoStep 200) →Operating Procedures
- 19:51, 22 March 2020 diff hist +9 Stepper 1 (GCA 6300) →Operating Procedures
- 19:50, 22 March 2020 diff hist -6 Stepper 1 (GCA 6300) →Operating Procedures
- 19:50, 22 March 2020 diff hist +6 Stepper 1 (GCA 6300) →Operating Procedures
- 19:50, 22 March 2020 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 19:49, 22 March 2020 diff hist +13 Stepper 1 (GCA 6300) →Operating Procedures
- 19:48, 22 March 2020 diff hist -11 Stepper 1 (GCA 6300) →Operating Procedures
- 19:40, 22 March 2020 diff hist +1 Troubleshooting and Recovery Tag: Visual edit
- 19:39, 22 March 2020 diff hist +427 Troubleshooting and Recovery Tag: Visual edit
- 19:12, 22 March 2020 diff hist +2 Troubleshooting and Recovery Tag: Visual edit
- 19:11, 22 March 2020 diff hist +4,310 Troubleshooting and Recovery
- 18:57, 22 March 2020 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 10:36, 20 March 2020 diff hist +65 Programming a Job →JOB Programming - FULL current
- 09:42, 19 March 2020 diff hist -8 Stepper 1 (GCA 6300) - Standard Operating Procedure current
- 09:30, 19 March 2020 diff hist +121 Stepper 1 (GCA 6300) - Standard Operating Procedure →Resist spin coating and cleaning the back-side of wafer
- 09:20, 19 March 2020 diff hist -102 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 09:19, 19 March 2020 diff hist +73 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 09:14, 19 March 2020 diff hist -1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 22:33, 18 March 2020 diff hist +2 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:22, 18 March 2020 diff hist -1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:20, 18 March 2020 diff hist -9 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:16, 18 March 2020 diff hist +8 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:14, 18 March 2020 diff hist +30 Stepper 1 (GCA 6300)
- 11:08, 10 March 2020 diff hist 0 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 15:36, 27 February 2020 diff hist -16 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:35, 27 February 2020 diff hist +270 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:32, 27 February 2020 diff hist -2 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:32, 27 February 2020 diff hist -131 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:31, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:30, 27 February 2020 diff hist +127 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:29, 27 February 2020 diff hist +125 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:27, 27 February 2020 diff hist +144 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 15:27, 27 February 2020 diff hist -124 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:24, 27 February 2020 diff hist -2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:23, 27 February 2020 diff hist +260 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:23, 27 February 2020 diff hist -261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:22, 27 February 2020 diff hist +150 PECVD Recipes →SiO2 deposition (Unaxis VLR)