From UCSB Nanofab Wiki
Revision as of 07:46, 10 October 2019 by Silva (talk | contribs)
Jump to navigation Jump to search

Equipment Status

Thermal Evaporator#1

Thermal Evaporator#1 will be DOWN on Monday October 14th and Tuesday 15th for a CHA vacuum controller upgrade. If all goes well the system will be up and running late Tuesday afternoon. Silva 07:46, 10 October 2019 (PDT)

ASML Stepper #3: DOWN

Failure of the Temperature Control Unit on the ASML. This unit controls the lens and stage temperatures among other things. Please see emails for updates. // John d 13:15, 4 October 2019 (PDT)

Suss Bonder

Suss Bonder is DOWN. The vendor installed all the hardware but failed to get the software to work. The vendor will be back sometime next week, the week of the 16th, to complete the repair/upgrade. Silva 15:59, 13 September 2019 (PDT)