Difference between revisions of "Thermal Evaporation Recipes"
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{{recipes|Vacuum Deposition}} |
{{recipes|Vacuum Deposition}} |
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− | =[[Thermal Evap 1]]= |
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− | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
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− | |- |
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− | ! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
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− | |- bgcolor="#D0E7FF" |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3''' |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Current, Amp''' |
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− | ! width="45" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec''' |
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− | ! width="100" bgcolor="#D0E7FF" align="center" | '''Comments''' |
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− | |- |
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− | |Aluminum |
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− | |Al |
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− | |2.70 |
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− | |8.17 |
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− | |95 |
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− | |85 |
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− | |1 |
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− | |Used often |
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− | |- |
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− | |Chromium |
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− | |Cr |
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− | | 7.20 |
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− | | 28.95 |
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− | |95 |
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− | |85 |
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− | |2 |
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− | |Used often |
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− | |- |
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− | |Cobalt |
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− | |Co |
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− | |8.71 |
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− | |25.74 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Copper |
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− | |Cu |
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− | |8.93 |
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− | |20.21 |
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− | |100 |
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− | | |
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− | | |
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− | |Used often |
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− | |- |
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− | |Gold |
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− | |Au |
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− | |19.32 |
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− | |23.18 |
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− | |101.2 |
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− | |122 |
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− | |5 |
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− | |Used often |
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− | |- |
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− | |Gold/Palladium |
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− | |Au.5/Pd.5 |
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− | |15.86 |
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− | |23.96 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Gold/Palladium |
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− | |Au.5/Pd.4 |
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− | |16.40 |
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− | |23.80 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Gold/Zinc |
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− | |Au.95/Zn.05 |
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− | |18.72 |
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− | |22.89 |
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− | |101.2 |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Gold/Zinc |
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− | |Au.90/Zn.10 |
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− | |18.07 |
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− | |22.58 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Magnezium |
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− | |Mg |
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− | |1.74 |
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− | |5.48 |
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− | |98.4 |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Manganese |
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− | |Mn |
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− | |7.20 |
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− | |23.40 |
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− | |120 |
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− | |100 |
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− | | |
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− | | |
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− | |- |
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− | |Nickel |
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− | |Ni |
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− | |8.90 |
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− | |26.68 |
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− | |100 |
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− | |50 |
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− | |4.5 |
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− | |Used often |
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− | |- |
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− | |Nichrome |
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− | |NiCr |
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− | |8.32 |
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− | |27.59 |
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− | | |
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− | |100 |
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− | |0.4 |
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− | | |
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− | |- |
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− | |Palladium |
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− | |Pd |
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− | |12.40 |
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− | |24.73 |
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− | |140.5 |
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− | |62 |
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− | |1.5 |
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− | |Used often |
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− | |- |
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− | |Silicon Monoxide |
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− | |SiO |
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− | |2.13 |
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− | |10.19 |
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− | |120 |
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− | |70 |
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− | | |
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− | | |
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− | |- |
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− | |Silver |
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− | |Ag |
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− | |10.5 |
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− | |16.69 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Zinc |
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− | |Zn |
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− | |7.14 |
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− | |17.18 |
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− | | |
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− | |50 |
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− | |4.5 |
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− | |Used often |
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− | |- |
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− | |Zinc Oxide |
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− | |ZnO |
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− | |5.61 |
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− | |15.88 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |StrontiumFluoride |
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− | |SrF<sub>2 |
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− | |4.28 |
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− | |12.15 |
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− | |200 |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Iron |
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− | |Fe |
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− | |7.86 |
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− | |25.30 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |ITO(IndiumTinOxide) |
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− | |In<sub>2</sub>O<sub>3</sub> - SnO<sub>2</sub> |
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− | |6.43-7.14 |
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− | |0.841 |
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− | | |
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− | | |
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− | | |
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− | | |
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− | |- |
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− | |Permalloy |
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− | |Ni<sub>0.1</sub>Fe<sub>0.2 |
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− | |8.7 |
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− | |26.40 |
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− | | |
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− | |140 |
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− | |0.1 |
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− | | |
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− | |- |
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= Materials Table = |
= Materials Table = |
Revision as of 13:52, 31 March 2014
Back to Vacuum Deposition Recipes.