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Equipment Status

GCA 6000 March Maintenance

The GCA 6300 will be down for maintenance beginning 8:30am Monday March 9, 2020 until 6:30pm March 11, 2020. Silva 10:40, 10 February 2020 (PST)

GCA Autostep 200 March Maintenance

The Autostep 200 will be down for maintenance the morning of March 12, 2020 until late afternoon the same day. Silva 10:40, 10 February 2020 (PST)

SignupMonkey Testing: Mon. Feb 17th, 7am

We will be running tests on the SignupMonkey servers at 7am on Friday Feb. 17th (delayed from previous). This may cause temporary outages of the server at this time. // John d 10:52, 12 February 2020 (PST)

ASML Maintenance: March 30th

ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)


The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)

Suss Bonder

Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)