Difference between revisions of "Vacuum Deposition Recipes"
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| {{rl|PECVD Recipes|SiO2 deposition (ALD)}} |
| {{rl|PECVD Recipes|SiO2 deposition (ALD)}} |
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| {{rl|PECVD Recipes|SiO2 deposition (IBD)}} |
| {{rl|PECVD Recipes|SiO2 deposition (IBD)}} |
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! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub> |
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub> |