Thermal Evaporation Recipes

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Materials Table

Materials Table
Material	Symbol	Density, g/cm3	Z Ratio	Tooling, %	Current, Amp	Dep.rate, A/sec	Comments
Aluminum	Al	2.70	8.17	95	85	1	Used often
Chromium	Cr	7.20	28.95	95	85	2	Used often
Cobalt	Co	8.71	25.74
Copper	Cu	8.93	20.21	100			Used often
Gold	Au	19.32	23.18	101.2	122	5	Used often
Gold/Palladium	Au.5/Pd.5	15.86	23.96
Gold/Palladium	Au.5/Pd.4	16.40	23.80
Gold/Zinc	Au.95/Zn.05	18.72	22.89	101.2
Gold/Zinc	Au.90/Zn.10	18.07	22.58
Magnezium	Mg	1.74	5.48	98.4
Manganese	Mn	7.20	23.40	120	100
Nickel	Ni	8.90	26.68	100	50	4.5	Used often
Nichrome	NiCr	8.32	27.59		100	0.4
Palladium	Pd	12.40	24.73	140.5	62	1.5	Used often
Silicon Monoxide	SiO	2.13	10.19	120 Thermal Evap 2 (Solder) Materials Table Materials Table Material Symbol Density, g/cm3 Z Ratio Tooling, % Comments Aluminum Al 2.70 1.08 Antimony Sb 6.620 0.768 Arsenic As 5.73 0.996 Beryllium Be 1.85 0.543 Boron B 2.54 0.389 Cadmium Cd 8.64 0.682 Cadmium sulfide CdS 4.83 1.02 Cadmium telluride CdTe 5.85 0.980 Calcium fluoride CaF2 3.18 0.775 Used often Carbon (graphite) C 2.25 3.26 Chromium Cr 7.20 0.305 155 Used often Cobalt Co 8.71 0.343 Copper Cu 8.93 0.437 Gallium Ga 5.93 0.593 Gallium Arsenide GaAs 5.31 1.59 Germanium Ge 5.35 0.516 Gold Au 19.30 0.381 Used often Indium In 7.30 0.841 120 Used often Indium antimonide InSb 5.76 0.769 Iridium Ir 22.4 0.129 Iron Fe 7.86 0.349 Lead Pb 11.3 1.13 Lead sulfide PbS 7.50 0.566 Lithium fluoride LiF 2.638 0.778 Magnesium Mg 1.74 1.61 Magnesium oxide MgO 3.58 0.411 Magnesium Fluoride MgF2 3.00 ( should be 3.18) 0.427( should be 0.637) Manganese Mn 7.20 0.377 Manganese(II) Sulfide MnS 3.99 0.94 Mercury Hg 13.46 0.74 Molybdenum Mo 10.2 0.257 Nickel Ni 8.91 0.331 Used often Niobium Nb 8.578 0.492 Niobium(V) Oxide Nb2O5 4.47 *1.00 *z ratio has not been established Palladium Pd 12.0 0.357 Platinum Pt 21.4 0.245 Potasium Cloride KCl 1.98 2.05 Selenium Se 4.82 0.864 Silicon Si 2.32 0.712 Silicon(II) Oxide SiO 2.13 0.87 Silicon dioxide (fused quarz) SiO2 2.20 1.07 Silver Ag 10.5 0.529 Silver bromide AgBr 6.47 1.18 Silver chloride AgCl 5.56 1.32 Sodium Na 0.97 4.8 Sodium chloride NaCl 2.17 1.57 Tantalum Ta 16.6 0.262 Tantalum(IV) oxide Ta2O5 8.2 0.30 Tin Sn 7.30 0.724 Used often Titanium Ti 4.50 0.628 Used often Titanium (IV) Oxide TiO2 4.26 0.40 Titanium Oxide TiO 4.90 *1.00 * z ratio not established Tungsten W 19.3 0.163 Tungsten carbide WC 15.6 0.151 Zinc Zn 7.04 0.514 Used often Zinc Oxide ZnO 5.61 0.556 Zinc Sulfide ZnS 4.09 0.775 Zirconium Zr 6.51 0.60 Should be 6.49 Zirconium Oxide ZrO2 5.6 1.001