Difference between revisions of "UV Ozone Reactor"
Jump to navigation
Jump to search
(link to Quick start from TBosch email, and user manual PDF) |
(heading change) |
||
| (3 intermediate revisions by 2 users not shown) | |||
| Line 2: | Line 2: | ||
|picture=Ozone.jpg |
|picture=Ozone.jpg |
||
|type = Dry Etch |
|type = Dry Etch |
||
| − | |super= |
+ | |super= Lee Sawyer |
| + | |model=M-144AX |
||
|location=Bay 5 |
|location=Bay 5 |
||
| − | |description = |
+ | |description = UV Ozone Reactor |
| − | |manufacturer = |
+ | |manufacturer = Jelight |
}} |
}} |
||
| − | = |
+ | ==About== |
| + | The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment. |
||
| + | ==Documentation== |
||
| − | == Operating Procedures == |
||
| + | |||
| − | [[UV Ozone Quick Start|Quick Start]] |
||
| − | [[ |
+ | *[[UV Ozone Quick Start|Quick Start]] |
| + | *[//www.nanotech.ucsb.edu/wiki/images/7/79/UV_Ozone_Manual_Jelight_M-144AX.pdf UV Ozone Manual] |
||
Revision as of 15:33, 11 September 2019
| ||||||||||||||||||||||
About
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.