Difference between revisions of "Vacuum Deposition Recipes"
Jump to navigation
Jump to search
Line 9: | Line 9: | ||
! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]''' |
! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]''' |
||
! width="90" bgcolor="#D0E7FF" align="center" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]''' |
! width="90" bgcolor="#D0E7FF" align="center" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]''' |
||
− | ! width="100" bgcolor="#D0E7FF" align="center" | '''[[Ion |
+ | ! width="100" bgcolor="#D0E7FF" align="center" | '''[[Ion Beam Deposition Recipes|Ion Beam Deposition (IBD)]]''' |
! width="100" bgcolor="#D0E7FF" align="center" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]''' |
! width="100" bgcolor="#D0E7FF" align="center" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]''' |
||
|- |
|- |
||
− | ! width=" |
+ | ! width="20" bgcolor="#D0E7FF" align="center" | '''Material''' |
| width="65" bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]] |
| width="65" bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]] |
||
| width="65" bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]] |
| width="65" bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]] |
||
Line 27: | Line 27: | ||
| width="65" bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]] |
| width="65" bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]] |
||
| width="65" bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]] |
| width="65" bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]] |
||
− | | width="65" bgcolor="#DAF1FF" | |
+ | | width="65" bgcolor="#DAF1FF" | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]] |
− | | width="65" bgcolor="#DAF1FF" | |
+ | | width="65" bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam<br>Deposition (Tool)]] |
− | | width="65" bgcolor="#DAF1FF" | |
+ | | width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ag |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 50: | Line 50: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Al |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 69: | Line 69: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub> |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 88: | Line 88: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | AlN |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 107: | Line 107: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Au |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 126: | Line 126: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | B |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 145: | Line 145: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Co |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 164: | Line 164: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Cr |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 183: | Line 183: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Cu |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 202: | Line 202: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Fe |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 221: | Line 221: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ge |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 240: | Line 240: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Hf |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 259: | Line 259: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub> |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 278: | Line 278: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | In |
| <br> |
| <br> |
||
| <br> |
| <br> |
||
Line 297: | Line 297: | ||
| <br> |
| <br> |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ir |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 316: | Line 316: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | ITO |
| |
| |
||
| |
| |
||
Line 335: | Line 335: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Mo |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 354: | Line 354: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Nb |
| |
| |
||
| |
| |
||
Line 373: | Line 373: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ni |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 392: | Line 392: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Pd |
| |
| |
||
| |
| |
||
Line 411: | Line 411: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Pt |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 430: | Line 430: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ru |
| |
| |
||
| |
| |
||
Line 449: | Line 449: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Si |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 468: | Line 468: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | SiN |
| |
| |
||
| |
| |
||
Line 487: | Line 487: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub> |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 506: | Line 506: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | SiO<sub>x</sub>N<sub>y</sub> |
| |
| |
||
| |
| |
||
Line 525: | Line 525: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Sn |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 544: | Line 544: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub> |
| |
| |
||
| |
| |
||
Line 563: | Line 563: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ta |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 582: | Line 582: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub> |
| |
| |
||
| |
| |
||
Line 601: | Line 601: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Ti |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 620: | Line 620: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | TiN |
| |
| |
||
| |
| |
||
Line 639: | Line 639: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub> |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 658: | Line 658: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | V |
| |
| |
||
| |
| |
||
Line 677: | Line 677: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | W |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 696: | Line 696: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Zn |
| |
| |
||
| |
| |
||
Line 715: | Line 715: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | ZnO<sub>2</sub> |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 734: | Line 734: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | Zr |
| |
| |
||
| |
| |
||
Line 753: | Line 753: | ||
| |
| |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub> |
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
Line 772: | Line 772: | ||
| bgcolor="EEFFFF" | |
| bgcolor="EEFFFF" | |
||
|- |
|- |
||
− | ! |
+ | ! bgcolor="#D0E7FF" align="center" | '''Material''' |
− | | |
+ | | bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[E-Beam 3 (Temescal)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[E-Beam 4 (CHA)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Sputter 1 (Custom)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Sputter 2 (SFI Endeavor)|Sputter 2<br>(SFI Endeavor)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Sputter 3 (ATC 2000-F)|Sputter 3<br>(ATC 2000-F)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Sputter 4 (ATC 2200-V)|Sputter 4<br>(ATC 2200-V)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Sputter 5 (Lesker AXXIS)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Thermal Evap 1]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Thermal Evap 2 (Solder)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[PECVD 1 (PlasmaTherm 790)|PECVD 1<br>(PlasmaTherm 790)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam<br>Deposition (Tool)]] |
− | | |
+ | | bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]] |
|} |
|} |