Difference between revisions of "UV Ozone Reactor"

From UCSB Nanofab Wiki
Jump to: navigation, search
(add description and model)
(About)
Line 2: Line 2:
 
|picture=Ozone.jpg
 
|picture=Ozone.jpg
 
|type = Dry Etch
 
|type = Dry Etch
|super= Tony Bosch
+
|super= Lee Sawyer
 
|model=M-144AX
 
|model=M-144AX
 
|location=Bay 5
 
|location=Bay 5

Revision as of 09:46, 11 April 2019

UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Lee Sawyer
Supervisor Phone (805) 893-2123
Supervisor E-Mail lee_sawyer@ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Operating Procedures