Tube Furnace (Tystar 8300)
The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:
- SOG curing - Tube 1
- Dry or wet oxidation of silicon - Tubes 2 and 3
- General furnace annealing - Tube 3
Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.
Use the BYU Thermal Oxidation Calculator to determine the time and temperature that will be necessary for your process needs. Keep in mind that all process must be 30 minutes in length at a minimum. Processes less than 30 minutes will suffer from poor uniformity because the process tube will not have sufficient time to saturate with O2 or DI-H2O.
Tube 1 - SOG425.001
Tube 2 - WET1050.002, DRY1050.002, WETVAR.002, DRYVAR.002
Tube 3 - WET1050.003, DRY1050.003, WETVAR.003, DRYVAR.003, ANNEAL.003
- Tystar - Manufacturer of the tool
- Silicon Thermal Oxide Thickness Calculator - Use this on-line calculator to calculate times for silicon oxidation.