Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 104: Line 104:
 
|
 
|
 
|
 
|
  +
|
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ru
 
! bgcolor="#D0E7FF" align="center" | Ru
Line 119: Line 120:
 
|
 
|
 
|
 
|
  +
|
 
|-bgcolor ="#EEFFFF"
 
|-bgcolor ="#EEFFFF"
 
! bgcolor="#D0E7FF" align="center" | Mo
 
! bgcolor="#D0E7FF" align="center" | Mo
Line 134: Line 136:
 
|
 
|
 
|
 
|
  +
|
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ta
 
! bgcolor="#D0E7FF" align="center" | Ta
Line 149: Line 152:
 
|
 
|
 
|
 
|
  +
|
 
|-bgcolor ="#EEFFFF"
 
|-bgcolor ="#EEFFFF"
 
! bgcolor="#D0E7FF" align="center" | W-TiW
 
! bgcolor="#D0E7FF" align="center" | W-TiW
Line 164: Line 168:
 
|
 
|
 
|
 
|
  +
|
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
 
! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
Line 179: Line 184:
 
|
 
|
 
|
 
|
  +
|
 
|-bgcolor ="#EEFFFF"
 
|-bgcolor ="#EEFFFF"
 
! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub>
 
! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub>

Revision as of 16:37, 28 January 2014