Difference between revisions of "Wafer Coating Process Traveler"

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There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition, cleaning)
 
There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition, cleaning)
  
=== STD SiO2 ===
+
=== Standard Oxide Deposition ===
  
==== Standard oxide deposition ====
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==== STD SiO2 ====
 
#Log in to Advanced PECVD #2
 
#Log in to Advanced PECVD #2
 
#Seasoning
 
#Seasoning
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#*Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
 
#*Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
 
#*Pump down.
 
#*Pump down.
#*Load the deposition recipe (SiN@250C), and run it. Deposition time is variable. Get the rate from [https://wiki.nanotech.ucsb.edu/wiki/Vacuum_Deposition_Recipes historical data].
+
#*Load the deposition recipe (STD SiO2), and run it. Deposition time is variable. Get the rate from [https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes#PECVD_2_.28Advanced_Vacuum.29 historical data].
 
#*Unload the wafer.
 
#*Unload the wafer.
 
#Cleaning
 
#Cleaning
Line 16: Line 16:
 
#*Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
 
#*Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
 
#*Log out
 
#*Log out
=== STD Nitride2 ===
+
=== Standard Nitride Deposition ===
  
==== Standard nitride deposition ====
+
==== STD Nitride2 ====
 +
#Log in to Advanced PECVD #2
 +
#Seasoning
 +
#*Load the seasoning recipe (STD Nitride2), and run it. The goal of this step is to coat oxide on chamber walls and prepare it for deposition.
 +
#Deposition
 +
#*Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
 +
#*Pump down.
 +
#*Load the deposition recipe (STD Nitride2), and run it. Deposition time is variable. Get the rate from [https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes#PECVD_2_.28Advanced_Vacuum.29 historical data].
 +
#*Unload the wafer.
 +
#Cleaning
 +
#*Wipe sidewall first with DI water, followed by IPA.
 +
#*Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
 +
#*Log out
  
=== STD LS Nitride2 ===
+
=== Standard Low Stress Deposition  ===
 +
 
 +
==== STD LS Nitride2 ====
 +
#Log in to Advanced PECVD #2
 +
#Seasoning
 +
#*Load the seasoning recipe (STD LS Nitride2), and run it. The goal of this step is to coat oxide on chamber walls and prepare it for deposition.
 +
#Deposition
 +
#*Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
 +
#*Pump down.
 +
#*Load the deposition recipe (STD LS Nitride2), and run it. Deposition time is variable. Get the rate from [https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes#PECVD_2_.28Advanced_Vacuum.29 historical data].
 +
#*Unload the wafer.
 +
#Cleaning
 +
#*Wipe sidewall first with DI water, followed by IPA.
 +
#*Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
 +
#*Log out
  
==== Standard low stress nitride deposition ====
+
#

Latest revision as of 16:54, 22 April 2020

There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition, cleaning)

Standard Oxide Deposition

STD SiO2

  1. Log in to Advanced PECVD #2
  2. Seasoning
    • Load the seasoning recipe (STD SiO2), and run it. The goal of this step is to coat oxide on chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe (STD SiO2), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
    • Log out

Standard Nitride Deposition

STD Nitride2

  1. Log in to Advanced PECVD #2
  2. Seasoning
    • Load the seasoning recipe (STD Nitride2), and run it. The goal of this step is to coat oxide on chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe (STD Nitride2), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
    • Log out

Standard Low Stress Deposition

STD LS Nitride2

  1. Log in to Advanced PECVD #2
  2. Seasoning
    • Load the seasoning recipe (STD LS Nitride2), and run it. The goal of this step is to coat oxide on chamber walls and prepare it for deposition.
  3. Deposition
    • Vent the chamber and load the substrate (place it in the center of platen). You can place small pieces around the wafer to protect it from moving.
    • Pump down.
    • Load the deposition recipe (STD LS Nitride2), and run it. Deposition time is variable. Get the rate from historical data.
    • Unload the wafer.
  4. Cleaning
    • Wipe sidewall first with DI water, followed by IPA.
    • Load the cleaning recipe (CH4/O2 clean). Edit the recipe and enter required time for cleaning.
    • Log out