Difference between revisions of "Template:Announcements"
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===== PECVD #2: UP with possible High Particulates ===== |
===== PECVD #2: UP with possible High Particulates ===== |
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| + | We are still experiencing high particle counts in the Advanced Vacuum |
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| − | We found an issue that most likely contributed to the high particle |
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| − | + | PECVD process. Our next step is to replace the Silane MFC. I will |
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| + | update you once I have a lead time on the new MFC. Most likely it will |
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| − | release the system for use, but please assume the particle count is |
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| + | take several weeks to receive. Until then, the system is operational |
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| − | still high if running the tool before further notice. I will send out |
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| + | and can be used if your process is not sensitive to high particle |
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| − | an email with the updated particle count Monday afternoon. |
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| + | counts. |
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| − | // [[User:John d|Posted:]] |
+ | // [[User:John d|Posted:]] 13:22, 19 March 2018 (PDT) |
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| − | ===== Stepper #2 Maintenance ===== |
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| − | The vendor will be servicing the GCA Autostep on Thursday March 15, 2018 at 8:00AM. The system will be up and running later that afternoon. Please plan your process accordingly. |
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| − | // [[User:John d|Posted:]] 07:40, 21 February 2018 (PST) |
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| − | ===== Stepper #1 Maintenance Complete ===== |
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| − | 3C is finished with the maintenance on the 6300 and the system is |
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| − | ready to use. Please let us know immediately if you encounter any |
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| − | issues. |
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| − | // [[User:John d|Posted:]] 11:04, 16 March 2018 (PDT) |
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===== Gasonics: Up ===== |
===== Gasonics: Up ===== |
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Revision as of 13:23, 19 March 2018
UCSB NanoFab Announcements
EBeam #4: Down for Upgrades
Down through the week of Monday the 12th, installing new HV/Sweep controller.
Users will need retraining on these new components once the system is back up. // [[User:John d|Posted:] 09:50, 6 March 2018 (PST)
PECVD #2: UP with possible High Particulates
We are still experiencing high particle counts in the Advanced Vacuum PECVD process. Our next step is to replace the Silane MFC. I will update you once I have a lead time on the new MFC. Most likely it will take several weeks to receive. Until then, the system is operational and can be used if your process is not sensitive to high particle counts. // Posted: 13:22, 19 March 2018 (PDT)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)