Template:Announcements

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Revision as of 16:37, 10 May 2018 by Thibeault (talk | contribs) (deleted old messaged, updated PECVD2)
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UCSB NanoFab Announcements

JEOL SEM #2: Up

The transfer rod has been replaced. Please be sure to insert the rod slowly and carefully to ensure it doesn't get damaged again. If any resistance, rotate left and right while maintaining forward pressure and it will smoothly work through the o-rings. // John d 15:02, 30 April 2018 (PDT)

RIE#5 Up, SiCl4 now available

SiCl4 is available for use. We tried a new line heater on the SiCl4 and that seemed to do the trick. The system is still pumping slow but is getting better. // John d 15:00, 27 April 2018 (PDT)

PECVD#2: Open Soon

The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. Training will be announced soon. // Thibeault 16:37, 10 May 2018 (PDT)


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