Difference between revisions of "Lithography Recipes"

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(Photolithography Recipes: added MLA150 to PhotoLith recipes table; table color formatting)
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
 
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
! colspan="9" height="45" |<div style="font-size: 150%;">Photolithography Recipes</div>
+
! colspan="10" height="45" |<div style="font-size: 150%;">Photolithography Recipes</div>
   
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
|<!-- INTENTIONALLY LEFT BLANK --><br>
+
|<!-- INTENTIONALLY BLANK --><br>
 
! colspan="2" bgcolor="#D0E7FF" align="center" |'''[[Contact Alignment Recipes|<big>Contact Aligner Recipes</big>]]'''
 
! colspan="2" bgcolor="#D0E7FF" align="center" |'''[[Contact Alignment Recipes|<big>Contact Aligner Recipes</big>]]'''
! colspan="3" bgcolor="#D0E7FF" align="center" |'''[[Stepper Recipes|<big>Steppers Recipes</big>]]'''
+
! colspan="3" bgcolor="#D0E7FF" align="center" |'''[[Stepper Recipes|<big>Stepper Recipes</big>]]'''
  +
! colspan="3" bgcolor="#D0E7FF" align="center" |Other
 
 
|-
 
|-
 
! width="150" bgcolor="#D0E7FF" align="center" |'''Positive Resists'''
 
! width="150" bgcolor="#D0E7FF" align="center" |'''Positive Resists'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
! width="150" bgcolor="#D0E7FF" align="center" |'''[[MLA150 Recipes|<big>MLA150</big>]]'''
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |AZ4110
 
| bgcolor="#D0E7FF" align="center" |AZ4110
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| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |AZ4210
 
| bgcolor="#D0E7FF" align="center" |AZ4210
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|A
 
|A
 
|<br>
 
|<br>
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |AZ4330RS
 
| bgcolor="#D0E7FF" align="center" |AZ4330RS
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| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
  +
|
 
  +
|-
  +
|AZ4620
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|A
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |OCG 825-35CS
 
| bgcolor="#D0E7FF" align="center" |OCG 825-35CS
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|A
 
|A
 
|<br>
 
|<br>
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |SPR 950-0.8
 
| bgcolor="#D0E7FF" align="center" |SPR 950-0.8
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| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |SPR 955 CM-0.9
 
| bgcolor="#D0E7FF" align="center" |SPR 955 CM-0.9
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|{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
|{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
|<br>
 
|<br>
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |SPR 955 CM-1.8
 
| bgcolor="#D0E7FF" align="center" |SPR 955 CM-1.8
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| bgcolor="EEFFFF" |{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| bgcolor="EEFFFF" |{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |SPR 220-3.0
 
| bgcolor="#D0E7FF" align="center" |SPR 220-3.0
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|{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
|{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
|<br>
 
|<br>
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |SPR 220-7.0
 
| bgcolor="#D0E7FF" align="center" |SPR 220-7.0
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| bgcolor="EEFFFF" |{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| bgcolor="EEFFFF" |{{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |THMR-IP3600 HP D
 
| bgcolor="#D0E7FF" align="center" |THMR-IP3600 HP D
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|A
 
|A
 
|<br>
 
|<br>
  +
|A
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |UV6-0.8
 
| bgcolor="#D0E7FF" align="center" |UV6-0.8
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |{{rl|Stepper Recipes|Positive Resist (ASML DUV)}}
 
| bgcolor="EEFFFF" |{{rl|Stepper Recipes|Positive Resist (ASML DUV)}}
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |UV210-0.3
 
| bgcolor="#D0E7FF" align="center" |UV210-0.3
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|
 
|
 
|{{rl|Stepper Recipes|Positive Resist (ASML DUV)}}
 
|{{rl|Stepper Recipes|Positive Resist (ASML DUV)}}
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|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |UV26-2.5
 
| bgcolor="#D0E7FF" align="center" |UV26-2.5
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |A
 
| bgcolor="EEFFFF" |A
  +
|
 
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" |'''Negative Resists'''
 
! bgcolor="#D0E7FF" align="center" |'''Negative Resists'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
|MLA150
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
 
| bgcolor="#D0E7FF" align="center" |AZ5214-EIR
 
| bgcolor="#D0E7FF" align="center" |AZ5214-EIR
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|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
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|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 2020
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 2020
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|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
  +
|
 
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 2035
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 2035
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|A
 
|A
 
|
 
|
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 2070
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 2070
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|A
 
|A
 
|
 
|
  +
|
 
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 5510
 
| bgcolor="#D0E7FF" align="center" |AZnLOF 5510
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|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
  +
|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |UVN30-0.8
 
| bgcolor="#D0E7FF" align="center" |UVN30-0.8
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|
 
|
 
|{{rl|Stepper Recipes|Negative Resist (ASML DUV)}}
 
|{{rl|Stepper Recipes|Negative Resist (ASML DUV)}}
  +
|
 
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
 
| bgcolor="#D0E7FF" align="center" |SU-8 2005,2010, 2015
 
| bgcolor="#D0E7FF" align="center" |SU-8 2005,2010, 2015
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|A
 
|A
 
|
 
|
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|
 
 
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| bgcolor="#D0E7FF" align="center" |SU-8 2075
 
| bgcolor="#D0E7FF" align="center" |SU-8 2075
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|A
 
|A
 
|
 
|
  +
|
 
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
 
| bgcolor="#D0E7FF" align="center" |NR9-1000,3000,6000PY
 
| bgcolor="#D0E7FF" align="center" |NR9-1000,3000,6000PY
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|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|{{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
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|
 
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | '''Anti-Reflection Coatings'''
 
! bgcolor="#D0E7FF" align="center" | '''Anti-Reflection Coatings'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
|MLA150
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
 
| bgcolor="#D0E7FF" align="center" |DUV42-P
 
| bgcolor="#D0E7FF" align="center" |DUV42-P
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|{{rl|Stepper Recipes|DUV-42P}}
 
|{{rl|Stepper Recipes|DUV-42P}}
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|
 
 
|-
 
|-
 
| bgcolor="#D0E7FF" align="center" |DS-K101-304
 
| bgcolor="#D0E7FF" align="center" |DS-K101-304
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|
 
|{{rl|Stepper Recipes|DS-K101-304}}
 
|{{rl|Stepper Recipes|DS-K101-304}}
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|
 
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" |
 
! bgcolor="#D0E7FF" align="center" |
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
|MLA150
 
|}
 
|}
 
<!-- end Litho Recipes table -->
 
<!-- end Litho Recipes table -->

Revision as of 22:38, 13 September 2020

General Information

This page contains information and links to recipes/datasheets spin-coated materials used in the facility.

Table of Contents
  • Underlayers
    • These are used beneath resists for both adhesive purposes and to enable bi-layer lift-off profiles for use with photoresist.
    • Datasheets are provided.
  • Lift-Off Techniques
    • Verified Recipes for lift-off using various photolith. tools
    • General educational description of this technique and it's limitations/considerations.
  • Holography
    • For 1-D and 2-D gratings with 220nm nominal period, available on substrates up to 1 inch square.
    • Recipes for silicon substrates are provided, and have been translated to other substrates by users.
  • Anti-Reflection Coatings:
    • The Photoresist Recipes section contains recipes using these materials.
    • Bottom Anti-Reflection Coatings (BARC) are used in the stepper systems, underneath the resists to eliminate substrate reflections that can affect resolution and repeatability for small, near resolution limited, feature sizes.
    • Datasheets are provided for reference on use of the materials.
  • Contrast Enhancement Materials (CEM)
    • The Photoresist Recipes section contains recipes using these materials.
    • Used for resolution enhancement. Not for use in contact aligners, typically used on I-Line Steppers.
    • Datasheets provided with usage info.
  • Adhesion Promoters
    • These are used to improve wetting of photoresists to your substrate.
    • Datasheets are provided on use of these materials.

Photolithography Recipes

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Photolithography Recipes

Contact Aligner Recipes Stepper Recipes Other
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
MLA150
AZ4110 R R A A
AZ4210 R R A A
AZ4330RS R R A A
AZ4620 A
OCG 825-35CS A A A A
SPR 950-0.8 A A A A
SPR 955 CM-0.9 A R R R
SPR 955 CM-1.8 A A R R
SPR 220-3.0 R R R R
SPR 220-7.0 R R R R
THMR-IP3600 HP D

A A
A
UV6-0.8 R
UV210-0.3 R
UV26-2.5 A
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
MLA150
AZ5214-EIR R R R R
AZnLOF 2020 R R R R
AZnLOF 2035 A A A A
AZnLOF 2070 A A A A
AZnLOF 5510 A A R R
UVN30-0.8 R
SU-8 2005,2010, 2015 A R A A
SU-8 2075 A A A A
NR9-1000,3000,6000PY R R A R
Anti-Reflection Coatings SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
MLA150
DUV42-P R
DS-K101-304 R
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)
MLA150

E-Beam Lithography Recipes (JEOL JBX-6300FS)

  • Under Development.

FIB Lithography Recipes (Raith Velion)

To Be Added

Automated Coat/Develop System Recipes (S-Cubed Flexi)

Recipes pre-loaded on the S-Cubed Flexi automated coat/bake/develop system. Only staff may write new recipes, contact the tool supervisor for more info.

To Be Added

Nanoimprinting Recipes

Holography Recipes

Low-K Spin-On Dielectric Recipes

Lift-Off Techniques

Chemicals Stocked + Datasheets

The following is a list of the lithography chemicals we stock in the lab, with links to the datasheets for each. The datasheets will often have important processing info such as spin-speed vs. thickness curves, typical process parameters, bake temps/times etc.

Positive Photoresists

i-line and broadband

DUV-248nm

Negative Photoresists

i-line and broadband

DUV-248nm

Underlayers
E-beam resists
Nanoimprinting
Contrast Enhancement Materials
Anti-Reflection Coatings
Adhesion Promoters
Spin-On Dielectrics

Low-K Spin-On Dielectrics such as Benzocyclobutane and Spin-on Glass

Developers
Photoresist Removers