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Revision as of 06:15, 25 June 2022 by John d (talk | contribs) (ASML update)
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Important Announcements

ASML stabilizing

All systems are up and running. New Temp Ctl Unit installed & stabilizing. We will run wafer cals on Monday. We expect system to be ready for use by the end of the day Monday.

New computer and new Mains Power supply have been installed, along with one rack CPU board that failed - these are all operating nominally so far. Nanofiles sync & JobCreator will be reinstituted later next week/following week. All user jobs have be copied over. // John d 06:15, 25 June 2022 (PDT)

Face-Masks Optional as of June 13

You are not required to wear a mask in UC buildings at this time. You are also not required to wear a mask in the Nanofab if desired.

We will still provide masks at the metal table in front of the cleanroom entry. See the UCSB announcement at this link.

See the full policies at COVID-19_User_Policies // John d 11:20, 13 June 2022 (PDT)

PureStrip Bath Heater UP

The temperature controller on the PureStrip vertical bath in Bay 4 acid bench has been replaced, it is ready for use. // John d 08:29, 21 June 2022 (PDT)

Unaxis-Dep: Up

New bottle of Deuterated Silane (SiD4) has been installed, we've qualified the SiO2 process and it looks good. Films are ready to use. // John d 10:11, 17 June 2022 (PDT)

Gasonics Down

Leak in main chamber, tool is down. // John d 14:35, 27 May 2022 (PDT)

New EBL Rates

Effective Dec.1, 2021, all of our electron beam lithography rates are lowered. The new rates are as follows:

Industrial Users: $405/hour

UC Academic Users: $126/hour

Non-UC Academic Users: $150/hour

UCSB CNSI Incubator USers: $260/hour

//Thibeault 12:21, 9 December 2021 (PST)