Difference between revisions of "Dry Etching Recipes"

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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
 
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
 
|- bgcolor="#d0e7ff"
 
|- bgcolor="#d0e7ff"
! colspan="18" width="725" height="45" |<div style="font-size: 150%;">Dry Etching Recipes</div>
+
! colspan="17" width="725" height="45" |<div style="font-size: 150%;">Dry Etching Recipes</div>
 
|- bgcolor="#d0e7ff"
 
|- bgcolor="#d0e7ff"
 
|<!-- INTENTIONALLY LEFT BLANK -->
 
|<!-- INTENTIONALLY LEFT BLANK -->
! colspan="4" width="300" height="35" align="center" bgcolor="#d0e7ff" |'''[[RIE Etching Recipes|RIE Etching]]'''
+
! colspan="3" |'''[[RIE Etching Recipes|RIE Etching]]'''
 
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]'''
 
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]'''
! colspan="5" align="center" bgcolor="#d0e7ff" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]'''
+
! colspan="5" bgcolor="#d0e7ff" align="center" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]'''
! colspan="3" align="center" bgcolor="#d0e7ff" |'''[[Other Dry Etching Recipes|Other Dry Etchers]]'''
+
! colspan="3" bgcolor="#d0e7ff" align="center" |'''[[Other Dry Etching Recipes|Other Dry Etchers]]'''
 
|-
 
|-
! width="65" align="center" bgcolor="#d0e7ff" |'''Material'''
+
! width="65" bgcolor="#d0e7ff" align="center" |'''Material'''
| width="65" bgcolor="#daf1ff" |[[RIE 1 (Custom)|RIE 1<br>(Retired)]]
 
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]
 
| width="100" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_5_.28PlasmaTherm.29|RIE 5<br>(PlasmaTherm)]]
 
| width="100" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_5_.28PlasmaTherm.29|RIE 5<br>(PlasmaTherm)]]
 
| width="100" bgcolor="#daf1ff" |[[ICP_Etching_Recipes#DSEIII_.28PlasmaTherm.2FDeep_Silicon_Etcher.29|DSEIII<br>(PlasmaTherm)]]
 
| width="100" bgcolor="#daf1ff" |[[ICP_Etching_Recipes#DSEIII_.28PlasmaTherm.2FDeep_Silicon_Etcher.29|DSEIII<br>(PlasmaTherm)]]
| width="100" bgcolor="#daf1ff" |[https://www.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#PlasmaTherm.2FSLR_Fluorine_Etcher SLR Fluorine ICP (PlasmaTherm)]
+
| width="100" bgcolor="#daf1ff" |[https://wiki.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#PlasmaTherm.2FSLR_Fluorine_Etcher SLR Fluorine ICP (PlasmaTherm)]
 
| width="120" bgcolor="#daf1ff" |[[ICP_Etching_Recipes#ICP_Etch_1_.28Panasonic_E626I.29|ICP Etch 1<br>(Panasonic 1)]]
 
| width="120" bgcolor="#daf1ff" |[[ICP_Etching_Recipes#ICP_Etch_1_.28Panasonic_E626I.29|ICP Etch 1<br>(Panasonic 1)]]
 
| width="120" bgcolor="#daf1ff" |[[ICP_Etching_Recipes#ICP_Etch_2_.28Panasonic_E640.29|ICP Etch 2<br>(Panasonic 2)]]
 
| width="120" bgcolor="#daf1ff" |[[ICP_Etching_Recipes#ICP_Etch_2_.28Panasonic_E640.29|ICP Etch 2<br>(Panasonic 2)]]
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| width="85" bgcolor="#daf1ff" |[[Other_Dry_Etching_Recipes#CAIBE_.28Oxford_Ion_Mill.29|CAIBE<br>(Oxford)]]
 
| width="85" bgcolor="#daf1ff" |[[Other_Dry_Etching_Recipes#CAIBE_.28Oxford_Ion_Mill.29|CAIBE<br>(Oxford)]]
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Ag
+
! bgcolor="#d0e7ff" align="center" |Ag
|
 
 
|
 
|
 
|
 
|
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Al
+
! bgcolor="#d0e7ff" align="center" |Al
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Au
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! bgcolor="#d0e7ff" align="center" |Au
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
  +
|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}}
|
 
|[https://www.nanotech.ucsb.edu/wiki/index.php/Other_Dry_Etching_Recipes#CAIBE_.28Oxford_Ion_Mill.29 A]
 
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Cr
+
! bgcolor="#d0e7ff" align="center" |Cr
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Cu
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! bgcolor="#d0e7ff" align="center" |Cu
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Ge
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! bgcolor="#d0e7ff" align="center" |Ge
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Mo
+
! bgcolor="#d0e7ff" align="center" |Mo
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Ni
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! bgcolor="#d0e7ff" align="center" |Ni
|
 
 
|
 
|
 
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|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}}
 
|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}}
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Pt
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! bgcolor="#d0e7ff" align="center" |Pt
|
 
 
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|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}}
 
|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}}
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Ru
+
! bgcolor="#d0e7ff" align="center" |Ru
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Si
+
! bgcolor="#d0e7ff" align="center" |Si
|
 
 
|
 
|
 
|
 
|
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Ta
+
! bgcolor="#d0e7ff" align="center" |Ta
|
 
 
|
 
|
 
|
 
|
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Ti
+
! bgcolor="#d0e7ff" align="center" |Ti
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3</sub>
+
! bgcolor="#d0e7ff" align="center" |Al<sub>2</sub>O<sub>3</sub>
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
  +
|[https://wiki.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#Al2O3_Etching_.28Panasonic_2.29 R]
|
 
|[https://www.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#Al2O3_Etching_.28Panasonic_2.29 R]
 
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3 (Sapphire)</sub>
+
! bgcolor="#d0e7ff" align="center" |Al<sub>2</sub>O<sub>3 (Sapphire)</sub>
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |AlGaAs
+
! bgcolor="#d0e7ff" align="center" |AlGaAs
|
 
 
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|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |AlGaN
+
! bgcolor="#d0e7ff" align="center" |AlGaN
|
 
 
|
 
|
 
|
 
|
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |AlN
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! bgcolor="#d0e7ff" align="center" |AlN
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |CdZnTe
+
! bgcolor="#d0e7ff" align="center" |CdZnTe
|
 
 
|{{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}}
 
|
 
|
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |GaAs
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! bgcolor="#d0e7ff" align="center" |GaAs
|
 
 
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|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |GaN
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! bgcolor="#d0e7ff" align="center" |GaN
|
 
 
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|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |GaSb
+
! bgcolor="#d0e7ff" align="center" |GaSb
|
 
 
|
 
|
 
|
 
|
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |HfO<sub>2</sub>
+
! bgcolor="#d0e7ff" align="center" |HfO<sub>2</sub>
|
 
 
|
 
|
 
|
 
|
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |InGaAlAs
+
! bgcolor="#d0e7ff" align="center" |InGaAlAs
|
 
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|
 
|
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |InGaAsP
+
! bgcolor="#d0e7ff" align="center" |InGaAsP
|
 
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|
 
|
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |InP
+
! bgcolor="#d0e7ff" align="center" |InP
|
 
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|
 
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|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}}
|A
 
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |ITO
+
! bgcolor="#d0e7ff" align="center" |ITO
|
 
 
|{{rl|RIE Etching Recipes|ITO Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|ITO Etch (RIE 2)}}
 
|
 
|
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!Photoresist
 
!Photoresist
 
& ARC
 
& ARC
|
 
 
|
 
|
 
|A
 
|A
|[https://www.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#Photoresist_and_ARC R]
+
|[https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#Photoresist_and_ARC R]
 
|
 
|
 
|
 
|
|[https://www.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#Photoresist_and_ARC_Etching R]
+
|[https://wiki.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#Photoresist_and_ARC_Etching R]
|[https://www.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#Photoresist_and_ARC_etching_2 R]
+
|[https://wiki.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#Photoresist_and_ARC_etching_2 R]
 
|
 
|
 
|A
 
|A
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |SiC
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! bgcolor="#d0e7ff" align="center" |SiC
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |SiN
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! bgcolor="#d0e7ff" align="center" |SiN
|
 
 
|
 
|
 
|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
 
|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |SiO<sub>2</sub>
+
! bgcolor="#d0e7ff" align="center" |SiO<sub>2</sub>
|
 
 
|
 
|
 
|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
 
|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
 
|
 
|
 
|
 
|
  +
|{{rl|ICP Etching Recipes|SiO2 Etching (Fluorine ICP Etcher)}}
|A
 
 
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 1)}}
 
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 1)}}
 
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 2)}}
 
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 2)}}
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |SiOxNy
+
! bgcolor="#d0e7ff" align="center" |SiOxNy
|
 
 
|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |Ta<sub>2</sub>O<sub>5</sub>
+
! bgcolor="#d0e7ff" align="center" |Ta<sub>2</sub>O<sub>5</sub>
|
 
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |TiN
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! bgcolor="#d0e7ff" align="center" |TiN
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |TiO<sub>2</sub>
+
! bgcolor="#d0e7ff" align="center" |TiO<sub>2</sub>
|
 
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |W-TiW
+
! bgcolor="#d0e7ff" align="center" |W-TiW
|
 
 
|
 
|
 
|
 
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|A
 
|A
 
|- bgcolor="#eeffff"
 
|- bgcolor="#eeffff"
! align="center" bgcolor="#d0e7ff" |ZnO<sub>2</sub>
+
! bgcolor="#d0e7ff" align="center" |ZnO<sub>2</sub>
|
 
 
|
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |ZnS
+
! bgcolor="#d0e7ff" align="center" |ZnS
|
 
 
|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
|
 
|
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |ZnSe
+
! bgcolor="#d0e7ff" align="center" |ZnSe
|
 
 
|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
|
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |ZrO<sub>2</sub>
+
! bgcolor="#d0e7ff" align="center" |ZrO<sub>2</sub>
|
 
 
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|A
 
|A
 
|-
 
|-
! align="center" bgcolor="#d0e7ff" |'''Material'''
+
! bgcolor="#d0e7ff" align="center" |'''Material'''
| bgcolor="#daf1ff" |[[RIE 1 (Custom)|RIE 1<br>(Retired)]]
 
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]

Latest revision as of 16:32, 4 February 2021

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Dry Etching Recipes
RIE Etching ICP Etching Oxygen Plasma Systems Other Dry Etchers
Material RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
DSEIII
(PlasmaTherm)
SLR Fluorine ICP (PlasmaTherm) ICP Etch 1
(Panasonic 1)
ICP Etch 2
(Panasonic 2)
ICP-Etch
(Unaxis VLR)
Ashers
(Technics PEII)
Plasma Clean
(Gasonics 2000)
Plasma Clean (YES EcoClean) UV Ozone Reactor Plasma Activation
(EVG 810)
XeF2 Etch
(Xetch)
Vapor HF Etch
(uETCH)
CAIBE
(Oxford)
Ag A
Al A R R A
Au R
Cr A R A A
Cu A
Ge A A
Mo A
Ni R
Pt R
Ru A R A
Si R R R A
Ta A
Ti R A A
Al2O3 R A
Al2O3 (Sapphire) R A A
AlGaAs R R R A
AlGaN R A
AlN R A
CdZnTe R A
GaAs R R R R A
GaN R R R A
GaSb A R A
HfO2 A
InGaAlAs R R A
InGaAsP R R A
InP R A A R R
ITO R A
Photoresist

& ARC

A R R R A A A A
SiC R A A
SiN R R R A A
SiO2 R R R R R A
SiOxNy A A A
Ta2O5 A A
TiN A
TiO2 A
W-TiW R A A
ZnO2 A
ZnS R A
ZnSe R A
ZrO2 A
Material RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
DSEIII
(PlasmaTherm)
SLR Fluorine ICP (PlasmaTherm) ICP Etch 1
(Panasonic E626I)
ICP Etch 2
(Panasonic E640)
ICP-Etch
(Unaxis VLR)
Ashers
(Technics PEII)
Plasma Clean
(Gasonics 2000)
Plasma Clean (YES EcoClean) UV Ozone Reactor Plasma Activation
(EVG 810)
XeF2 Etch
(Xetch)
Vapor HF Etch
(uETCH)
CAIBE
(Oxford)