Difference between revisions of "Template:Announcements"

From UCSB Nanofab Wiki
Jump to: navigation, search
(ASML Maintenance: March 30th)
(Unaxis ICP-PECVD)
Line 27: Line 27:
   
 
===== Unaxis ICP-PECVD =====
 
===== Unaxis ICP-PECVD =====
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool.
+
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.
[[User:Silva|Silva]] 15:04, 19 November 2019 (PST)
+
//[[User:Thibeault|Thibeault]] 14:22, 26 March 2020 (PDT)
   
 
<!---------- end of Equipment Status ------------>
 
<!---------- end of Equipment Status ------------>

Revision as of 14:22, 26 March 2020

Equipment Status



NanoFab Closure: March 17 at 5pm

Following guidelines provided by our Office of Research, we will be closing the UCSB Nanofabrication Facility for regular use, effective Tuesday, March 17 at 5pm. On a limited basis, our Facility can consider access to users to perform “critical activities.”

Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. // John d 11:42, 17 March 2020 (PDT)


ASML Maintenance cancelled

Cancelled until further notice // Thibeault 14:20, 26 March 2020 (PDT)

Unaxis ICP-PECVD

The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. //Thibeault 14:22, 26 March 2020 (PDT)