Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 331: Line 331:
 
|  
 
|  
 
|  
 
|  
| {{rl|ICP Etching Recipes|GaAs Etch (Unaxis VLR)}}
+
|{{rl|ICP Etching Recipes|GaAs Etch (Unaxis VLR)}}
 
|  
 
|  
 
|  
 
|  
Line 346: Line 346:
 
|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}  
 
|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}  
 
|  
 
|  
|  
+
|{{rl|ICP Etching Recipes|AlGaAs Etch (Unaxis VLR)}}
 
|  
 
|  
 
|  
 
|  

Revision as of 13:50, 2 October 2013