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Equipment Status

UCSB Flu Vaccination Mandate

UCSB Students, Staff and Faculty are required to recieve a Flu Vaccine by Nov. 1st.
Please see the COVID19 Page for relevant links and information. // John d 19:47, 13 October 2020 (PDT)

PEii Technics CF4: Down

The CF4/O2 PE-ii Technics etcher is down, we are awaiting replacement parts. // John d 19:47, 13 October 2020 (PDT)

NanoFab COVID Response

Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.

Contact the Lab Director for more information.

The most recent COVID Protocols can be found at COVID-19_User_Policies.

// John d 15:00, 19 July 2020 (PDT)

New Tool Installations

See the News Feed for info on two upcoming tool installations! The Raith Velion FIB is up and running, we are eagerly awaiting Dr. Dan Read's arrival to bring this tool to life. See the Velion's Tool page here.

The Heidelberg MLA150 Maskless Aligner has been installed, and is in the process of being qualified/characterized. See the MLA150's tool page here.

// John d 17:48, 2 June 2020 (PDT)


The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.

// Thibeault 14:22, 26 March 2020 (PDT)

GCA Autostep Maintenance

3C will be performing stepper maintenance starting the morning of October 23, 2020. The service will be completed in the afternoon Sunday October 25th. Please plan your process accordingly.

Silva 08:19, 23 October 2020 (PDT)

GCA 6300 Maintenance

The 6300 will be down the morning and afternoon Monday October 26, 2020 for maintenance. Please plan your process accordingly.

Silva 08:19, 23 October 2020 (PDT)