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UCSB NanoFab Announcements
Announcements
There are no general announcements at this time. // Posted: 09:58, 4 January 2018 (PST)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
ASML: Up
ASML Stepper #3 periodic maintenance is complete. System is ready for use. // Posted: 18:52, 10 February 2018 (PST)
JEOL SEM #2: Up
System is up, gate valve fixed. // Posted: 16:01, 13 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)