Difference between revisions of "Template:Announcements"
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// [[User:John d|Posted:] 09:50, 6 March 2018 (PST) |
// [[User:John d|Posted:] 09:50, 6 March 2018 (PST) |
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| − | ===== PECVD #2: |
+ | ===== PECVD #2: Down ===== |
| + | The Advanced Vacuum PECVD#2 is DOWN. We will continue the |
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| + | troubleshooting in the morning. |
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| + | |||
We have established that there is no external atmospheric leaks in the |
We have established that there is no external atmospheric leaks in the |
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system. We still have no explanation for the high particulate count. |
system. We still have no explanation for the high particulate count. |
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The troubleshooting will continue next week. |
The troubleshooting will continue next week. |
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| ⚫ | |||
| − | |||
| − | You can use system but particle counts still extremely high. Do not |
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| − | use if your process is sensitive to particles. |
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| ⚫ | |||
===== Stepper #2 Maintenance ===== |
===== Stepper #2 Maintenance ===== |
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Revision as of 11:03, 16 March 2018
UCSB NanoFab Announcements
EBeam #4: Down for Upgrades
Down through the week of Monday the 12th, installing new HV/Sweep controller.
Users will need retraining on these new components once the system is back up. // [[User:John d|Posted:] 09:50, 6 March 2018 (PST)
PECVD #2: Down
The Advanced Vacuum PECVD#2 is DOWN. We will continue the troubleshooting in the morning.
We have established that there is no external atmospheric leaks in the system. We still have no explanation for the high particulate count. The troubleshooting will continue next week. // Posted: 11:03, 16 March 2018 (PDT)
Stepper #2 Maintenance
The vendor will be servicing the GCA Autostep on Thursday March 15, 2018 at 8:00AM. The system will be up and running later that afternoon. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)
Stepper #1 Maintenance
The GCA 6300 service is going longer than expected. The tool will be down until Thursday 3/15, around early afternoon. // Posted: 08:21, 15 March 2018 (PDT)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)