Difference between revisions of "Vacuum Deposition Recipes"

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! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]'''
 
! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[PECVD Recipes|Plasma Enhanced Chemical<br>Vapor Deposition (PECVD)]]'''
 
! width="90" bgcolor="#D0E7FF" align="center" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]'''
 
! width="90" bgcolor="#D0E7FF" align="center" | '''[[Atomic Layer Deposition Recipes|Atomic Layer Deposition]]'''
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! width="100" bgcolor="#D0E7FF" align="center" | '''[[Ion-Beam Deposition Recipes|Ion-Beam Deposition (IBD)]]'''
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! width="100" bgcolor="#D0E7FF" align="center" | '''[[Ion Beam Deposition Recipes|Ion Beam Deposition (IBD)]]'''
 
! width="100" bgcolor="#D0E7FF" align="center" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''
  
! width="100" bgcolor="#D0E7FF" align="center" | '''[[Molecular Vapor Deposition Recipes|Molecular Vapor Deposition]]'''
 
|-
  
|-
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! width="75" bgcolor="#D0E7FF" align="center" | '''Material'''
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! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
 
| width="65" bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]]
 
| width="65" bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]]
 
| width="65" bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]]
 
| width="65" bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]]
 
| width="65" bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]]
 
| width="65" bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]]
 
| width="65" bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]]
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| width="65" bgcolor="#DAF1FF" |
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| width="65" bgcolor="#DAF1FF" | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]]
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| width="65" bgcolor="#DAF1FF" |
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| width="65" bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam<br>Deposition (Tool)]]
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| width="65" bgcolor="#DAF1FF" |
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| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
 
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! width="75" bgcolor="#D0E7FF" align="center" | SiO<sub>x</sub>N<sub>y</sub>
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! width="75" bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
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! width="75" bgcolor="#D0E7FF" align="center" | '''Material'''
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! bgcolor="#D0E7FF" align="center" | '''Material'''
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| width="65" bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]]
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| bgcolor="#DAF1FF" | [[E-Beam 1 (Sharon)]]
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| width="65" bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]]
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| bgcolor="#DAF1FF" | [[E-Beam 2 (Custom)]]
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| width="65" bgcolor="#DAF1FF" | [[E-Beam 3 (Temescal)]]
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| bgcolor="#DAF1FF" | [[E-Beam 3 (Temescal)]]
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| width="65" bgcolor="#DAF1FF" | [[E-Beam 4 (CHA)]]
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| bgcolor="#DAF1FF" | [[E-Beam 4 (CHA)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputter 1 (Custom)]]
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| bgcolor="#DAF1FF" | [[Sputter 1 (Custom)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputter 2 (SFI Endeavor)|Sputter 2<br>(SFI Endeavor)]]
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| bgcolor="#DAF1FF" | [[Sputter 2 (SFI Endeavor)|Sputter 2<br>(SFI Endeavor)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputter 3 (ATC 2000-F)|Sputter 3<br>(ATC 2000-F)]]
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| bgcolor="#DAF1FF" | [[Sputter 3 (ATC 2000-F)|Sputter 3<br>(ATC 2000-F)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputter 4 (ATC 2200-V)|Sputter 4<br>(ATC 2200-V)]]
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| bgcolor="#DAF1FF" | [[Sputter 4 (ATC 2200-V)|Sputter 4<br>(ATC 2200-V)]]
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| width="65" bgcolor="#DAF1FF" | [[Sputter 5 (Lesker AXXIS)]]
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| bgcolor="#DAF1FF" | [[Sputter 5 (Lesker AXXIS)]]
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| width="65" bgcolor="#DAF1FF" | [[Thermal 1]]
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| bgcolor="#DAF1FF" | [[Thermal Evap 1]]
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| width="65" bgcolor="#DAF1FF" | [[Thermal 2]]
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| bgcolor="#DAF1FF" | [[Thermal Evap 2 (Solder)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD 1 (PlasmaTherm 790)|PECVD 1<br>(PlasmaTherm 790)]]
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| bgcolor="#DAF1FF" | [[PECVD 1 (PlasmaTherm 790)|PECVD 1<br>(PlasmaTherm 790)]]
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| width="65" bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]]
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| bgcolor="#DAF1FF" | [[PECVD 2 (Advanced Vacuum)|PECVD 2<br>(Advanced Vacuum)]]
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| width="65" bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]]
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| bgcolor="#DAF1FF" | [[Unaxis VLR ICP-PECVD]]
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| width="65" bgcolor="#DAF1FF" | [[Atomic Layer Deposision (Oxford FlexAL)|Atomic Layer Deposision]]
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| bgcolor="#DAF1FF" | [[Atomic Layer Deposition (Oxford FlexAL)|Atomic Layer Deposition (Tool)]]
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| width="65" bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam Deposition]]
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| bgcolor="#DAF1FF" | [[Ion Beam Deposition (Veeco NEXUS)|Ion Beam<br>Deposition (Tool)]]
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| width="65" bgcolor="#DAF1FF" | [[Molecular Vapor Deposition]]
 +
| bgcolor="#DAF1FF" | [[Molecular Vapor Deposition|Molecular Vapor Deposition (Tool)]]
 
|}
  
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Revision as of 13:44, 18 July 2012

Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Ion Beam Deposition (IBD) Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Thermal Evap 1 Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Ion Beam
Deposition (Tool) 		Molecular Vapor Deposition (Tool)
Ag
Al
















Al2O3
AlN
















Au
B
















Co
Cr
















Cu
Fe
















Ge
Hf
















HfO2
In
















Ir
ITO
Mo
Nb
Ni
Pd
Pt
Ru
Si
SiN Y Y
SiO2 Y Y
SiOxNy
Sn
SrF2
Ta
Ta2O5
Ti
TiN
TiO2
V
W
Zn
ZnO2
Zr
ZrO2
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Thermal Evap 1 Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Ion Beam
Deposition (Tool) 		Molecular Vapor Deposition (Tool)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=1205"