Template:Announcements

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Equipment Status



ASML Maintenance: March 30th

ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)

Unaxis ICP-PECVD

The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)