Difference between revisions of "Dry Etching Recipes"

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| bgcolor="#DAF1FF" | [[Plasma Activation (EVG 810)|Plasma Activation<br>(EVG 810)]]
 
| bgcolor="#DAF1FF" | [[Plasma Activation (EVG 810)|Plasma Activation<br>(EVG 810)]]
 
| bgcolor="#DAF1FF" | [[XeF2 Etch (Xetch)|XeF2 Etch<br>(Xetch)]]
 
| bgcolor="#DAF1FF" | [[XeF2 Etch (Xetch)|XeF2 Etch<br>(Xetch)]]
  +
| bgcolor="#DAF1FF" | [[Vapor HF Etch (uETCH)|Vapor HF Etch<br>(uETCH)]]
 
|}
 
|}

Revision as of 16:48, 28 January 2014