Difference between revisions of "Thermal Evap 2 (Solder)"

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= About  =
 
= About  =
 
=Detailed Specifications=
 
*Standard 18" bell jar pumped by 8" Varian cryopump (HV8) driven by Ebara 2.1 compressor
 
*Low E-7 Torr ultimate pressure
 
*Rate Monitor: Maxtek TM-300
 
*Typical material rates: Al - 1 A/s @ 85 amps
 
**Au - 5 A/s @ 122 amps
 
**Cr - 2 A/s @ 85 amps
 
**Zn - 4.5 A/s @ 50 amps
 
  
 
= Materials Table =
 
= Materials Table =

Revision as of 16:08, 28 August 2012

Thermal Evap 2 (Solder)
Thermal2.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description ?
Manufacturer Custom
Vacuum Deposition Recipes
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About

Materials Table