Difference between revisions of "Template:Announcements"
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| + | Plasmatherm will be upgrading the system software on September 17th. The upgrade will take 3-5 days. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. |
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===== Ebeam#2: heater inoperable ===== |
===== Ebeam#2: heater inoperable ===== |
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the vendor and asked for an "expedited" repair if possible. |
the vendor and asked for an "expedited" repair if possible. |
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// [[User:John d|John d]] 13:51, 25 July 2018 (PDT) |
// [[User:John d|John d]] 13:51, 25 July 2018 (PDT) |
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| − | We are going to upgrade the computer and software on PECVD#1 middle to late september. |
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| − | Once the upgrade is complete, everyone will need to be retrained on the new software. We will send out an email when we know the exact dates. |
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===== RIE#5: SiCl4 Issue ===== |
===== RIE#5: SiCl4 Issue ===== |
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Revision as of 06:38, 15 August 2018
UCSB NanoFab Announcements
PECVD#1: Software Upgrade
Plasmatherm will be upgrading the system software on September 17th. The upgrade will take 3-5 days. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. // John d 06:38, 15 August 2018 (PDT)
Ebeam#2: heater inoperable
The heater is damaged beyond our ability to repair it. We have contacted the vendor and asked for an "expedited" repair if possible. // John d 13:51, 25 July 2018 (PDT)
RIE#5: SiCl4 Issue
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)