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- 16:34, 8 January 2024 diff hist +4 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:33, 8 January 2024 diff hist -3 Stepper 2 (AutoStep 200) →Operating Procedures Tag: Visual edit
- 16:32, 8 January 2024 diff hist -82 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:31, 8 January 2024 diff hist +124 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:30, 8 January 2024 diff hist +78 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:28, 8 January 2024 diff hist +2 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:28, 8 January 2024 diff hist -23 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:27, 8 January 2024 diff hist -141 Stepper 2 (AutoStep 200) →Recipes
- 16:27, 8 January 2024 diff hist +110 Stepper 2 (AutoStep 200) →Recipes
- 16:24, 8 January 2024 diff hist +35 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:: two alignments current Tag: Visual edit
- 16:17, 8 January 2024 diff hist +24 Stepper 2 (AutoStep 200) Operating Procedures →Other Useful links for this system:
- 15:53, 8 January 2024 diff hist 0 N File:AUTOSTEP 200 User Accessible Commands 010524.pdf current
- 15:43, 8 January 2024 diff hist 0 N File:Autostep200 Training Old Training Manual.pdf current
- 12:51, 8 January 2024 diff hist -2 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:50, 8 January 2024 diff hist -2 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:49, 8 January 2024 diff hist +18 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:45, 8 January 2024 diff hist +30 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:44, 8 January 2024 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:41, 8 January 2024 diff hist +126 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:39, 8 January 2024 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf current
- 12:39, 8 January 2024 diff hist -257 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:38, 8 January 2024 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:36, 8 January 2024 diff hist -7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:35, 8 January 2024 diff hist -3 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:35, 8 January 2024 diff hist +8 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:33, 8 January 2024 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf current
- 12:29, 8 January 2024 diff hist +47 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer Tag: Visual edit
- 12:27, 8 January 2024 diff hist -148 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →2. Second layer
- 12:27, 8 January 2024 diff hist -5 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 12:23, 8 January 2024 diff hist +156 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate
- 12:17, 8 January 2024 diff hist -13,866 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →JOB Programming - FULL: corrections regarding exposing pieces Tag: Visual edit
- 12:06, 8 January 2024 diff hist -14 Stepper 2 (AutoStep 200) →Operating Procedures
- 12:05, 8 January 2024 diff hist -2,710 Stepper 2 (AutoStep 200) Operating Procedures →Running a FOCUS and\or EXPOSURE matrix Tag: Visual edit
- 12:05, 8 January 2024 diff hist -7,008 Stepper 2 (AutoStep 200) Operating Procedures →Resist spin coating and cleaning the back-side of wafer: organizing SOP as they are for GCA 6300 Tag: Visual edit
- 12:02, 8 January 2024 diff hist -152 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 12:01, 8 January 2024 diff hist -154 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer
- 12:01, 8 January 2024 diff hist +162 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer
- 11:58, 8 January 2024 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf current
- 11:42, 8 January 2024 diff hist +1 Stepper 2 (AutoStep 200) →Operating Procedures
- 11:41, 8 January 2024 diff hist 0 N File:Autostep 200 - Setting up the Job.pdf current
- 11:36, 8 January 2024 diff hist +109 Stepper 2 (AutoStep 200) →Operating Procedures
- 11:00, 8 January 2024 diff hist +132 Stepper 2 (AutoStep 200) →Operating Procedures
- 10:59, 8 January 2024 diff hist 0 File:Running the JOB- One Page Instructions.pdf Biljana uploaded a new version of File:Running the JOB- One Page Instructions.pdf current
- 10:58, 8 January 2024 diff hist -132 Stepper 2 (AutoStep 200) →Operating Procedures
- 10:57, 8 January 2024 diff hist +132 Stepper 2 (AutoStep 200) →Operating Procedures
- 10:56, 8 January 2024 diff hist 0 N File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 diff hist -140 Stepper 2 (AutoStep 200) →Operating Procedures
- 17:42, 5 January 2024 diff hist +20 Stepper 2 (AutoStep 200) →Operating Procedures
- 17:40, 5 January 2024 diff hist +132 Stepper 2 (AutoStep 200) →Operating Procedures
- 17:39, 5 January 2024 diff hist 0 N File:Autostep 200 - Standard Operating Procedure-2023.pdf current
- 17:20, 5 January 2024 diff hist 0 N File:Autostep200+chucks+shims.pdf current
- 17:12, 5 January 2024 diff hist 0 N File:Autostep 200 chucks-2023.pdf current
- 17:00, 5 January 2024 diff hist 0 N File:Autostep 200 Chucks table.pdf current
- 16:32, 5 January 2024 diff hist +143 Stepper 2 (AutoStep 200) →Operating Procedures
- 16:30, 5 January 2024 diff hist 0 N File:Autostep 200 Running a JOB One Page Instructions.pdf current
- 15:44, 5 January 2024 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:43, 5 January 2024 diff hist 0 N File:GCA 6300 Standard Operating Procedure 010524.pdf current
- 15:35, 5 January 2024 diff hist +2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:28, 5 January 2024 diff hist 0 N File:GCA 6300 Available chucks 2023.pdf current
- 15:26, 5 January 2024 diff hist 0 N File:GCA 6300+chucks+shims 2023 (1).pdf current
- 15:11, 5 January 2024 diff hist 0 N File:GCA 6300 Chucks table 2023.pdf current
- 15:07, 5 January 2024 diff hist 0 N File:GCA 6300+chucks+shims 2023.xlsx current
- 15:07, 5 January 2024 diff hist 0 N File:GCA 6300 Available chucks 2023.pptx current
- 17:48, 4 January 2024 diff hist +30 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:47, 4 January 2024 diff hist +10 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:46, 4 January 2024 diff hist +11 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:45, 4 January 2024 diff hist -112 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:45, 4 January 2024 diff hist +119 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:43, 4 January 2024 diff hist -85 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:42, 4 January 2024 diff hist -276 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:41, 4 January 2024 diff hist +237 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:38, 4 January 2024 diff hist 0 N File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122123 small substrates.pdf
- 17:37, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 diff hist 0 N File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 17:05, 4 January 2024 diff hist +77 Wafer scanning process traveler →Wafers to Use: updated surfscan instructions. current Tag: Visual edit
- 16:57, 4 January 2024 diff hist +77 Wafer scanning process traveler →Scan before process step: updates scanning procesure Tag: Visual edit
- 16:46, 4 January 2024 diff hist +1 Wafer scanning process traveler →Scanning procedure for 4" Si wafers
- 16:07, 29 December 2023 diff hist +51 Biljana Stamenic current
- 15:56, 29 December 2023 diff hist 0 Biljana Stamenic
- 15:55, 29 December 2023 diff hist 0 Biljana Stamenic
- 15:55, 29 December 2023 diff hist -35 Biljana Stamenic →Tools
- 15:55, 29 December 2023 diff hist -1 Biljana Stamenic →Tools
- 15:54, 29 December 2023 diff hist +68 Biljana Stamenic
- 15:53, 29 December 2023 diff hist +8 Biljana Stamenic
- 15:52, 29 December 2023 diff hist +8 Biljana Stamenic →About Tag: Visual edit
- 15:46, 29 December 2023 diff hist -2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:46, 29 December 2023 diff hist +5 Stepper 1 (GCA 6300) →Operating Procedures
- 15:45, 29 December 2023 diff hist -16 Stepper 1 (GCA 6300) →Operating Procedures
- 15:44, 29 December 2023 diff hist +8 Stepper 1 (GCA 6300) →Operating Procedures
- 15:44, 29 December 2023 diff hist +2 Stepper 1 (GCA 6300) →Operating Procedures
- 15:42, 29 December 2023 diff hist -141 Stepper 1 (GCA 6300) →Operating Procedures
- 15:38, 29 December 2023 diff hist +92 Stepper 1 (GCA 6300) →Operating Procedures
- 15:37, 29 December 2023 diff hist 0 N File:GCA 6300 - Commands.pdf current
- 12:57, 29 December 2023 diff hist +25 Stepper 1 (GCA 6300) →Operating Procedures
- 12:57, 29 December 2023 diff hist +30 Stepper 1 (GCA 6300) →Operating Procedures
- 12:55, 29 December 2023 diff hist -23 Stepper 1 (GCA 6300) →Operating Procedures
- 12:55, 29 December 2023 diff hist -26 Stepper 1 (GCA 6300) →Operating Procedures
- 12:54, 29 December 2023 diff hist +8 Stepper 1 (GCA 6300) →Operating Procedures
- 12:53, 29 December 2023 diff hist -13 Stepper 1 (GCA 6300) →Operating Procedures
- 12:52, 29 December 2023 diff hist +114 Stepper 1 (GCA 6300) →Operating Procedures
- 12:49, 29 December 2023 diff hist +3 Stepper 1 (GCA 6300) →Operating Procedures
- 12:47, 29 December 2023 diff hist +103 Stepper 1 (GCA 6300) →Operating Procedures
- 12:43, 29 December 2023 diff hist +109 Stepper 1 (GCA 6300) →Operating Procedures
- 12:41, 29 December 2023 diff hist +102 Stepper 1 (GCA 6300) →Operating Procedures
- 12:38, 29 December 2023 diff hist -106 Stepper 1 (GCA 6300) →Operating Procedures
- 12:38, 29 December 2023 diff hist +111 Stepper 1 (GCA 6300) →Operating Procedures
- 12:36, 29 December 2023 diff hist +1 Stepper 1 (GCA 6300) →Operating Procedures
- 12:34, 29 December 2023 diff hist +89 Stepper 1 (GCA 6300) →Operating Procedures
- 12:29, 29 December 2023 diff hist 0 N File:GCA6300 Optimizing the process 6.pdf current
- 12:29, 29 December 2023 diff hist 0 N File:GCA 6300 Shutdown and Start up.pdf current
- 12:29, 29 December 2023 diff hist 0 N File:GCA 6300 Reboot frozen keyboard.pdf current
- 12:29, 29 December 2023 diff hist 0 N File:GCA 6300 Programming a Job 7.pdf current
- 12:28, 29 December 2023 diff hist 0 N File:GCA 6300 General Information about system 4.pdf current
- 12:28, 29 December 2023 diff hist 0 N File:GCA 6300 Running a JOB 3.pdf current
- 11:54, 29 December 2023 diff hist 0 N File:GCA 6300 Programming a Job 7.docx current
- 17:19, 21 December 2023 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:18, 21 December 2023 diff hist +6 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:17, 21 December 2023 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:16, 21 December 2023 diff hist +30 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 17:14, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 Small substrates.pdf current
- 17:14, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 2 and 3inch wafers.pdf current
- 17:13, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 4inch wafers.pdf current
- 17:12, 21 December 2023 diff hist +409 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 16:03, 21 December 2023 diff hist +109 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 16:01, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 6inch wafers.pdf current
- 15:59, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 8inch wafers.pdf current
- 15:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 15:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 15:52, 21 December 2023 diff hist -33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:48, 21 December 2023 diff hist +33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:47, 21 December 2023 diff hist -115 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:47, 21 December 2023 diff hist -80 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit: Switched
- 15:45, 21 December 2023 diff hist +98 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit
- 15:43, 21 December 2023 diff hist +97 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:41, 21 December 2023 diff hist -119 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:41, 21 December 2023 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:39, 21 December 2023 diff hist +111 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:36, 21 December 2023 diff hist -138 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:35, 21 December 2023 diff hist +13 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:31, 21 December 2023 diff hist +100 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 15:29, 21 December 2023 diff hist +22 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit: Switched
- 15:28, 21 December 2023 diff hist +18 Surface Analysis (KLA/Tencor Surfscan) →About Tag: Visual edit
- 15:27, 21 December 2023 diff hist -1 Surface Analysis (KLA/Tencor Surfscan) →Documentation
- 10:28, 20 December 2023 diff hist +1 PECVD Recipes current Tag: Visual edit: Switched
- 11:12, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:11, 15 December 2023 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:11, 15 December 2023 diff hist -6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:03, 15 December 2023 diff hist +6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:03, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:02, 15 December 2023 diff hist -4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:02, 15 December 2023 diff hist -4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:01, 15 December 2023 diff hist +5 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 11:00, 15 December 2023 diff hist +222 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 10:57, 15 December 2023 diff hist +1 PECVD Recipes →=SiN deposition (PECVD #2)
- 10:55, 15 December 2023 diff hist +195 PECVD Recipes →SiN deposition (PECVD #2)
- 10:53, 15 December 2023 diff hist +4 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:52, 15 December 2023 diff hist +130 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:38, 15 December 2023 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 10:36, 15 December 2023 diff hist +49 PECVD Recipes →SiO2 deposition (PECVD #2): New recipe from Nov. 2023 Tag: Visual edit
- 13:39, 13 September 2023 diff hist +627 Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses Added info for a new shim current Tag: Visual edit
- 13:17, 13 September 2023 diff hist +39 Stepper 2 (Autostep 200) - Chuck Selection Adding a new chuck current Tag: Visual edit
- 16:49, 18 January 2023 diff hist +226 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 16:48, 18 January 2023 diff hist +208 PECVD Recipes →Si3N4 [ICP-PECVD]
- 16:47, 18 January 2023 diff hist +219 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
- 16:46, 18 January 2023 diff hist +8 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
- 16:45, 18 January 2023 diff hist +212 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
- 17:30, 13 June 2022 diff hist -159 PECVD Recipes →SiO2 deposition (PECVD #1)
- 17:29, 13 June 2022 diff hist +159 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:32, 13 June 2022 diff hist -2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:31, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:30, 13 June 2022 diff hist -156 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:28, 13 June 2022 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:27, 13 June 2022 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:26, 13 June 2022 diff hist +156 PECVD Recipes →SiO2 deposition (PECVD #1)
- 12:16, 9 September 2021 diff hist -293 E-Beam Evaporation Recipes Updated tooling factor for Al in E-beam#4. Tag: Visual edit
- 09:47, 7 May 2021 diff hist -42 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. current Tag: Visual edit
- 09:46, 7 May 2021 diff hist -7 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up. Tag: Visual edit
- 09:46, 7 May 2021 diff hist +151 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: reboot Tag: Visual edit
- 09:44, 7 May 2021 diff hist +1,766 GCA 6300 Reboot Procedures reboot and shutdwon-start up current Tag: Visual edit
- 09:40, 7 May 2021 diff hist -1,956 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: rebooring Tag: Visual edit
- 10:13, 5 May 2021 diff hist +1,447 Troubleshooting and Recovery troublwshooting Tag: Visual edit
- 10:01, 5 May 2021 diff hist +77 GCA 6300 USer Accessible Commands →List of commands: mapping command added current Tag: Visual edit
- 15:47, 19 February 2021 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 15:45, 19 February 2021 diff hist +160 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:44, 19 February 2021 diff hist +136 PECVD Recipes →Uniformity Data
- 15:42, 19 February 2021 diff hist +142 PECVD Recipes →Uniformity Data
- 15:37, 19 February 2021 diff hist +139 PECVD Recipes →Uniformity Data
- 15:33, 19 February 2021 diff hist +176 PECVD Recipes →SiO2 deposition (PECVD #1)
- 15:30, 19 February 2021 diff hist +139 PECVD Recipes →Historical Particulate Data
- 15:29, 19 February 2021 diff hist +152 PECVD Recipes →Uniformity Data
- 15:28, 19 February 2021 diff hist +140 PECVD Recipes →Uniformity Data
- 22:31, 16 February 2021 diff hist +136 PECVD Recipes →Thin-Film Properties
- 22:30, 16 February 2021 diff hist +124 PECVD Recipes →Thin-Film Properties
- 22:29, 16 February 2021 diff hist +119 PECVD Recipes →Thin-Film Properties
- 22:28, 16 February 2021 diff hist +126 PECVD Recipes →Thin-Film Properties
- 22:27, 16 February 2021 diff hist +123 PECVD Recipes →Thin-Film Properties
- 22:25, 16 February 2021 diff hist 0 PECVD Recipes →Thin-Film Properties
- 22:24, 16 February 2021 diff hist -2 PECVD Recipes →Thin-Film Properties
- 14:43, 13 November 2020 diff hist +3,288 N MLA Recipes MLa recipes- Bilja trying to link R to recipes Tag: Visual edit
- 14:21, 13 November 2020 diff hist +270 Lithography Recipes →Photolithography Recipes
- 14:16, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
- 14:15, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
- 16:29, 3 November 2020 diff hist -120 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 16:28, 3 November 2020 diff hist -127 PECVD Recipes →SiN deposition (PECVD #2)
- 16:28, 3 November 2020 diff hist -112 PECVD Recipes →SiO2 deposition (PECVD #2)
- 12:32, 16 October 2020 diff hist +150 Stepper Recipes
- 21:28, 13 October 2020 diff hist -2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 21:28, 13 October 2020 diff hist +118 PECVD Recipes →SiN deposition (PECVD #1)
- 09:38, 13 October 2020 diff hist -228 PECVD Recipes
- 09:14, 13 October 2020 diff hist -1 PECVD Recipes →Historical Particulate Data
- 09:13, 13 October 2020 diff hist +1 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 09:13, 13 October 2020 diff hist -109 PECVD Recipes →SiN deposition (PECVD #1)
- 16:38, 9 October 2020 diff hist -10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:37, 9 October 2020 diff hist +64 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:16, 9 October 2020 diff hist +45 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:14, 9 October 2020 diff hist +10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:12, 9 October 2020 diff hist +7 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:42, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:34, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:33, 9 October 2020 diff hist +22 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 15:01, 9 October 2020 diff hist -1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:58, 9 October 2020 diff hist +1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:56, 9 October 2020 diff hist +4 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:52, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:12, 9 October 2020 diff hist +19 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 11:41, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 11:39, 9 October 2020 diff hist -2 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150)
- 11:38, 9 October 2020 diff hist +55 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 20:53, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:52, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:49, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:47, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:46, 14 July 2020 diff hist -124 PECVD Recipes →SiN deposition (PECVD #2)
- 20:45, 14 July 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
- 20:43, 14 July 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
- 20:41, 14 July 2020 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #2)
- 20:40, 14 July 2020 diff hist +1 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 12:03, 2 July 2020 diff hist -8 Unaxis wafer coating procedure →a) Prepare wafers: Tag: Visual edit
- 12:02, 2 July 2020 diff hist -20 Unaxis wafer coating procedure →1. Unaxis deposition - 300nm of SiO2 LDR film @250°C Tag: Visual edit
- 12:01, 2 July 2020 diff hist +29 Unaxis wafer coating procedure Tag: Visual edit
- 12:01, 2 July 2020 diff hist +7 Unaxis wafer coating procedure Tag: Visual edit
- 12:00, 2 July 2020 diff hist +4,199 N Unaxis wafer coating procedure Created page with "'''1. Unaxis deposition - 300nm of SiO2 LDR film @250°C''' a) Prepare wafers: · Regular 4 " Si wafer ~500nm think for seasoning · Your substrate for d..." Tag: Visual edit
- 11:47, 2 July 2020 diff hist -58 ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 11:44, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:42, 2 July 2020 diff hist +68 N Wafer coating procedure Created page with "[https://wiki.nanotech.ucsb.edu/wiki/File:Unaxis_SOP_3-30-2020.docx]" current Tag: Visual edit
- 11:41, 2 July 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating procedure correction Tag: Visual edit
- 11:37, 2 July 2020 diff hist -76 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:36, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit