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• IBD: Calibrating Optical Thickness
  ...step in the IBD recipe, which will also change all "SiO2_dep" steps in the recipe. ...her film, in this case do an "TaO-FP", and apply the new TaO/4 time to the recipe.
  5 KB (758 words) - 10:19, 9 March 2024
• Sputter 4 (AJA ATC 2200-V)
  ...te biasing and pre-cleaning. Samples can be heated to 800°C. The system is recipe driven and computer controlled for reproducible results. *Automatic wafer loading and recipe driven process control.
  3 KB (507 words) - 10:37, 30 August 2022
• YES Recipe Screenshots: STD-N2-O2
  |[[File:STD-N2-O2-180C-3KW-1min - steps.jpg|alt=screenshot of recipe STD-N2-O2-180C-3KW-1min - steps|none|thumb|STD-N2-O2-180C-3KW-1min - steps]
  725 bytes (147 words) - 12:08, 30 November 2023
• Filmetrics F50 - Operating Procedure
  ...recipe into a different name when the edit is done by clicking the '''Save Recipe as Different Filename''' icon at the top-left corner). ...ition as the origin for the map. This position is not saved as part of the recipe; B) '''Absolute-'''set a specific (x, y) location as the origin of the map.
  10 KB (1,570 words) - 13:43, 26 April 2019
• Vapor HF Etch
  ...r_Dry_Etching_Recipes#Vapor_HF_Etch_.28uETCH.29 Vapor HF Recipes] page for recipe specific to this tool.
  1 KB (240 words) - 10:53, 30 August 2022
• Sputtering Recipes
  .../wiki/images/1/15/Fe_and_Co_Films_using_Sputter-3.pdf Fe and Co Deposition Recipe] ...notech.ucsb.edu/wiki/images/5/5e/Cu_Film_using_Sputter-3.pdf Cu Deposition Recipe]
  16 KB (2,290 words) - 21:36, 21 September 2023
• Filmetrics F40-UV Quick Start
  ...ipe from the Dropdown list (ok to ''discard changes''), and Click '''[Edit Recipe…]''' to set the layers to approximately what you expect to measure. ...r too smooth, then your guess of thickness was not close enough - '''[Edit Recipe]''' & '''[Analyze]''' again until you get a good fit.
  4 KB (613 words) - 11:13, 31 May 2019
• Rapid Thermal Processor (SSI Solaris 150)
  |recipe = Thermal Processing
  2 KB (248 words) - 08:36, 8 December 2023
• PECVD 2 (Advanced Vacuum)
  **The Low-Stress Si3N4 film recipe are tested approx. monthly, and kept within ±100MPa. Data can be found at
  2 KB (284 words) - 10:30, 30 August 2022
• Wafer scanning process traveler
  ...BTEST1 (for scanning 8” wafers) and UCSBTEST2 (for scanning 4"wafers). The recipe UCSBTEST2 is used as a template to create other two standard recipes: "UCSB #**Recipe "UCSBTEST2" is used as a template to create recipes UCSB Gain2 and UCSB Gai
  33 KB (5,424 words) - 17:05, 4 January 2024
• InP Etch Rate and Selectivity (InP/SiO2)
  ...plasma chamber clean for 15 minutes, then, chamber coating with the same recipe and a quarter dummy InP on carrier for 15 minutes.
  4 KB (459 words) - 18:00, 8 November 2021
• Surface Analysis (KLA/Tencor Surfscan)
  ...8 inches. Piece-parts are more difficult but can be scanned with a custom recipe.
  3 KB (357 words) - 18:02, 2 February 2024
• Dry Etching Recipes
  ...ll>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small>
  14 KB (1,875 words) - 15:31, 7 February 2024
• Glossary
  ...ies events larger than the maximum particle size for a scan (as set by the recipe’s Area From parameter). Defect maps display areas as a series of chords. A recipe parameter that sets the maximum size for LPDs during data collection. Defec
  12 KB (2,034 words) - 09:25, 15 April 2020
• Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement
  |Normal "Cauchy on Silicon" recipe
  2 KB (343 words) - 15:39, 12 February 2024
• E-Beam 3 (Temescal)
  ...visit the [[E-Beam_Evaporation_Recipes#Materials_Table_(E-Beam #3)|E-Beam Recipe Page]].
  2 KB (302 words) - 16:30, 22 May 2024
• E-Beam 4 (CHA)
  ...visit the [[E-Beam_Evaporation_Recipes#Materials_Table_(E-Beam #4)|E-Beam Recipe Page]].
  2 KB (290 words) - 12:04, 11 April 2023
• Vacuum Deposition Recipes
  ...ll>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small>
  24 KB (3,097 words) - 15:44, 7 July 2022
• DUMMY TOOL
  |recipe =
  2 KB (311 words) - 01:11, 19 October 2022
• ICP Etching Recipes
  ...tch_Bosch_DSEIII.pdf Bosch Process Recipe and Characterization] - Standard recipe on the tool. **Recipe Name: "'''''Plasma-Therm Standard DSE'''''" (''Production'' - copy to your
  28 KB (4,356 words) - 12:49, 7 May 2024

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