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Revision as of 08:37, 24 May 2019 by John d (talk | contribs) (lab open, deleted exhaust shutdown)
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Equipment Status

Lab is OPEN

Campus facilities finished the exhaust fan install sooner than expected. Cleanroom exhaust is up and running and the lab is safe to enter. // John d 09:37, 24 May 2019 (PDT)

Suss Bonder

Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)

SLR Fluorine ICP Etch

The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. Silva 07:15, 2 May 2019 (PDT)