Difference between revisions of "Template:Announcements"
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<!------------- Announcements ----------------> |
<!------------- Announcements ----------------> |
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| + | We will be performing heater repair on Monday Aug. 18th. System should be ready for use Tuesday. |
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===== PECVD#1: Software Upgrade ===== |
===== PECVD#1: Software Upgrade ===== |
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Plasmatherm will be upgrading the system software on September 17th. The upgrade will take 3-5 days. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. |
Plasmatherm will be upgrading the system software on September 17th. The upgrade will take 3-5 days. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. |
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// [[User:John d|John d]] 06:38, 15 August 2018 (PDT) |
// [[User:John d|John d]] 06:38, 15 August 2018 (PDT) |
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| − | The heater is damaged beyond our ability to repair it. We have contacted |
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| − | the vendor and asked for an "expedited" repair if possible. |
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===== RIE#5: SiCl4 Issue ===== |
===== RIE#5: SiCl4 Issue ===== |
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Revision as of 11:28, 18 August 2018
UCSB NanoFab Announcements
Ebeam#2: heater repair scheduled
We will be performing heater repair on Monday Aug. 18th. System should be ready for use Tuesday. // John d 11:28, 18 August 2018 (PDT)
PECVD#1: Software Upgrade
Plasmatherm will be upgrading the system software on September 17th. The upgrade will take 3-5 days. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. // John d 06:38, 15 August 2018 (PDT)
RIE#5: SiCl4 Issue
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)