Automated Coat/Develop System (S-Cubed Flexi)

From UCSB Nanofab Wiki
Revision as of 14:09, 8 October 2019 by John d (talk | contribs) (initial page)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to: navigation, search
Automated Coat/Develop System (S-Cubed Flexi)
Tool Type Lithography
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail
Description Automatic Coat/Bake/Develop
Manufacturer S-Cubed


To Be Added

Detailed Specifications

  • Wafer Size:
  • Photoresists/Underlayers Available:
  • Solvents Available:
  • Developers Available:

Process Information

  • TBD

Operating Procedures

  • TBD