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Revision as of 23:07, 27 September 2020 by John d (talk | contribs) (deleted ICP1 and IBD messages)
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Equipment Status

NanoFab COVID Response

Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.

Contact the Lab Director for more information.

The most recent COVID Protocols can be found at COVID-19_User_Policies.

// John d 15:00, 19 July 2020 (PDT)

New Tool Installations

See the News Feed for info on two upcoming tool installations! We have a Raith Velion FIB and a Heidelberg MLA150 Maskless Aligner on the way.

// John d 17:48, 2 June 2020 (PDT)


The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.

// Thibeault 14:22, 26 March 2020 (PDT)